Apparatus for reducing optical cross-talk in image sensors
According to one example, a device includes a semiconductor substrate. The device further includes a plurality of color filters disposed above the semiconductor substrate. The device further includes a plurality of micro-lenses disposed above the set of color filters, each micro-lens of the plurality of micro-lenses being configured to direct light radiation. The device further includes a structure that is configured to block light radiation that is traveling towards a region between adjacent micro-lenses. The structure and the color filters are level at respective top surfaces and bottom surfaces thereof.
1. A device comprising:
a semiconductor substrate;
a plurality of color filters disposed above the semiconductor substrate;
a plurality of micro-lenses disposed above the plurality of color filters, each micro-lens of the plurality of micro-lenses being configured to direct light radiation; and
a structure that is configured to block light radiation that is traveling towards a region between adjacent micro-lenses of the plurality of micro-lenses, wherein the structure and the plurality of color filters are at a same level at respective top most surfaces thereof.
2. The device of claim 1 , further comprising: a plurality of pixels on a front surface of the semiconductor substrate, each pixel of the plurality of pixels being configured to sense light radiation.
3. The device of claim 1 , further comprising: a layer positioned between the semiconductor substrate and the plurality of color filters.
4. The device of claim 1 , wherein the plurality of color filters is disposed above a back surface of the semiconductor substrate.
5. The device of claim 1 , wherein the structure is a black photoresist.
6. The device of claim 1 , wherein the structure has a width that is less than or equal to about 0.2 μm.
7. The device of claim 1 , further comprising:
a plurality of interconnect metal layers disposed below a front surface of the semiconductor substrate; and
an inter-metal dielectric disposed between each of the plurality of metal layers.
8. A device, comprising:
a semiconductor substrate;
a plurality of micro-lenses disposed over a back surface of the semiconductor substrate;
an array of color filters disposed between the back surface of the semiconductor substrate and the plurality of micro-lenses;
a light blocking structure having a top most surface that is at a same level with top most surfaces of the array of color filters, the light blocking structure configured to block light radiation traveling towards a region between adjacent micro-lenses of the plurality of micro-lenses.
9. The device of claim 8 , wherein each micro-lens of the plurality of micro-lenses is configured to direct light radiation towards the semiconductor substrate.
10. The device of claim 8 , further comprising: a layer positioned between the plurality of micro-lenses and the back surface of the substrate.
11. The device of claim 10 , wherein the layer is transparent.
12. The device of claim 8 , further comprising: a plurality of pixels on a front surface of the semiconductor substrate, each pixel of the plurality of pixels being configured to sense light radiation.
13. The device of claim 12 , wherein each color filter of the array of color filters is configured to allow a wavelength of light radiation to reach at least one pixel of the plurality of pixels.
14. The device of claim 8 , wherein the light blocking structure is in direct contact with the array of color filters.
15. The device of claim 8 , wherein the plurality of micro-lenses are configured such that a region between adjacent micro-lenses overlies the light blocking structure.
16. The device of claim 8 , further comprising:
a plurality of metal layers disposed over a front surface of the semiconductor substrate; and
an intermetal dielectric disposed between each metal layer of the plurality of metal layers.
17. A method comprising:
forming a plurality of color filters disposed above a semiconductor substrate;
forming a plurality of micro-lenses disposed above the plurality of color filters, each micro-lens of the plurality of micro-lenses being configured to direct light radiation; and
forming a structure that is configured to block light radiation that is traveling towards a region between adjacent micro-lenses of the plurality of micro-lenses, wherein the structure and the plurality of color filters are at a same level at respective top most surfaces and bottom surfaces thereof.
18. The method of claim 17 , further comprising: forming a plurality of pixels on a front surface of the semiconductor substrate, each pixel of the plurality of pixels being configured to sense light radiation.
19. The method of claim 17 , further comprising: forming a layer positioned between the semiconductor substrate and the plurality of color filters.
20. The method of claim 17 , wherein the plurality of color filters is disposed above a back surface of the semiconductor substrate.