Techniques for MRAM MTJ top electrode connection
Some embodiments relate to an integrated circuit including a magnetoresistive random-access memory (MRAM) cell. The integrated circuit includes a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a plurality of dielectric layers and a plurality of metal layers that are stacked over one another in alternating fashion. The plurality of metal layers include a lower metal layer and an upper metal layer disposed over the lower metal layer. A bottom electrode is disposed over and in electrical contact with the lower metal layer. A magnetic tunneling junction (MTJ) is disposed over an upper surface of bottom electrode. A top electrode is disposed over an upper surface of the MTJ and is in direct electrical contact with a lower surface of the upper metal layer.
1. A magnetoresistive random-access memory (MRAM) cell disposed on a semiconductor substrate, the MRAM cell including:
a bottom electrode disposed over the semiconductor substrate;
a magnetic tunneling junction (MTJ) disposed over the bottom electrode;
a top electrode disposed over an upper surface of the MTJ;
MRAM sidewall spacers along outer sidewalls of the top electrode and along outer sidewalls of the MTJ, wherein the MRAM sidewall spacers have upper portions that extend upwardly beyond an upper surface of the top electrode;
a metal line disposed over the top electrode and in direct physical and electrical contact with the top electrode without a via or contact extending between the metal line and the top electrode, wherein the upper portions of the MRAM sidewall spacers extend into a lower surface of the metal line; and
a dielectric liner overlying outer sidewalls of the MRAM sidewall spacers and terminating at an uppermost dielectric liner surface, the uppermost dielectric liner surface residing below uppermost surfaces of the MRAM sidewall spacers such that the dielectric liner does not cover the uppermost surfaces of the MRAM sidewall spacers.
2. The MRAM cell of claim 1 , wherein the MRAM sidewall spacers have lowermost surfaces that rest on an upper surface of the bottom electrode.
3. The MRAM cell of claim 1 , wherein the MRAM sidewall spacers have inner sidewalls and outer sidewalls, with the inner sidewalls being nearer the top electrode than the outer sidewalls, the inner sidewalls having upper portions that spaced apart by a first distance and lower portions that are spaced apart by a second distance, the second distance being greater than the first distance.
4. The MRAM cell of claim 3 , wherein the lower portions of the inner sidewalls are angled at an angle of other than 90-degrees as measured relative to a normal line passing through an upper surface of the bottom electrode.
5. The MRAM cell of claim 4 , wherein an uppermost surface of each MRAM sidewall spacer includes a peak with rounded or tapered surfaces extending downwardly in opposite directions from the peak.
6. The MRAM cell of claim 1 , wherein outer lower sidewalls of the MRAM sidewall spacers are vertical or substantially vertical, and meet outer upper sidewalls of the MRAM sidewall spacers at a ledge or shoulder region.
7. The MRAM cell of claim 6 , wherein the ledge or shoulder region includes a level or flat surface that is located at a first height, as measured from an upper surface of the semiconductor substrate, and the top electrode has an uppermost surface that is located at a second height, as measured from the upper surface of the semiconductor substrate, the first height being less than the second height.
8. A magnetoresistive random-access memory (MRAM) cell disposed on a semiconductor substrate, the MRAM cell including:
a lower metal line disposed over the semiconductor substrate and laterally surrounded by a dielectric layer;
an etch stop layer disposed over an upper surface of the dielectric layer;
a bottom electrode over the etch stop layer, the bottom electrode extending downward along inner sidewalls of the etch stop layer to physically and electrically connect to an upper surface portion of the lower metal line;
a magnetic tunneling junction (MTJ) disposed over the bottom electrode;
a top electrode disposed over an upper surface of the MTJ;
MRAM sidewall spacers along outer sidewalls of the top electrode and along outer sidewalls of the MTJ, wherein the MRAM sidewall spacers have upper portions that extend upwardly beyond an upper surface of the top electrode; and
an upper metal line disposed over the top electrode, the upper metal line comprising a lower surface comprising a central lower surface region in direct physical and electrical contact with the upper surface of the top electrode and a peripheral lower surface region extending laterally past outer edges of the MRAM sidewall spacers, the central lower surface region being level with the peripheral lower surface region, wherein the upper portions of the MRAM sidewall spacers extend upward into an intermediate lower surface region of the lower surface of the upper metal line between the central lower surface region and the peripheral lower surface region.
9. The MRAM cell of claim 8 , wherein the MRAM spacers have lowermost surfaces that rest on an upper surface of the bottom electrode.
10. The MRAM cell of claim 8 , wherein the MRAM sidewall spacers have inner sidewalls and outer sidewalls, with the inner sidewalls being nearer the top electrode than the outer sidewalls, the inner sidewalls having upper portions that spaced apart by a first distance and lower portions that are spaced apart by a second distance, the second distance being greater than the first distance.
11. The MRAM cell of claim 10 , wherein lower portions of the inner sidewalls are angled at an angle of other than 90-degrees as measured relative to a normal line passing through an upper surface of the bottom electrode.
12. The MRAM cell of claim 8 , wherein an uppermost surface of each MRAM sidewall spacer includes a peak with rounded or tapered surfaces extending downwardly in opposite directions from the peak.
13. The MRAM cell of claim 8 , wherein the MRAM sidewall spacers include an outer sidewall including an outer lower sidewall and an outer upper sidewall that are joined to one another at a shoulder region, the outer lower sidewall being vertical or substantially vertical and the shoulder region including an inner corner disposed along the outer sidewall between the outer lower sidewall and the outer upper sidewall.
14. The MRAM cell of claim 13 , further comprising:
a dielectric liner conformally overlying the outer sidewall of the MRAM sidewall spacers and terminating at an uppermost dielectric liner surface, the uppermost dielectric liner surface residing below uppermost surfaces of the MRAM sidewall spacers such that the dielectric liner does not cover the uppermost surfaces of the MRAM sidewall spacers.