IP Library › Granted Patent US 10,504,951
Granted Patent B2
US 10,504,951 · App. 16/101,080 · Granted Dec 10, 2019

Image sensor and imaging apparatus having an array of interference filters

Inventor: Bert Geelen (Leuven, BE)
Assignee: IMEC VZW
H01L27/1462G01J3/0259G01J3/26G01J3/2823G02B5/201H01L27/14643H01L31/02165G01J2003/2826G02B5/285H01L27/14603
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Quick Facts
Patent No.
US 10,504,951
App. No.
16/101,080
Granted
Dec 10, 2019
Kind
B2
Abstract

Example embodiments relate to image sensors and imaging apparatuses. One embodiment includes an image sensor for acquiring an image of an object. The image sensor includes an array of photo-sensitive areas formed on a substrate. Each photo-sensitive area is a continuous area within the substrate and is configured to detect incident light. The image sensor also includes an array of interference filters. Each inference filter is configured to selectively transmit a wavelength band. The array of interference filters is monolithically integrated on the array of photo-sensitive areas. A plurality of the interference filers is associated with a single photo-sensitive area of the array of photo-sensitive areas. Each interference filter in the plurality of interference filters is configured to selectively transmit a unique wavelength band to the photo-sensitive area and each interference filter in the plurality of interference filters is associated with a respective portion of the single photo-sensitive area.

Claims (47)

1. An image sensor for acquiring an image of an object, comprising:

an array of photo-sensitive areas formed on a substrate,

wherein each photo-sensitive area is a continuous area within the substrate, and

wherein each photo-sensitive area is configured to detect incident light; and

an array of interference filters,

wherein each interference filter is configured to selectively transmit a wavelength band,

wherein the array of interference filters is monolithically integrated on the array of photo-sensitive areas,

wherein a plurality of the interference filters is associated with a single photo-sensitive area of the array of photo-sensitive areas, and

wherein each interference filter in the plurality of interference filters is configured to selectively transmit a unique wavelength band to the photo-sensitive area and each interference filter in the plurality of interference filters is associated with a respective portion of the single photo-sensitive area.

2. The image sensor according to claim 1 , wherein the respective portions of the photo-sensitive area are equal in size.

3. The image sensor according to claim 1 , wherein the plurality of interference filters is arranged in a sub-array associated with the single photo-sensitive area.

4. The image sensor according to claim 3 , wherein the plurality of interference filters is arranged in a 2×2 set-up of the sub-array.

5. The image sensor according to claim 1 , wherein each single photo-sensitive area in the array of photo-sensitive areas is associated with a respective plurality of interference filters.

6. The image sensor according to claim 1 ,

wherein each of a first set of photo-sensitive areas is associated with a respective plurality of interference filters, and

wherein each of a second set of photo-sensitive areas is associated with a respective single interference filter.

7. The image sensor according to claim 6 , wherein wavelength transmission characteristics of the respective plurality of interference filters associated with the first set of photo-sensitive areas are different from wavelength transmission characteristics of the respective single interference filters associated with the second set of photo-sensitive areas.

8. The image sensor according to claim 1 , wherein the single photo-sensitive area is configured to output a single value based on intensity of detected light transmitted to the single photo-sensitive area by the plurality of interference filters.

9. The image sensor according to claim 1 , wherein each interference filter comprises a plurality of thin film layers.

10. The image sensor according to claim 9 , wherein the plurality of thin film layers comprises:

two stacks of layers configured to reflect light; and

a transparent layer arranged between the two stacks of layers, wherein a thickness of the transparent layer defines the wavelength band transmitted by the interference filter.

11. The image sensor according to claim 1 , wherein the plurality of interference filters together define a continuous wavelength band transmitted to the photo-sensitive area and control a bandwidth of the continuous wavelength band around a central wavelength.

12. The image sensor according to claim 11 ,

wherein the array of interference filters is configured to define different continuous wavelength bands being transmitted to different photo-sensitive areas, and

wherein the plurality of interference filters associated with the single photo-sensitive area is configured to control the bandwidth of the continuous wavelength band such that equal bandwidths are defined for the different photo-sensitive areas.

13. The image sensor according to claim 1 , wherein the plurality of interference filters defines a spectrum of discrete wavelength bands being transmitted to the single photo-sensitive area.

14. The image sensor according to claim 13 ,

wherein a plurality of interference filters is associated with each of a set of photo-sensitive areas, and

wherein the spectrum of discrete wavelength bands transmitted to the single photo-sensitive area varies randomly between different photo-sensitive areas.

15. An imaging apparatus comprising:

an image sensor for acquiring an image of an object, comprising:

an array of photo-sensitive areas formed on a substrate,

wherein each photo-sensitive area is a continuous area within the substrate, and

wherein each photo-sensitive area is configured to detect incident light; and

an array of interference filters,

wherein each interference filter is configured to selectively transmit a wavelength band,

wherein the array of interference filters is monolithically integrated on the array of photo-sensitive areas,

wherein a plurality of the interference filters is associated with a single photo-sensitive area of the array of photo-sensitive areas, and

wherein each interference filter in the plurality of interference filters is configured to selectively transmit a unique wavelength band to the photo-sensitive area and each interference filter in the plurality of interference filters is associated with a respective portion of the single photo-sensitive area.

16. The imaging apparatus according to claim 15 , wherein the respective portions of the photo-sensitive area are equal in size.

17. The imaging apparatus according to claim 15 , wherein the plurality of interference filters is arranged in a sub-array associated with the single photo-sensitive area.

18. The imaging apparatus according to claim 17 , wherein the plurality of interference filters is arranged in a 2×2 set-up of the sub-array.

19. The imaging apparatus according to claim 15 , wherein each single photo-sensitive area in the array of photo-sensitive areas is associated with a respective plurality of interference filters.

20. The imaging apparatus according to claim 15 ,

wherein each of a first set of photo-sensitive areas is associated with a respective plurality of interference filters, and

wherein each of a second set of photo-sensitive areas is associated with a respective single interference filter.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2018
From: GEELEN, BERT
To: IMEC VZW
Reel/Frame 046852/0917 →
Priority Claims (1)
EP 17188601 · Aug 30, 2017 · regional
Continuity (1)
Related Publication 20190067344A1 · Feb 28, 2019