Package structure and manufacturing method thereof
A package structure includes a first redistribution structure, a die, a plurality of conductive sheets, a plurality of conductive balls, and a first encapsulant. The first redistribution structure has a first surface and a second surface opposite to the first surface. The die has a plurality of connection pads electrically connected to the first surface of the first redistribution structure. The conductive sheets are electrically connected to the first surface of the first redistribution structure. The conductive balls are correspondingly disposed on the conductive sheets and are electrically coupled to the first surface of the first redistribution structure through the conductive sheets. The first encapsulant encapsulates the die, the conductive sheets, and the conductive balls. The first encapsulant exposes at least a portion of each conductive ball.
1. A manufacturing method of a package structure, comprising:
providing a carrier having an adhesive layer thereon;
forming a plurality of conductive sheets on the adhesive layer;
forming a plurality of conductive balls on the plurality of conductive sheets;
placing a plurality of dies on the adhesive layer, wherein each die has a plurality of connection pads, and the plurality of connection pads are embedded within the adhesive layer;
forming a first encapsulant encapsulating the plurality of dies, the plurality of conductive sheets, and the plurality of conductive balls, wherein the first encapsulant exposes at least a portion of each conductive ball;
separating the adhesive layer from the plurality of dies, the plurality of conductive sheets, and the first encapsulant; and
forming a first redistribution structure over the plurality of dies, the plurality of conductive sheets, and the first encapsulant, wherein the first redistribution structure is electrically connected to the plurality of dies and the plurality of conductive sheets.
2. The method of claim 1 , wherein the step of forming the plurality of conductive balls on the plurality of conductive sheets comprises:
placing the plurality of conductive balls on the corresponding conductive sheets; and
performing a reflow process to couple the plurality of conductive balls and the plurality of conductive sheets.
3. The method of claim 1 , further comprising stacking a sub-package on the plurality of conductive balls and the first encapsulant, wherein the sub-package is electrically connected to and in direct contact with the plurality of conductive balls.
4. The method of claim 1 , further comprising forming a second redistribution structure on the first encapsulant opposite to the first redistribution structure, wherein the second redistribution structure is electrically connected to the plurality of conductive balls.
5. The method of claim 4 , further comprising disposing at least one chip, at least one sub-package, at least one passive device, or a combination thereof on the second redistribution structure, wherein the at least one chip, the at least one sub-package, the at least one passive device, or the combination thereof is electrically connected to the second redistribution structure.
6. The method of claim 5 , further comprising encapsulating the at least one chip, the at least one sub-package, the at least one passive device, or the combination thereof by a second encapsulant.
7. The method of claim 1 , further comprising forming a plurality of conductive terminals on the first redistribution structure.
8. The method of claim 1 , wherein the step of forming the first encapsulant comprises:
forming an encapsulation material to fully cover the plurality of dies, the plurality of conductive sheets, and the plurality of conductive balls; and
reducing a thickness of the encapsulation material to form the first encapsulant.