IP Library Granted Patent US 10,562,272
Granted Patent B2
US 10,562,272 · App. 15/534,192 · Granted Feb 18, 2020

Laminated glass article with low compaction and method for forming the same

Inventors: Timothy James Kiczenski (Corning, NY); Samuel John Koseba (Corning, NY); Natesan Venkataraman (Painted Post, NY)
Assignee: Corning Incorporated
B32B17/06C03B17/02C03B17/067C03B25/08C03B25/12C03B32/00B32B2250/03C03B17/064H01L21/02422H01L21/02488H01L21/02532
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Quick Facts
Patent No.
US 10,562,272
App. No.
15/534,192
Granted
Feb 18, 2020
Kind
B2
Abstract

A strengthened glass article ( 100 ), such as a substrate for a p-Si based transistors, includes first and second glass cladding layers ( 104, 106 ) and a glass core layer ( 102 ) disposed therebetween. A coefficient of thermal expansion [CTE] of each cladding layer ( 104, 106 ), which can be made of the same glass, is at least 1×10 −7 ° C. −1 less than that of the core layer ( 102 ). Each of the core and cladding layers has a strain point less than 700° C. A compaction of the glass article ( 100 ) is at most about 20 ppm [see FIG. 1 ]. A method includes forming a glass article and/or heating a glass article to a first temperature of at least about 400° C. The glass article has a glass core layer ( 102 ) and a glass cladding layer ( 104, 106 ) adjacent to the core layer. The glass article is maintained at a temperature within a range of from 400° C. to 600° C. for a holding period from 30 to 90 minutes and subsequently cooled to a temperature of at most 50° C. over a cooling period from 30 seconds to 5 minutes. The glass article ( 100 ) for heat strengthening may have been produced by the fusion overflow down draw process, e.g. as depicted in FIG. 3.

Claims (36)

1. A strengthened glass article comprising:

a first glass cladding layer;

a second glass cladding layer; and

a glass core layer disposed between the first glass cladding layer and the second glass cladding layer;

wherein a coefficient of thermal expansion (CTE) of each of the first glass cladding layer and the second glass cladding layer is at least 1×10 7 ° C. −1 less than a CTE of the glass core layer;

wherein each of the glass core layer and the glass cladding layer comprises a strain point of less than 650° C.;

wherein each of the first glass cladding layer and the second glass cladding layer comprises a compressive stress of at least about 20 MPa; and

wherein a compaction of the glass article is at most about 20 ppm.

2. The glass article of claim 1 , wherein at least one of the glass cladding layers is substantially free of BaO.

3. The glass article of claim 1 , wherein at least one of the glass cladding layers comprises from about 60 mol % to about 70 mol % SiO 2 , from about 6 mol % to about 18 mol % Al 2 O 3 , from about 6 mol % to about 21 mol % B 2 O 3 , from about 0.2 mol % to about 5 mol % MgO, and from about 8 mol % to about 12 mol % CaO.

4. The glass article of claim 1 , wherein the glass cladding layer is substantially free of alkali metal.

5. The glass article of claim 1 , wherein the glass cladding layer is substantially free of As 2 O 3 .

6. The glass article of claim 1 , wherein the glass core layer comprises from about 50 mol % to about 80 mol % SiO 2 , from about 5 mol % to about 20 mol % Al 2 O 3 , and from about 1 mol % to about 8 mol % MgO.

7. The glass article of claim 1 , wherein the compaction of the glass article is at most about 3 ppm.

8. The glass article of claim 1 , wherein the compaction of the glass article is at most about 1 ppm.

9. The glass article of claim 1 , further comprising a poly-crystalline silicon (p-Si) electronic device formed on a surface of the glass article.

10. The glass article of claim 9 , wherein the p-Si electronic device comprises a thin-film-transistor (TFT).

11. A display device comprising the glass article of claim 1 .

12. A method comprising:

forming a glass article comprising a glass core layer and a glass cladding layer adjacent to the glass core layer;

maintaining the glass article within a hold temperature range from about 400° C. to about 600° C. for a holding period from about 30 minutes to about 90 minutes; and

cooling the glass article to a quench temperature of at most about 50° C. over a cooling period from about 30 seconds to about 5 minutes subsequent to the maintaining step.

13. The method of claim 12 , further comprising cooling the glass article to a cool temperature of about 200° C. at a cooling rate from about 1° C./minute to about 7° C./minute subsequent to the maintaining step and prior to the cooling the glass article to the quench temperature step.

14. The method of claim 12 , wherein the glass cladding layer comprises a first glass cladding layer and a second glass cladding layer, and the glass core layer is disposed between the first glass cladding layer and the second glass cladding layer.

15. The method of claim 12 , further comprising forming a poly-crystalline silicon (p-Si) electronic device on a surface of the glass article.

16. The method of claim 12 , wherein the forming the glass article comprises contacting the glass core layer in a viscous state with the glass cladding layer in a viscous state using an overflow distributor.

17. A method comprising:

heating a glass article to a first temperature of at least about 400° C., the glass article comprising a glass core layer and a glass cladding layer adjacent to the glass core layer;

maintaining the glass article within a temperature range from about 400° C. to about 600° C. for a holding period from about 30 minutes to about 90 minutes; and

cooling the glass article to a second temperature of at most about 50° C. over a cooling period from about 30 seconds to about 5 minutes subsequent to the maintaining step.

18. The method of claim 17 , further comprising cooling the glass article to an intermediate temperature of about 200° C. at a cooling rate from about 1° C./minute to about 7° C./minute subsequent to the maintaining step and prior to the cooling the glass article to the second temperature step.

19. The method of claim 17 , wherein the glass cladding layer comprises a first glass cladding layer and a second glass cladding layer, and the glass core layer is disposed between the first glass cladding layer and the second glass cladding layer.

20. The method of claim 17 , further comprising forming a poly-crystalline silicon (p-Si) electronic device on a surface of the glass article.

21. The method of claim 12 , wherein subsequent to the cooling step, a compaction of the glass article is at most about 20 ppm.

22. The method of claim 17 , wherein subsequent to the cooling step, a compaction of the glass article is at most about 20 ppm.

23. A glass article made by the method of claim 12 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 11, 2017
From: KICZENSKI, TIMOTHY JAMES; KOSEBA, SAMUEL JOHN; VENKATARAMAN, NATESAN
To: CORNING INCORPORATED
Reel/Frame 043544/0825 →
Continuity (2)
Provisional Application 62089006 · Dec 8, 2014
Related Publication 20170361574A1 · Dec 21, 2017