Interconnect structure for package-on-package devices
An interconnect structure and a method of forming an interconnect structure are provided. The interconnect structure is formed over a carrier substrate, upon which a die may also be attached. Upon removal of the carrier substrate and singulation, a first package is formed. A second package may be attached to the first package, wherein the second package may be electrically coupled to through vias formed in the first package.
1. A semiconductor device comprising:
an integrated circuit die, the integrated circuit die having an active side and a backside, the active side having electrical contacts;
a molding compound adjacent opposing sidewalls of the integrated circuit die;
a protective layer over the backside of the integrated circuit die, the protective layer directly contacting the molding compound;
a die-attach film interposed between the protective layer and the integrated circuit die;
conductors extending through the molding compound; and
solder connectors extending through the protective layer to directly contact the conductors, wherein a height of the solder connectors is greater than a height of the protective layer.
2. The semiconductor device of claim 1 , wherein a surface of the conductors is level with a surface of the molding compound.
3. The semiconductor device of claim 2 , wherein each of the conductors comprise a seed layer and a through via, wherein the seed layer is interposed between the through via and a corresponding solder connector.
4. The semiconductor device of claim 1 further comprising:
a package coupled to the solder connectors; and
an underfill interposed between the protective layer and the package.
5. The semiconductor device of claim 4 , wherein the underfill contacts the solder connectors.
6. The semiconductor device of claim 4 further comprising a redistribution structure, wherein integrated circuit die, the molding compound, and the conductors are interposed between the redistribution structure and the protective layer.
7. The semiconductor device of claim 6 , wherein the conductors electrically couple the package to the integrated circuit die.
8. The semiconductor device of claim 4 , wherein at least a portion of the protective layer is free of the underfill.
9. A semiconductor device comprising:
a first package comprising:
an integrated circuit die, the integrated circuit die having an active side and a backside, the active side having electrical contacts;
a molding compound adjacent sidewalls of the integrated circuit die;
a protective layer over the integrated circuit die and the molding compound, the backside of the integrated circuit die being interposed between the active side and the protective layer, the protective layer having a first side and a second side opposite the first side, the first side of the protective layer being in direct contact with a surface of the molding compound; and
conductors extending through the molding compound, a surface of the conductors being level with the surface of the molding compound;
a second package bonded to the first package using a solder connection, wherein the solder connection directly contacts the surface of the conductors; and
an underfill interposed between the first package and the second package, wherein the underfill directly contacts the solder connection.
10. The semiconductor device of claim 9 , wherein each of the conductors comprise a seed layer and a through via, wherein a surface of the conductors is level with a first surface of the molding compound and a surface of the through via is level with a second surface of the molding compound.
11. The semiconductor device of claim 10 , wherein the solder connection directly contacts the seed layer.
12. The semiconductor device of claim 9 further comprising a die attach film interposed between the integrated circuit die and the protective layer.
13. The semiconductor device of claim 9 , wherein the protective layer directly contacts the solder connection.
14. The semiconductor device of claim 9 , wherein sidewalls of the protective layer are free of the molding compound.
15. The semiconductor device of claim 9 , wherein the protective layer separates the molding compound from the underfill.
16. A semiconductor device comprising:
an integrated circuit die;
a molding compound adjacent sidewalls of the integrated circuit die;
a protective layer over the integrated circuit die and the molding compound, the protective layer being in direct contact with the molding compound; and
conductors extending through the molding compound, a first surface of the conductors being level with a first surface of the molding compound; and
a solder connection extending completely through the protective layer to the conductors, wherein a height of the solder connection is greater than a height of the protective layer.
17. The semiconductor device of claim 16 , wherein a second surface of the conductors is level with a second surface of the molding compound.
18. The semiconductor device of claim 16 , wherein the height of the protective layer is about 1 μm to about 40 μm.
19. The semiconductor device of claim 16 further comprising a redistribution structure coupled to the conductors, wherein the redistribution structure electrically couples the conductors to the integrated circuit die.
20. The semiconductor device of claim 16 , wherein a periphery of the protective layer is coterminus with a periphery of the molding compound.