IP Library Granted Patent US 10,566,521
Granted Patent B2
US 10,566,521 · App. 16/019,831 · Granted Feb 18, 2020

Magnetic memory devices based on 4D and 5D transition metal perovskites

Inventors: Chang-Beom Eom (Madison, WI); Tianxiang Nan (Madison, WI); Trevor Jeffrey Anderson (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
H01L43/04G11C11/161G11C11/165G11C11/18H01L43/08H01L43/10H01L43/14
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Quick Facts
Patent No.
US 10,566,521
App. No.
16/019,831
Granted
Feb 18, 2020
Kind
B2
Abstract

Magnetic switching devices, including magnetic memory devices, are provided. The devices use high-quality crystalline films of 4d or 5d transition metal perovskite having a strong spin-orbit coupling (SOC) to produce spin-orbit torque in adjacent ferromagnetic materials via a strong spin-Hall effect. Spin-orbit torque can be generated by the devices with a high efficiency, even at or near room temperature.

Claims (31)

1. A magnetic switching device comprising:

a substrate;

a layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite on the substrate, wherein the substrate induces a compressive or tensile strain in the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite;

a layer of ferromagnetic material on the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite;

a first electrode in electrical communication with the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite; and

a second electrode in electrical communication with the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite, wherein the first electrode and the second electrode are configured to pass a charge current through the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite.

2. The device of claim 1 , wherein the 4d or 5d transition metal perovskite is a 5d transition metal perovskite.

3. The device of claim 2 , wherein the 5d transition metal perovskite is a 5d iridate perovskite.

4. The device of claim 3 , wherein the 5d transition metal perovskite has the crystal structure SrIrO 3 .

5. The device of claim 4 , wherein the SrIrO 3 has an in-plane crystallographic orientation of [010].

6. The device of claim 1 , wherein the 4d or 5d transition metal perovskite is a 4d transition metal perovskite.

7. The device of claim 6 , wherein the 4d transition metal perovskite has the crystal structure SrRuO 3 .

8. The device of claim 1 , further comprising a metal oxide capping layer over the layer of ferromagnetic material.

9. The device of claim 1 , wherein the layer of ferromagnetic material comprises a polycrystalline metal alloy.

10. The device of claim 1 , wherein the device is a spin-torque magnetic memory device in which the ferromagnetic layer provides a first ferromagnetic layer of a magnetic tunnel junction and the magnetic tunnel junction further comprises a dielectric spacer layer over the first ferromagnetic layer and a second ferromagnetic layer over the dielectric spacer layer.

11. The device of claim 1 , further comprising a resistance measuring device configured to measure the resistance of the magnetic tunnel junction.

12. A method of switching the magnetic moment of a layer of ferromagnetic material in a magnetic switching device, the magnetic switching device comprising:

a substrate;

a layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite on the substrate, wherein the substrate induces a compressive or tensile strain on the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite;

a layer of ferromagnetic material on the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite;

the method comprising passing a charge current through the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite, whereby a perpendicular spin polarized current is generated in layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite and directed into the layer of ferromagnetic material, producing a spin-orbit torque in the ferromagnetic material that switches the magnetic moment of the ferromagnetic material.

13. A method of reading and writing memory in a spin-torque magnetoresistance random access memory cell, the spin-torque magnetoresistance random access memory cell comprising:

a substrate;

a layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite on the substrate, wherein the substrate induces a compressive strain on the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite; and

a magnetic tunnel junction on the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite, the magnetic tunnel junction comprising:

a free layer interfaced with the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite, the free layer comprising an epitaxial layer of ferromagnetic material;

a dielectric spacer layer on the free layer; and

a fixed layer comprising a ferromagnetic material on the dielectric spacer layer,

the method comprising:

passing an in-plane charge current through the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite, whereby a perpendicular spin polarized current is generated in the layer of electrically conductive, epitaxial, single-crystalline 4d or 5d transition metal perovskite and directed into the free layer, producing a spin-orbit torque in the free layer that switches the magnetic moment of the free layer; and

measuring the resistance of the magnetic tunnel junction.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 25, 2018
From: EOM, CHANG-BEOM; ANDERSON, TREVOR; NAN, TIANXIANG
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 047141/0089 →
CONFIRMATORY LICENSE Recorded Jul 16, 2018
From: UNIVERSITY OF WISCONSIN, MADISON
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 046555/0719 →
Continuity (2)
Provisional Application 62525885 · Jun 28, 2017
Related Publication 20190006581A1 · Jan 3, 2019