Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus
In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting he first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
1. A movable body apparatus, comprising:
a movable body which is movable within a two-dimensional plane including a first axis and a second axis intersecting the first axis, and on which an object is placed;
a mark detection system that is capable of scanning a measurement beam in a direction of the first axis, with respect to a mark of the object placed on the movable body, and capable of receiving a beam from the mark; and
a control system that performs detection of the mark of the object using the mark detection system, wherein the control system:
scans the measurement beam in the direction of the first axis from the mark detection system with respect to the mark of the object while moving the movable body in the direction of the first axis;
detects the mark and measures a positional relationship between the mark and the measurement beam, based on a result of receiving the beam from the mark by the mark detection system, and
performs adjustment of a relative position between the movable body and the measurement beam based on the positional relationship that has been measured.
2. The movable body apparatus according to claim 1 , wherein
the object has the mark serving as a first mark, and a second mark different from the first mark, and
the control system performs the adjustment of the relative position, and detects the second mark while moving the movable body in the direction of the first axis.
3. The movable body apparatus according to claim 2 , wherein
the second mark is a mark that is detected after detection of the first mark.
4. The movable body apparatus according to claim 2 , wherein
the first mark includes two or more marks, and
the control system obtains a positional shift amount for each of the two or more marks, and performs the adjustment of the relative position between the movable body and the measurement beam based on the positional shift amount.
5. The movable body apparatus according to claim 3 , wherein
the first mark includes two or more marks, and
the control system obtains a positional shift amount for each of the two or more marks, and performs the adjustment of the relative position between the movable body and the measurement beam based on the positional shift amount.
6. The movable body apparatus according to claim 1 , wherein
the adjustment of the relative position includes adjustment of the relative position in a direction of the second axis.
7. The movable body apparatus according to claim 4 , wherein
the adjustment of the relative position includes adjustment of the relative position in a direction of the second axis.
8. The movable body apparatus according to claim 5 , wherein
the adjustment of the relative position includes adjustment of the relative position in a direction of the second axis.
9. The movable body apparatus according to claim 1 , further comprising:
a position measurement system capable of measuring position information of the movable body within the two-dimensional plane, wherein
the control system detects position information of the mark using the position measurement system and the mark detection system.
10. The movable body apparatus according to claim 1 , wherein
the mark detection system is capable of detecting the measurement beam irradiated on the mark, and
the control system obtains the positional relationship between the mark and the measurement beam based on a result of detecting the measurement beam.
11. An exposure apparatus, comprising:
the movable body apparatus according to claim 1 , in which an object provided with a mark is placed on the movable body, wherein
the object placed on the movable body is exposed by being irradiated with an energy beam.