Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
1. A piezoelectric linear actuator comprising:
a laminated piezoelectric actuator having a cylindrical shape;
a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator;
a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and
an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members,
wherein the displacement transfer members are each in the form of an elongated member having an arc-shaped inner peripheral surface along an outer peripheral surface of the laminated piezoelectric actuator and also having side surfaces continuous to the arc-shaped inner peripheral surface,
in the lower end portion of each of the displacement transfer members, a vertically long guide hole, through which the lower support member is inserted, is formed in such a manner that the guide holes are in opposed positions,
the output part is locked to a lower-side inner peripheral edge portion of each of the guide holes,
the output part includes a cylindrical part having an upper end portion inserted between the lower end portions of the pair of displacement transfer members and a pair of arm parts formed on the outer peripheral surface of the cylindrical part to protrude along the lower support member and each locked to the lower-side inner peripheral edge portion of each of the guide holes of the pair of displacement transfer members, and
the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
2. The piezoelectric linear actuator according to claim 1 , wherein
the lower-side inner peripheral edge portion of each of the guide holes of the pair of displacement transfer members serves as a locking part to which each of the arms of the output part is locked, and,
in the lower surface of each of the arm parts of the output part, a locking groove having the same shape as the locking part and detachably fitted with the locking part and positioned is formed.
3. The piezoelectric linear actuator according to claim 2 , wherein the locking parts and the locking grooves have arc shapes that are located on the circumference of a common circle in plan view.
4. The piezoelectric linear actuator according to claim 1 , further comprising a bonnet to which the lower support member is coupled,
the bonnet having formed therein:
a concave portion receiving the lower end portions of the pair of displacement transfer members, an upper portion of the cylindrical part, the pair of arm parts, and an elastic body; and
a through-hole into which a lower portion of the cylindrical part is slidably inserted.
5. The piezoelectric linear actuator according to claim 4 , wherein the output part is slidably supported by the through-hole through an annular sealing member fitted into an annular groove formed in the lower outer peripheral surface of the cylindrical part.
6. The piezoelectric linear actuator according to claim 4 , wherein the bonnet is formed to have a dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
7. A piezoelectrically actuated valve comprising:
a piezoelectric linear actuator including: a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, and being configured such that: the displacement transfer members are each in the form of an elongated member having an arc-shaped inner peripheral surface along the outer peripheral surface of the laminated piezoelectric actuator and also having side surfaces continuous to the arc-shaped inner peripheral surface; in the lower end portion of each of the displacement transfer members, a vertically long guide hole, through which the lower support member is inserted, is formed in such a manner that the guide holes are in opposed positions; the output part is locked to a lower-side inner peripheral edge portion of each of the guide holes; the output part includes a cylindrical part having an upper end portion inserted between the lower end portions of the pair of displacement transfer members and a pair of arm parts formed on the outer peripheral surface of the cylindrical part to protrude along the lower support member and each locked to the lower-side inner peripheral edge portion of each of the guide holes of the pair of displacement transfer members; and the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator;
a body to which the piezoelectric linear actuator is attached and having formed therein a flow channel;
a valve stem serving also as the output part of the piezoelectric linear actuator; and
a valve element opening and closing the flow channel by operating the valve stem.
8. The piezoelectrically actuated valve according to claim 7 , wherein
the lower-side inner peripheral edge portion of each of the guide holes of the pair of displacement transfer members serves as a locking part to which each of the arms of the output part is locked, and,
in the lower surface of each of the arm parts of the output part, a locking groove having the same shape as the locking part and detachably fitted with the locking part and positioned is formed.
9. The piezoelectrically actuated valve according to claim 8 , wherein the locking parts and the locking grooves have arc shapes that are located on the circumference of a common circle in plan view.
10. The piezoelectrically actuated valve according to claim 7 , further comprising a bonnet to which the lower support member is coupled,
the bonnet having formed therein:
a concave portion receiving the lower end portions of the pair of displacement transfer members, an upper portion of the cylindrical part, the pair of arm parts, and an elastic body; and
a through-hole into which a lower portion of the cylindrical part is slidably inserted.
11. The piezoelectrically actuated valve according to claim 10 , wherein the output part is slidably supported by the through-hole through an annular sealing member fitted into an annular groove formed in the lower outer peripheral surface of the cylindrical part.
12. The piezoelectrically actuated valve according to claim 10 , wherein the bonnet is formed to have a dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
13. The piezoelectrically actuated valve according to claim 7 , wherein the valve element is a metal diaphragm valve element.
14. A flow controller comprising:
a piezoelectrically actuated valve; and
a controller controlling the opening and closing of the piezoelectrically actuated valve,
the piezoelectrically actuated valve including:
a piezoelectric linear actuator including: a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, and being configured such that: the displacement transfer members are each in the form of an elongated member having an arc-shaped inner peripheral surface along the outer peripheral surface of the laminated piezoelectric actuator and also having side surfaces continuous to the arc-shaped inner peripheral surface; in the lower end portion of each of the displacement transfer members, a vertically long guide hole, through which the lower support member is inserted, is formed in such a manner that the guide holes are in opposed positions; the output part is locked to a lower-side inner peripheral edge portion of each of the guide holes; the output part includes a cylindrical part having an upper end portion inserted between the lower end portions of the pair of displacement transfer members and a pair of arm parts formed on the outer peripheral surface of the cylindrical part to protrude along the lower support member and each locked to the lower-side inner peripheral edge portion of each of the guide holes of the pair of displacement transfer members; and the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator;
a body to which the piezoelectric linear actuator is attached and having formed therein a flow channel;
a valve stem serving also as the output part; and
a valve element opening and closing the flow channel by operating the valve stem.
15. The flow controller according to claim 14 , wherein
the lower-side inner peripheral edge portion of each of the guide holes of the pair of displacement transfer members serves as a locking part to which each of the arms of the output part is locked, and,
in the lower surface of each of the arm parts of the output part, a locking groove having the same shape as the locking part and detachably fitted with the locking part and positioned is formed.
16. The flow controller according to claim 15 , wherein the locking parts and the locking grooves have arc shapes that are located on the circumference of a common circle in plan view.
17. The flow controller according to claim 14 , further comprising a bonnet to which the lower support member is coupled,
the bonnet having formed therein:
a concave portion receiving the lower end portions of the pair of displacement transfer members, an upper portion of the cylindrical part, the pair of arm parts, and an elastic body; and
a through-hole into which a lower portion of the cylindrical part is slidably inserted.
18. The flow controller according to claim 17 , wherein the output part is slidably supported by the through-hole through an annular sealing member fitted into an annular groove formed in the lower outer peripheral surface of the cylindrical part.
19. The flow controller according to claim 17 , wherein the bonnet is formed to have a dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
20. The flow controller according to claim 14 , further comprising:
an orifice interposed in the flow channel on the downstream side of the valve element; and
a pressure detector detecting the pressure in the flow channel on the upstream side of the orifice,
the controller controlling the opening and closing of the piezoelectrically actuated valve based on a value detected by the pressure detector.
21. The flow controller according to claim 14 , further comprising:
an inlet-side block coupled to the body and having an inlet-side flow channel communicating with the flow channel on the upstream side of the body; and
an outlet-side block coupled to the body, having an outlet-side flow channel communicating with the flow channel on the downstream side of the body, and also including a pressure detector detecting the pressure in the outlet-side flow channel.