Magnetic sensor
The magnetic sensor can prevent an increase of a positional detection error of a subject/object even in the case of applying an external magnetic field with a magnetic field intensity exceeding a predetermined range. A magnetic sensor is equipped with a magnetoresistive effect element (MR element) 11 that can detect an external magnetic field and a soft magnetic body shield 12 . The soft magnetic body shield(s) 12 are/is positioned above and/or below the MR element 11 in a side view, and the size of the MR element 11 is physically included within a perimeter of the soft magnetic body shield 12.
1. A magnetic sensor, comprising:
a magnetoresistive effect element (MR element), which can detect an external magnetic field, and
a soft magnetic body shield, wherein
the soft magnetic body shield is positioned above and/or below the MR element in a side view,
the size of the MR element is physically included within a perimeter of the soft magnetic body shield in a plan view, and
a diameter φ s of the soft magnetic body shield and a diameter φ m of the MR element fulfill a relationship in a following formula (1):
φ s ≥1.3φ m (1).
2. The magnetic sensor according to claim 1 , wherein a shape of the soft magnetic body shield in the plan view is nearly circular.
3. The magnetic sensor according to claim 1 , wherein a shape of the soft magnetic body shield in the plan view is an N-sided polygon (N is 6 or greater even number).
4. The magnetic sensor according to claim 1 , wherein the soft magnetic body shield is columnar.
5. The magnetic sensor according to claim 1 , wherein the soft magnetic body shield is conical.
6. The magnetic sensor according to claim 1 , wherein the soft magnetic body shield includes a columnar portion that comprises a first surface and a second surface, wherein the second surface faces the first surface, and a convexity, which protrudes from the first surface of the columnar portion and is positioned to allow the second surface to face the MR element.
7. The magnetic sensor according to claim 1 , wherein the soft magnetic body shield includes a columnar portion that comprises a first surface and a second surface, wherein the second surface faces the first surface, and a concave portion, which is formed on the first surface of the columnar portion and is positioned to allow the second surface to face the MR element.
8. The magnetic sensor according to claim 1 , wherein the soft magnetic body shield comprises a through-hole that penetrates through the soft magnetic body shield in a thickness direction.
9. A magnetic sensor comprising:
a magnetoresistive effect element (MR element), which can detect an external magnetic field, and a soft magnetic body shield, wherein
the soft magnetic body shield is positioned above and/or below the MR element in a side view,
the size of the MR element is physically included within a perimeter of the soft magnetic body shield in a plan view, and
thickness h of the soft magnetic body shield and a diameter φ m of the MR element fulfill a relationship in a following formula (2):
h> 0.3φ m (2).
10. A magnetic sensor, comprising:
a magnetoresistive effect element (MR element), which can detect an external magnetic field, and
a soft magnetic body shield, wherein
the soft magnetic body shield is positioned above and/or below the MR element in a side view,
the size of the MR element is physically included within a perimeter of the soft magnetic body shield in a plan view, and
a signal output from the MR element includes a harmonic component V 3rd ,
the harmonic component V 3rd included in the signal that is output in the case of applying the external magnetic field with a magnetic field intensity that exceeds 70 mT (Millitesla) to the MR element, and the harmonic component V 3rd included in the signal that is output in the case of applying the external magnetic field with 70 mT or less of a manetic field intensity to the MR element, are the same.
11. The magnetic sensor according to claim 1 , wherein the MR element is one of a plurality of MR elements, and wherein the soft magnetic body shield is one of a plurality of soft magnetic body shields, and each soft magnetic body shield is placed in correspondence with one of the MR elements, respectively.
12. The magnetic sensor according to claim 11 , wherein the diameter φs of each soft magnetic body shield is 2.00 to 2.75 times the diameter φm of the corresponding MR element.
13. The magnetic sensor according to claim 9 , wherein a shape of the soft magnetic body shield in the plan view is nearly circular.
14. The magnetic sensor according to claim 9 , wherein a shape of the soft magnetic body shield in the plan view is an N-sided polygon (N is 6 or greater even number).
15. The magnetic sensor according to claim 9 , wherein the soft magnetic body shield is columnar.
16. The magnetic sensor according to claim 9 , wherein the soft magnetic body shield is conical.
17. The magnetic sensor according to claim 9 , wherein the soft magnetic body shield includes a columnar portion that comprises a first surface and a second surface, wherein the second surface faces the first surface, and a convexity, which protrudes from the first surface of the columnar portion and is positioned to allow the second surface to face the MR element.
18. The magnetic sensor according to claim 9 , wherein the soft magnetic body shield includes a columnar portion that comprises a first surface and a second surface, wherein the second surface faces the first surface, and a concave portion, which is formed on the first surface of the columnar portion and is positioned to allow the second surface to face the MR element.
19. The magnetic sensor according to claim 9 , wherein the soft magnetic body shield comprises a through-hole that penetrates through the soft magnetic body shield in a thickness direction.
20. The magnetic sensor according to claim 9 , wherein the MR element is one of a plurality of MR elements, and wherein the soft magnetic body shield is one of a plurality of soft magnetic body shields, and each soft magnetic body shield is placed in correspondence with one of the MR elements, respectively.
21. The magnetic sensor according to claim 20 , wherein a diameter φs of each soft magnetic body shield is 2.00 to 2.75 times the diameter φm of the corresponding MR element.
22. The magnetic sensor according to claim 10 , wherein a shape of the soft magnetic body shield in the plan view is nearly circular.
23. The magnetic sensor according to claim 10 , wherein a shape of the soft magnetic body shield in the plan view is an N-sided polygon (N is 6 or greater even number).
24. The magnetic sensor according to claim 10 , wherein the soft magnetic body shield is columnar.
25. The magnetic sensor according to claim 10 , wherein the soft magnetic body shield is conical.
26. The magnetic sensor according to claim 10 , wherein the soft magnetic body shield includes a columnar portion that comprises a first surface and a second surface, wherein the second surface faces the first surface, and a convexity, which protrudes from the first surface of the columnar portion and is positioned to allow the second surface to face the MR element.
27. The magnetic sensor according to claim 10 , wherein the soft magnetic body shield includes a columnar portion that comprises a first surface and a second surface, wherein the second surface faces the first surface, and a concave portion, which is formed on the first surface of the columnar portion and is positioned to allow the second surface to face the MR element.
28. The magnetic sensor according to claim 10 , wherein the soft magnetic body shield comprises a through-hole that penetrates through the soft magnetic body shield in a thickness direction.
29. The magnetic sensor according to claim 10 , wherein the MR element is one of a plurality of MR elements, and wherein the soft magnetic body shield is one of a plurality of soft magnetic body shields, and each soft magnetic body shield is placed in correspondence with one of the MR elements, respectively.
30. The magnetic sensor according to claim 29 , wherein a diameter φs of each soft magnetic body shield is 2.00 to 2.75 times a diameter φm of the corresponding MR element.