Ceramic heater
A ceramic heater includes a disk-shaped ceramic plate with an upper surface defining a wafer placement surface on which a wafer is to be placed. One or more inner-peripheral-side heater elements are embedded in an inner peripheral zone of the ceramic plate, and one or more outer-peripheral-side heater elements are embedded in an outer peripheral zone of the ceramic plate. A thickness of the ceramic plate in a predetermined zone is 3.9% or less of a diameter of the ceramic plate. The predetermined zone is a zone including a boundary line between the inner peripheral zone and the outer peripheral zone.
1. A ceramic heater comprising a disk-shaped ceramic plate with an upper surface defining a wafer placement surface on which a wafer is to be placed, one or more inner-peripheral-side heater elements embedded in an inner peripheral zone of the ceramic plate, and one or more outer-peripheral-side heater elements embedded in an outer peripheral zone of the ceramic plate, with the ceramic plate having a shaft joint portion, which is joined to a shaft, the shaft joint portion is provided in a region of the inner peripheral zone near a center such that a predetermined zone is an entire zone of the ceramic plate outside the shaft joint portion, wherein
a thickness of the shaft joint portion is greater than a thickness of the ceramic plate in the predetermined zone, and the thickness of the ceramic plate in the predetermined zone is 3.9% or less of a diameter of the ceramic plate,
the predetermined zone is a zone including a zone boundary line between the inner peripheral zone and the outer peripheral zone such that the zone boundary line is a circle concentric to the ceramic plate, and a diameter of the concentric circle is set to a range of 75 to 85% of the diameter of the ceramic plate, and
the ceramic heater further comprises, one of (i) an annular groove having an inner peripheral edge and an annular width that is 1 to 5% of the diameter of the ceramic plate, such that the inner peripheral edge is aligned with the zone boundary line, with the annular groove being concentric to the ceramic plate and having a depth that is 10 to 30% less than the thickness of the predetermined zone, or (ii) an annular recessed step having an inner peripheral edge that is aligned with the zone boundary line, such that the annular recessed step extends from the zone boundary line to the outermost edge of the diameter of the ceramic plate, with the annular recessed step being concentric to the ceramic plate and having a depth that is 10 to 30% less than the thickness of the predetermined zone.
2. The ceramic heater according to claim 1 , wherein the predetermined zone is a zone spanning from an outer periphery of the ceramic plate to an inner side beyond the zone boundary line.
3. The ceramic heater according to claim 1 , wherein the thickness of the ceramic plate in the predetermined zone is 3.3% or less of the diameter of the ceramic plate.
4. The ceramic heater according to claim 1 , wherein the thickness of the ceramic plate in the predetermined zone is 1.8% or more of the diameter of the ceramic plate.
5. The ceramic heater according to claim 1 , wherein a non-heated zone including no heater elements is provided between the inner peripheral zone and the outer peripheral zone.
6. The ceramic heater according to claim 5 , wherein the non-heated zone is an annular zone having a width in a range of 4.0% or more and 7.6% or less of the diameter of the ceramic plate.