Polishing system with annular platen or polishing pad for substrate monitoring
A polishing system includes a platen having a top surface, an annular polishing pad supported on the platen, a carrier head to hold a substrate in contact with the annular polishing pad, a support structure from which the carrier head is suspended and which is configured to move the hold the carrier head laterally across the polishing pad, and a controller. The platen is rotatable about an axis of rotation that passes through approximately the center of the platen, and the inner edge of the annular polishing pad is positioned around the axis of rotation. The controller is configured to cause the support structure to position the carrier head such that a portion of the substrate overhangs the inner edge of the annular polishing pad while the substrate is contacting the polishing pad.
1. A polishing system, comprising:
a platen having a top surface and an aperture in the top surface in approximately a center of the platen such that the top surface is an annular surface to support an annular polishing pad, the polishing pad having a hole therethrough corresponding to the aperture of the platen, the platen rotatable about an axis of rotation that passes through the hole in the pad, through the aperture in the platen and through approximately the center of the platen; a carrier head to hold a substrate in contact with the annular polishing pad; and an in-situ monitoring system having a probe positioned in or below the aperture and configured to monitor an unsupported portion of the substrate that is positioned over the hole in the polishing pad such that the unsupported portion overhangs an inner edge of the hole in the pad and the annular surface of the platen.
2. The polishing system of claim 1 , wherein the aperture comprises a recess extending partially but not entirely through the platen.
3. The polishing system of claim 2 , comprising a conduit through the platen for liquid polishing residue to drain from the recess.
4. The polishing system of claim 1 , wherein the aperture comprises a passage extending entirely through the platen.
5. The polishing system of claim 4 , comprising a ring bearing supporting the platen.
6. The polishing system of claim 5 , wherein the probe is supported on a structure that extends vertically through the ring bearing.
7. The polishing system of claim 4 , wherein the probe is secured to a side wall of the aperture of the platen.
8. A polishing system, comprising:
a platen having a top surface, the platen rotatable about an axis of rotation that passes through approximately the center of the platen;
an annular polishing pad supported on the platen, the annular polishing pad having a hole therethrough with the axis of rotation passing through the hole in the polishing pad and with an inner edge of the hole of the annular polishing pad surrounding the axis of rotation;
a carrier head to hold a substrate in contact with the annular polishing pad;
a support structure from which the carrier head is suspended, the support structure configured to move the carrier head laterally across the polishing pad; and
a controller configured to cause the support structure to position the carrier head such that a portion of the substrate overhangs the inner edge of the hole of the annular polishing pad while the substrate is contacting the polishing pad; further comprising an in-situ monitoring system having a probe positioned to monitor the portion of the substrate that overhangs the inner edge of the hole of the annular polishing pad.
9. The polishing system of claim 8 , wherein a center of the hole that provides the inner edge of the annular polishing pad is aligned with the axis of rotation.
10. The polishing system of claim 8 , wherein the platen has an aperture in the top surface in approximately a center of the platen such that the top surface is an annular surface to support the annular polishing pad.
11. The polishing system of claim 8 , comprising a support post to support one or more polishing system components, the support post having a lower portion that is supported on the platen or that extends through an aperture in the platen.