MEMS device
A MEMS device includes a plurality of ribbon elements, a securing portion, and a plurality of connecting portions. The securing portion supports the plurality of ribbon elements. The plurality of connecting portions are disposed on ends of each of the plurality of ribbon elements and connect each of the plurality of ribbon elements to the securing portion. An angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is greater than 0° in a planar direction of each of the plurality of ribbon elements.
1. A MEMS device comprising:
a plurality of ribbon elements;
a securing portion to support the plurality of ribbon elements; and
a plurality of connecting portions disposed on ends of each of the plurality of ribbon elements and connecting each of the plurality of ribbon elements with the securing portion,
an angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions being greater than 0° in a planar direction of each of the plurality of ribbon elements.
2. The MEMS device according to claim 1 ,
wherein the securing portion includes a step in a longitudinal direction of each of the plurality of connecting portions, and
wherein lengths of the plurality of connecting portions are equal.
3. The MEMS device according to claim 1 ,
wherein the angle formed by the longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is 90°.
4. The MEMS device according to claim 1 ,
wherein the plurality of connecting portions disposed on the ends of each of the plurality of ribbon elements are disposed point-symmetric with respect to a center point of each of the plurality of ribbon elements.
5. The MEMS device according to claim 4 ,
wherein longitudinal lengths of the plurality of ribbon elements are equal.
6. The MEMS device according to claim 1 , further comprising:
a substrate; and
a plurality of electrodes disposed on the substrate,
wherein the plurality of connecting portions are opposed to the plurality of electrodes on the substrate.
7. The MEMS device according to claim 1 , further comprising a piezoelectric material film-formed on at least a portion of the plurality of connecting portions.
8. The MEMS device according to claim 7 ,
wherein an opening is disposed below the plurality of ribbon elements.
9. The MEMS device according to claim 1 , further comprising a material film-formed on at least a portion of the plurality of connecting portions,
wherein the material has a linear expansion coefficient different from a linear expansion coefficient of a material of the plurality of connecting portions.