Semiconductor device, power module, and power conversion device
A semiconductor device including an n-type semiconductor layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide, and a unit cell formed in the cell region is configured as follows. A p-type body region formed in the semiconductor layer of the gate pad region, a first insulating film formed on the p-type body region, a conductive film formed on the first insulating film, and a second insulating film formed on the conductive film, and a gate pad formed on the second insulating film. Then, the film thickness of the first insulating film is 0.7 μm or more, and more favorably 1.5 μm or more. In addition, the electric field strength of the first insulating film is 3 MV/cm or less. Then, an opening portion is formed on the first insulating film in the gate pad region, and a resistance portion and a connection portion corresponding to the conductive film are formed in the opening portion.
1. A semiconductor device comprising:
a first conductivity-type drift layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide;
a unit cell formed in the cell region;
(a1) a second conductivity-type first body region having a reverse conductivity-type to the first conductivity-type, and formed in the drift layer in the gate pad region;
(a2) a first insulating film formed on the first body region;
(a3) a first conductive film formed on the first insulating film;
(a4) a second insulating film formed on the first conductive film; and
(a5) a gate pad formed on the second insulating film, wherein
a film thickness of the first insulating film is 0.7 μm or more.
2. The semiconductor device according to claim 1 , wherein
the film thickness of the first insulating film is 1.5 μm or more.
3. The semiconductor device according to claim 1 , wherein
electric field strength of the first insulating film is 3 MV/cm or less.
4. The semiconductor device according to claim 1 , wherein
the unit cell includes:
(b1) a second conductivity-type second body region formed in the drift layer in the cell region;
(b2) a first conductivity-type source region formed in the second body region;
(b3) a gate insulating film formed on the second body region between the source region and the drift layer; and
(b4) a gate electrode formed on the gate insulating film.
5. The semiconductor device according to claim 4 , further comprising:
a source electrode electrically connected to the source region, wherein
the first body region is electrically connected to the source electrode via a contact penetrating the first insulating film or the second insulating film.
6. A semiconductor device comprising:
a first conductivity-type drift layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide;
a unit cell formed in the cell region;
(a1) a second conductivity-type first body region having a reverse conductivity-type to the first conductivity-type, and formed in the drift layer in the gate pad region;
(a2) a first insulating film formed on the first body region;
(a3) a first conductive film formed on the first insulating film;
(a4) a second insulating film formed on the first conductive film; and
(a5) a gate pad formed on the second insulating film, wherein
a film thickness of the first insulating film is 1.5 μm or more, and
a region in which the first conductive film is not formed is included on the first insulating film in the gate pad region.
7. The semiconductor device according to claim 6 , wherein
electric field strength of the first insulating film is 3 MV/cm or less.
8. The semiconductor device according to claim 6 , wherein
the unit cell includes:
(b1) a second conductivity-type second body region formed in the drift layer in the cell region;
(b2) a first conductivity-type source region formed in the second body region;
(b3) a gate insulating film formed on the second body region between the source region and the drift layer; and
(b4) a gate electrode formed on the gate insulating film.
9. The semiconductor device according to claim 8 , wherein
the first conductive film has a first portion and a second portion connected to the first portion, and
a length of an opening portion in a first direction is larger than a length of the first portion in the first direction.
10. The semiconductor device according to claim 9 , wherein
the first portion is a resistance portion connected between the gate pad and the gate electrode.
11. The semiconductor device according to claim 8 , further comprising:
a source electrode electrically connected to the source region, wherein
the first body region is electrically connected to the source electrode via a contact penetrating the first insulating film or the second insulating film.
12. A power module comprising:
a semiconductor device comprising
a first conductivity-type drift layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide;
a unit cell formed in the cell region;
(a1) a second conductivity-type first body region having a reverse conductivity-type to the first conductivity-type, and formed in the drift layer in the gate pad region;
(a2) a first insulating film formed on the first body region;
(a3) a first conductive film formed on the first insulating film;
(a4) a second insulating film formed on the first conductive film; and
(a5) a gate pad formed on the second insulating film, wherein a film thickness of the first insulating film is 0.7 μm or more.
13. The power module according to claim 12 , further comprising:
an inverter configured by a MOSFET constituting the unit cell including a semiconductor device comprising
a first conductivity-type drift layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide;
a unit cell formed in the cell region;
(a1) a second conductivity-type first body region having a reverse conductivity-type to the first conductivity-type, and formed in the drift layer in the gate pad region;
(a2) a first insulating film formed on the first body region;
(a3) a first conductive film formed on the first insulating film;
(a4) a second insulating film formed on the first conductive film; and
(a5) a gate pad formed on the second insulating film, wherein
a film thickness of the first insulating film is 0.7 μm or more.
14. A power conversion device comprising:
a power module comprising
a semiconductor device comprising
a first conductivity-type drift layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide;
a unit cell formed in the cell region:
(a1) a second conductivity-type first body region having a reverse conductivity-type to the first conductivity-type, and formed in the drift layer in the gate pad region;
(a2) a first insulating film formed on the first body region:
(a3) a first conductive film formed on the first insulating film;
(a4) a second insulating film formed on the first conductive film; and
(a5) a gate pad formed on the second insulating film, wherein a film thickness of the first insulating film is 0.7 μm or more; and
a control circuit configured to control the semiconductor device in the power module.
15. The power conversion device according to claim 14 , wherein
the power module includes an inverter configured by a MOSFET constituting the unit cell including a semiconductor device comprising
a first conductivity-type drift layer formed on a substrate, having a cell region and a gate pad region, and including silicon carbide;
a unit cell formed in the cell region;
(a1) a second conductivity-type first body region having a reverse conductivity-type to the first conductivity-type, and formed in the drift layer in the gate pad region;
(a2) a first insulating film formed on the first body region;
(a3) a first conductive film formed on the first insulating film;
(a4) a second insulating film formed on the first conductive film; and
(a5) a gate Dad formed on the second insulating film, wherein a film thickness of the first insulating film is 0.7 μm or more.