Electrode Plate
An electrode plate includes: a plurality of plate-like electrode members; and a joining part joining the electrode members to each other in a thickness direction. The joining part has a heat resistance to withstand a temperature of at least 150° C., melts at 700° C. or below.
1. An electrode plate, comprising:
a plurality of plate-like electrode members; and
a joining part joining the electrode members to each other in a thickness direction of each of the electrode members, wherein the joining part has a heat resistance to withstand a temperature of at least 150° C., melts at 700° C. or below, contains any of In, Sn, and Al, and is a eutectic alloy with silicon.
2. The electrode plate according to claim 1 , further comprising a plurality of through holes each penetrating in the thickness direction.
3. The electrode plate according to claim 1 , wherein one of the electrode members disposed on one surface contains a silicon material or a material having a better plasma resistance than the silicon material.
4. An electrode plate, comprising:
a plurality of plate-like electrode members; and
a joining part joining the electrode members to each other in a thickness direction of each of the electrode members, wherein the joining part has a heat resistance to withstand a temperature of at least 150° C., melts at 700° C. or below, and contains boron oxide,
wherein the joining part contains any of In, Sn, and Al, and contains a eutectic alloy with silicon.
5. The electrode plate according to claim 4 , wherein one of the electrode members disposed on one surface contains a silicon material or a material having a better plasma resistance than the silicon material.
6. The electrode plate according to claim 4 , further comprising a plurality of through holes each penetrating in the thickness direction.
7. An electrode plate, comprising:
a plurality of plate-like electrode members; and
a joining part joining the electrode members to each other in a thickness direction of each of the electrode members, wherein the joining part consists essentially of boron oxide.
8. The electrode plate according to claim 7 , wherein one of the electrode members disposed on one surface contains a silicon material or a material having a better plasma resistance than the silicon material.
9. The electrode plate according to claim 7 , further comprising a plurality of through holes each penetrating in the thickness direction.