Low capacitance transient voltage suppressor

1. A transient voltage suppressing (TVS) device comprising:

a first finger of semiconductor regions and a second finger of semiconductor regions arranged laterally along a first direction on a major surface of a semiconductor layer and adjacent to each other laterally in the semiconductor layer, the first finger and second finger extending in a second direction orthogonal to the first direction on the major surface of the semiconductor layer, the semiconductor regions in a first portion of the first and second fingers forming a silicon controlled rectifier and the semiconductor regions in a second portion of the first and second fingers forming a P-N junction diode, the first and second fingers defining a current conducting region between the fingers;

the first finger comprising a first doped region of a first conductivity type housed in a well region of a second conductivity type opposite the first conductivity type, and a second doped region of the second conductivity type arranged lengthwise in the first finger in the second direction; and

the second finger comprising a first doped region of the second conductivity type housed in a well region of the first conductivity type, and a second doped region of the first conductivity type arranged lengthwise in the second finger in the second direction.

2. The TVS device of claim 1 , wherein the current conducting region of the first and second fingers includes a first current path of the silicon controlled rectifier and a second current path of the P-N junction diode, the first current path of the silicon controlled rectifier being separated from the second current path of the P-N junction diode in the current conducting region in the second direction orthogonal to the first direction on the major surface of the semiconductor layer.

3. The TVS device of claim 1 , wherein the first doped regions and the well regions of the first and second fingers form the silicon controlled rectifier and the second doped regions of the first and second fingers form the P-N junction diode.

4. The TVS device of claim 1 , wherein the semiconductor regions of the first finger of the first type are electrically connected to a reference node and the semiconductor regions of the second finger are electrically connected to a protected node.

5. The TVS device of claim 1 , wherein the second doped region of the first finger overlaps the well region of the first finger at a first end of the well region; and the second doped region of the second finger overlaps the well region of the second finger at a first end of the well region.

6. The TVS device of claim 5 , wherein the first finger further comprises a third doped region of the second conductivity type formed overlapping the well region at a second end of the well region, the second end being opposite the first end lengthwise along the first finger; and wherein the second finger further comprises a fourth doped region of the first conductivity type formed overlapping the well region at a second end of the well region of the second finger, the second end being opposite the first end lengthwise along the second finger.

7. The TVS device of claim 1 , wherein the first doped region of the second finger comprises a pair of separated doped regions arranged laterally in the first direction and extending lengthwise in the second direction in the well region of the second finger.

8. The TVS device of claim 7 , wherein:

the second doped region of the first finger overlaps the well region of the first finger at a first end of the well region; and

the second doped region of the second finger further comprises an extended portion extending through the well region between the pair of separated doped regions in the second finger; the extended portion of the second doped region extending from a first end of the well region to a second end of the well region of the second finger, the second end being opposite the first end lengthwise along the second finger.

9. The TVS device of claim 8 , further comprising:

in the second finger, a plurality of butting contacts formed over and connected to the pair of separated doped regions and the extended portion of the second doped region formed therebetween.

10. The TVS device of claim 8 , wherein the first finger further comprises a third doped region of the second conductivity type formed overlapping the well region at a second end of the well region, the second end being opposite the first end lengthwise along the first finger; and wherein the second finger further comprises a fourth doped region of the first conductivity type formed outside a second end of the well region of the second finger and connected to the extended portion of the second doped region of the second finger, the second end being opposite the first end lengthwise along the second finger.

11. The TVS device of claim 7 , further comprising:

a fifth doped region of the first conductivity type formed in the current conducting region between the first finger and the second finger, the fifth doped region having a first portion overlapping the well region of the first finger and a second portion overlapping the well region of the second finger.

12. The TVS device of claim 11 , further comprising:

a plurality of fifth doped region formed in the current conducting region between the first finger and the second finger.

13. The TVS device of claim 1 , wherein the semiconductor layer comprises a semiconductor substrate and an epitaxial layer of the second conductivity type formed on the semiconductor substrate, the epitaxial layer being lightly doped.

14. The TVS device of claim 1 , wherein the first conductivity type comprises N-type conductivity and the second conductivity type comprises P-type conductivity.

15. The TVS device of claim 1 , wherein the well region in each of the first and second fingers is extended to house the second doped region in each finger.

16. The TVS device of claim 1 , further comprising:

a sixth doped region of the first conductivity type formed in the current conducting region between the first finger and the second finger, the sixth doped region having a first portion overlapping the well region of the first finger and a second portion overlapping the well region of the second finger.

17. The TVS device of claim 16 , further comprising:

a plurality of sixth doped region formed in the current conducting region between the first finger and the second finger.

18. The TVS device of claim 1 , wherein the first doped region of the first finger comprises an extension portion and the well region of the first finger comprises an extension portion surrounding the extension portion of the first doped region, the extension portions extending into the current conducting region between the first finger and the second finger, the current conducting region between the first finger and the second finger having a first spacing outside of the extension portions, and the current conducting region between the extension portions having a second spacing narrower than the first spacing.

19. The TVS device of claim 1 , further comprising:

a polysilicon gate formed on a gate dielectric layer and encircling the first doped region of the first finger, the polysilicon gate being formed in the well region of the first finger; and

a seventh doped region of the first conductivity type formed on an outer side of the polysilicon gate, the seventh doped region overlapping the well region of the first finger and extending through the current conducting region to overlap the well region of the second finger,

wherein the polysilicon gate, the first doped region and the seventh doped region formed an MOS transistor.

20. The TVS device of claim 1 , further comprising:

a polysilicon gate formed on a gate dielectric layer and adjacent the first doped region of the first finger, the polysilicon gate overlapping the well region of the first finger; and

an eighth doped region of the first conductivity type formed on an outer side of the polysilicon gate in the current conducting region between the first finger and the adjacent second finger,

wherein the polysilicon gate, the first doped region and the eighth doped region formed an MOS transistor.

21. The TVS device of claim 1 , further comprising:

a ninth doped region of the first conductivity type formed in a current conducting region between the first finger and the adjacent second finger and overlapping the well region of the first finger; and

a trench formed adjacent the ninth doped region and being arranged in the direct path between the first finger and the second finger, the trench being filled with a dielectric layer.