Film member having uneven structure
A film member having a concave-convex structure is composed of a base member; a gas barrier layer formed on the base member; and a concave-convex structure layer formed on a surface of the gas barrier layer, wherein the surface of the gas barrier layer is formed of an inorganic material which is same as a material of the concave-convex structure layer, and the concave-convex structure layer is obtained from a precursor solution applied on the gas barrier layer. The film member having the concave-convex structure has an excellent adhesion property between the concave-convex structure layer and the gas barrier layer, and a high barrier property.
1. An organic EL element comprising:
a film member,
a first electrode, an organic layer and a metal electrode which are successively provided on the film member, in which the film member comprises
a base member;
a gas barrier layer formed on the base member; and
a concave-convex structure layer formed on a surface of the gas barrier layer,
wherein the surface of the gas barrier layer is formed of an inorganic material which is same as a material of the concave-convex structure layer, and the concave-convex structure layer is obtained from a precursor solution applied on the gas barrier layer,
wherein the interface between the gas barrier layer and the concave-convex structure layer is flat or smooth, and
wherein the gas barrier layer is a multi-layered film formed by stacking a plurality of layers including an organic material and at least one inorganic material.
2. The organic EL element according to claim 1 , wherein the gas barrier layer is a single layer film.
3. The organic EL element according to claim 1 , wherein:
(i) each of a plurality of convexities and each of a plurality of concavities of the concave-convex structure layer has an elongated shape which extends while winding in a plane view; and
(ii) the plurality of convexities have extending directions, bending directions and lengths which are non-uniform among the plurality of convexities, and the plurality of concavities have extending directions, bending directions and lengths which are non-uniform among the plurality of concavities.
4. The organic EL element according to claim 1 , wherein adhesion force between the gas barrier layer and the concave-convex structure layer is greater than 4 N/m.
5. The organic EL element according to claim 1 , wherein an average pitch of a plurality of concavities and a plurality of convexities of the concave-convex structure layer is in a range of 100 nm to 1500 nm; and
an average value of depth distribution of the plurality of concavities and the plurality of convexities is in a range of 20 nm to 200 nm.
6. The organic EL element according to claim 1 , wherein the gas barrier layer and the concave-convex structure layer each contain a silicon oxide, an aluminum oxide, a silicon nitride, a silicon oxynitride, an aluminum oxynitride, or a magnesium oxide.
7. The organic EL element according to claim 1 , wherein the gas barrier layer and the concave-convex structure layer each contain a silicon oxide.
8. The organic EL element according to claim 1 , wherein the gas barrier layer has been subject to a surface treatment for enhancing its adhesion property with respect to the concave-convex structure layer.
9. The organic EL element according to claim 8 , wherein the surface treatment is a plasma treatment or a corona treatment.
10. The organic EL element according to claim 1 , wherein the gas barrier layer has thickness in a range of 5 nm to 2000 nm.