Air gap metal tip electrostatic discharge protection
An air gap metal tip structure is provided for ESD protection that includes a lower substrate and an upper substrate disposed above the lower substrate. The air gap metal tip structure includes a first and a second metal tip disposed along at least one horizontal axis that is parallel to the upper substrate and the lower substrate. The air gap metal tip structure includes an air chamber formed between the upper and lower substrates within which the first and second metal tips are disposed. The air chamber includes a portion between points of the metal tips. Oxygen trapped in the air chamber is converted into ozone responsive to an occurrence of an arc between the tips to dissipate the arc, and the ozone is decomposed back into the oxygen responsive to an absence of the arc between the tips to maintain the ESD protection for subsequent arcs.
1. A method for forming an air gap metal tip structure for electrostatic discharge (ESD) protection, the method comprising:
forming a lower substrate and an upper substrate disposed above the lower substrate;
forming a first metal tip and a second metal tip disposed along at least one horizontal axis that is parallel to the upper substrate and the lower substrate; and
forming an air chamber formed from the upper substrate and the lower substrate within which the first metal tip and the second metal tip are disposed, the air chamber including a portion between points of the metal tips, such that oxygen trapped in the air chamber is converted into ozone responsive to an occurrence of an arc between the metal tips to dissipate the arc, and the ozone is decomposed back into the oxygen responsive to an absence of the arc between the metal tips to maintain the ESD protection for subsequent arcs,
wherein an under fill level is disposed between the lower and upper substrates, and above one or more layers having the first metal tip and the second metal tip.
2. The method of claim 1 , further comprising one or more ventilation tubes connected between the air chamber and an external opening of the structure for venting the air chamber such that the oxygen is replenished in or discharged from the air chamber by the one or more ventilation tubes, respectively responsive to the occurrence or absence of the arc.
3. The method of claim 1 , wherein at least one of the first metal tip and the second metal tip comprise metals selected from the group consisting of back end of line metals and far back end of the line metals.
4. The method of claim 3 , wherein the first metal tip and the second metal tip are arranged on different layers.
5. The method of claim 1 , wherein the at least one horizontal axis comprises (i) a first horizontal axis on a first layer and (ii) a second horizontal axis on a second layer different from the first layer, and wherein the first metal tip is disposed along the first horizontal axis and the second metal tip is disposed along the second horizontal axis.
6. The method of claim 1 , wherein the respective longitudinal axis of the first metal tip and the second metal shift are shifted relative to one another.
7. The method of claim 1 , wherein the respective longitudinal axis of the first metal tip and the second metal shift are shifted by substantially 90 degrees relative to one another.