Method for hydrogen-free diamond-like coatings having isolated carbon particle embedded within
Systems and methods herein produce an isolated carbon particle embedded diamond-like carbon (DLC) coating having increased toughness, increased hardness, and enhanced wear resistance. In embodiments, a physical vapor deposition (PVD) chamber houses a pure graphite target at a distance from a substrate, and an in-situ synthesis of isolated carbon particles simultaneous with hydrogen-free DLC coating deposition is provided through unbalanced magnetron sputtering by localized injection of helium gas in a pulse mode with different durations. The resultant coating may include carbon while omitting other elements, and the carbon particles form covalent bonding with the host DLC matrix. Processes disclosed herein are easier to control and manipulate as compared to traditional metal doped DLC coatings.
1. A method comprising:
depositing a hydrogen-free diamond-like carbon (DLC) coating on a substrate; and
simultaneously synthesizing isolated carbon particles with the depositing the hydrogen-free DLC coating producing the DLC coating having isolated carbon particles embedded within the hydrogen-free DLC coating, wherein the synthesizing isolated carbon particles comprises injecting a helium pulse.
2. The method of claim 1 wherein the method is provided via unbalanced magnetron sputtering of a pure graphite target.
3. The method of claim 1 wherein the synthesizing isolated carbon particles controls a carbon particle formation based on at least one of:
a helium pulse position as compared to a plasma plume;
a helium pulse orientation as compared to the plasma plume;
a helium pulse injection duration;
a helium flow rate; and
a distance between a target and the substrate.
4. The method of claim 1 wherein the synthesizing isolated carbon particles controls a carbon particle size based on at least one of:
a helium pulse position as compared to a plasma plume;
a helium pulse orientation as compared to the plasma plume;
a helium pulse injection duration;
a helium flow rate; and
a distance between a target and the substrate.
5. The method of claim 1 wherein the synthesizing isolated carbon particles controls a carbon particle distribution based on at least one of:
a helium pulse position as compared to a plasma plume;
a helium pulse orientation as compared to the plasma plume;
a helium pulse injection duration;
a helium flow rate; and
a distance between a target and the substrate.
6. The method of claim 1 wherein the hydrogen-free DLC coating comprises a plurality of layers, and wherein the isolated carbon particles are embedded within at least two of the plurality of layers.
7. The method of claim 1 wherein the simultaneously synthesizing isolated carbon particles with the depositing the hydrogen-free DLC coating comprises:
controlling an amount of the isolated carbon particles embedded within the hydrogen-free DLC coating by manipulating the helium pulse.
8. The method of claim 1 wherein the simultaneously synthesizing isolated carbon particles with the depositing the hydrogen-free DLC coating comprises:
controlling a size of the isolated carbon particles embedded within the hydrogen-free DLC coating by manipulating the helium pulse.
9. The method of claim 1 , wherein a size of the isolated carbon particles embedded within the hydrogen-free DLC coating is at least one of:
110±20 nm;
250 nm −350 nm;
700 nm; and
agglomeration of 2 μm composed of 100 nm particles.
10. The method of claim 1 wherein the simultaneously synthesizing isolated carbon particles with the depositing the hydrogen-free DLC coating comprises:
controlling an isolation distance between the isolated carbon particles by manipulating the helium pulse.
11. The method of claim 10 wherein the isolation distance is less than 5 μm.
12. The method of claim 10 wherein the isolation distance is between 5 μm and 10 μm.
13. The method of claim 10 wherein the isolation distance is between carbon particles embedded within a same layer.
14. The method of claim 10 wherein the isolation distance is between carbon particles embedded within different layers.
15. The method of claim 1 wherein the isolated carbon particles are embedded within a single layer of the hydrogen-free DLC coating.
16. The method of claim 1 wherein the carbon particles are nano-particles.