Device to increase deposition uniformity in spatial ALD processing chamber
Susceptor assemblies comprising a susceptor with a top surface with a plurality of recesses and a bottom surface are described. A heater is positioned below the susceptor to heat the susceptor. A shield is positioned between the bottom surface of the susceptor and the heater. The shield increases deposition uniformity across the susceptor.
1. A susceptor assembly comprising:
a susceptor with a top surface and a bottom surface, the top surface having a plurality of recesses formed therein, the recesses sized to support a substrate during processing;
a heater positioned below the susceptor to heat the susceptor, the heater is not an induction heater; and
a shield positioned between the bottom surface of the susceptor and the heater, the shield increasing deposition uniformity across the susceptor.
2. The susceptor assembly of claim 1 , wherein the shield comprises a plurality of shield segments, each segment positioned in a region between the recesses.
3. The susceptor assembly of claim 2 , wherein each of the shield segments is wedge-shaped extending radially from a center of the susceptor.
4. The susceptor assembly of claim 2 , wherein each of the shield segments is contoured to have a shape similar to a shape of the recesses.
5. The susceptor assembly of claim 4 , wherein the shield segments cover more of a leading edge of a recess than a trailing edge of an adjacent recess.
6. The susceptor assembly of claim 2 , wherein each of the shield segments is aligned with a recess and extends from a region inside an inner edge of a recess toward a center of the recess.
7. The susceptor assembly of claim 1 , wherein the shield is ring shaped with an inner edge and an outer edge, the inner edge closer to a center of the susceptor than the outer edge.
8. The susceptor assembly of claim 7 , wherein the shield comprises a plurality of protrusions extending inwardly from the inner edge.
9. The susceptor assembly of claim 8 , wherein at least some of the plurality of protrusions comprises an opening to allow a suspension rod to pass therethrough.
10. The susceptor assembly of claim 7 , wherein the inner edge of the shield is positioned within a first quarter of a width of the recesses.
11. The susceptor assembly of claim 7 , wherein the outer edge of the shield is positioned within a second half of a width of the recesses.
12. The susceptor assembly of claim 7 , wherein the inner edge of the shield is positioned within a first quarter of a width of the recesses, and the outer edge of the shield is positioned within a fourth quarter of the width of the recesses.
13. The susceptor assembly of claim 7 , wherein a distance from the inner edge of the shield to the outer edge of the shield covers at least about ⅔ of a width of the recesses.
14. The susceptor assembly of claim 1 , wherein the shield is made from one or more of stainless steel, aluminum oxide or aluminum nitride.
15. The susceptor assembly of claim 1 , wherein the shield is positioned a distance from the bottom surface of the susceptor to form a gap in a range of about 0.25 mm to about 6 mm.
16. The susceptor assembly of claim 15 , wherein the heater is spaced in a range of about 30 mm to about 80 mm from the shield.
17. The susceptor assembly of claim 1 , further comprising a plurality of suspension rods connected to the susceptor, the suspension rods supporting the shield and maintaining a gap between the shield and the susceptor.
18. The susceptor assembly of claim 17 , wherein each of the suspension rods comprises a shoulder screw to connect the shield to the suspension rods.
19. A susceptor assembly comprising:
a susceptor with a top surface and a bottom surface, the top surface having a plurality of recesses formed therein, the recesses sized to support a substrate during processing;
a heater positioned below the susceptor to heat the susceptor, the heater is not an induction heater;
a shield positioned between the bottom surface of the susceptor and the heater, the shield comprising a plurality of shield segments, each shield segment positioned in a region between the recesses and increasing deposition uniformity across the susceptor, each shield segment is contoured to have a shape similar to a shape of the recesses and cover more of a leading edge of a recess than a trailing edge of an adjacent recess, each shield segment including a plurality of openings therethrough; and
a plurality of suspension rods connected to the susceptor and passing through the plurality of openings in the shield segments to support the shield segments and maintain a gap between the shield segments and the susceptor.
20. A susceptor assembly comprising:
a susceptor with a top surface and a bottom surface, the top surface having a plurality of recesses formed therein, the recesses sized to support a substrate during processing;
a heater positioned below the susceptor to heat the susceptor, the heater is not an induction heater; and
a shield positioned between the bottom surface of the susceptor and the heater, the shield increasing deposition uniformity across the susceptor, the shield having a ring shape with an inner edge and an outer edge, the inner edge closer to a center of the susceptor than the outer edge, the shield including a plurality of protrusions extending inwardly from the inner edge, each protrusion having an opening therethrough, a distance from the inner edge of the shield to the outer edge of the shield covers at least about ⅔ of a width of the recess; and
a plurality of suspension rods connected to the susceptor, the suspension rods supporting the shield and maintaining a gap between the shield and the susceptor, each of the suspension rods passing through an opening in the shield.