Quartz crystal resonator and method for manufacturing the same, and quartz crystal resonator unit and method for manufacturing the same
A method for manufacturing a quartz crystal resonator that includes a quartz crystal blank having a vibrating portion including a center of a principal surface of the quartz crystal blank when viewed in plan from a direction normal to the principal surface and a peripheral portion adjacent to the vibrating portion, a pair of excitation electrodes disposed opposite to each other with the vibrating portion interposed therebetween, a pair of electrode pads disposed on the peripheral portion, and a pair of extended electrodes each extending from the vibrating portion to the peripheral portion to electrically connect one excitation electrode to a corresponding electrode pad, where the method includes conducting a first trimming of the vibrating portion and the peripheral portion; and conducting a second trimming of part of one of the excitation electrodes on the vibrating portion.
1. A quartz crystal resonator comprising:
a quartz crystal blank having a vibrating portion including a center of a principal surface of the quartz crystal blank when viewed in plan from a direction normal to the principal surface and a peripheral portion adjacent to the vibrating portion;
a pair of excitation electrodes opposing each other with the vibrating portion interposed therebetween;
a pair of electrode pads on the peripheral portion; and
a pair of extended electrodes each extending from the vibrating portion to the peripheral portion to electrically connect one of the pair of excitation electrodes to a corresponding one of the pair of electrode pads,
wherein the pair of excitation electrodes includes a first excitation electrode and a second excitation electrode,
the first excitation electrode includes a first region having a thickness T 1 and a second region having a thickness T 2 larger than the thickness T 1 ; and
the second excitation electrode includes a third region having a thickness T 3 larger than the thickness T 2 .
2. The quartz crystal resonator according to claim 1 , wherein the quartz crystal blank has a stepped portion at a boundary between the vibrating portion and the peripheral portion, and the extended electrodes each pass through the stepped portion.
3. A quartz crystal resonator unit comprising:
the crystal resonator according to claim 1 ;
a base member on which the quartz crystal resonator is mounted, with a side of the quartz crystal resonator having the second excitation electrode thereon facing the base member; and
a lid joined to the base member to seal the quartz crystal resonator therebetween.
4. The quartz crystal resonator unit according to claim 3 , wherein the quartz crystal blank has a stepped portion at a boundary between the vibrating portion and the peripheral portion, and the extended electrodes each pass through the stepped portion.