Exposure system alignment and calibration method

1. A method, comprising:

capturing images of reference marks on a chuck while moving the chuck relative to camera eyes;

determining initial locations of the reference marks on the chuck with respect to the camera eyes;

creating a reference model from the initial locations of the reference marks;

capturing images of alignment marks on a reference plate;

removing the reference plate;

determining locations of the alignment marks on the reference plate with respect to the camera eyes;

creating a reference plate model from the locations of the alignment marks; and

creating a mapping model from the reference model and the reference plate model.

2. The method of claim 1 , wherein creating the mapping model comprises:

applying an inverse of a shift in reference mark positions; and

applying a shift in the reference plate based on the reference plate model.

3. The method of claim 1 , further comprising:

printing a first layer on at least one blank plate using the mapping model;

recapturing images of the reference marks;

determining subsequent locations of the reference marks; and

comparing the subsequent locations to the initial locations of the reference marks.

4. The method of claim 1 , wherein capturing images of alignment marks on the reference plate and reference marks on the chuck comprises:

scanning in an X direction;

moving to a neighboring eye on an adjacent line; and

repeating the scanning and the moving until images of the reference marks and the alignment marks are captured.

5. The method of claim 1 , wherein the reference marks are removable from the chuck.

6. The method of claim 1 , further comprising:

capturing alignment marks on a second reference plate, on the chuck, to determine active reference mark positions wherein,

the second reference plate is designed for use on a second device;

creating a variation model based on differences between the active reference mark positions and the initial reference mark locations:

creating an active alignment model based on the variation model and the mapping model; and

applying an inverse of the active alignment model as a correction model.

7. A method, comprising:

creating a reference model from initial locations of reference marks on a chuck with respect to camera eyes;

creating a reference plate model from locations of alignment marks on a first reference plate with respect to the camera eyes, wherein the first reference plate moves with the chuck; and

creating a mapping model from the reference model and the reference plate model.

8. The method of claim 7 , wherein the reference marks are removable from the chuck.

9. The method of claim 7 , further comprising:

capturing alignment marks on a second reference plate, on the chuck, to determine active reference mark locations wherein,

the second reference plate was designed for use on a second device;

creating a variation model based on differences between the active reference mark locations and the initial reference mark locations:

creating an active alignment model based on the variation model and the mapping model; and

applying an inverse of the active alignment model as a correction model.

10. The method of claim 7 , wherein,

creating the reference model comprises:

capturing images of reference marks on the chuck, and

determining initial locations of the reference marks on the chuck; and

creating the reference plate model comprises:

capturing images of alignment marks on a reference plate;

determining locations of the alignment marks on the reference plate.

11. The method of claim 7 , further comprising:

recapturing images of the reference marks after printing on at least one blank plate using the mapping model;

determining subsequent locations of the reference marks from the recaptured images; and

comparing the subsequent locations to the initial locations.

12. The method of claim 7 , further comprising:

capturing alignment marks on a second reference plate, on the chuck, to determine active reference mark locations wherein,

the second reference plate was designed for use on a second device; and

storing the alignment marks from the second reference plate in memory.

13. The method of claim 7 , wherein creating a reference model from initial locations of reference marks further comprises:

scanning the chuck in an X direction;

capturing images of the reference marks;

moving to a neighboring eye;

repeating the scanning and the moving until all images of the reference marks are captured;

calculating locations of the reference marks; and

storing the locations of the reference marks in memory.

14. The method of claim 7 , wherein creating a reference plate model from locations of alignment marks further comprises:

scanning the first reference plate in an X direction;

capturing images of the alignment marks;

moving to a neighboring eye;

repeating the scanning and the moving until all images of the alignment marks are captured;

calculating locations of the alignment marks; and

storing the locations of the alignment marks in memory.

15. The method of claim 14 , further comprising:

capturing alignment marks on a second reference plate, on the chuck, to determine active reference mark locations wherein,

the second reference plate was designed for use on a second device;

creating a variation model based on differences between the active reference mark locations and the initial reference mark locations:

creating an active alignment model based on the variation model and the mapping model; and

applying an inverse of the active alignment model as a correction model.

16. A method, comprising:

capturing images of reference marks on a chuck;

determining initial locations of the reference marks on the chuck with respect to camera eyes by moving the chuck relative to the camera eyes;

storing the initial locations of the reference marks in memory;

capturing images of alignment marks on a reference plate that moves with the chuck;

removing the reference plate;

determining locations of the alignment marks on the reference plate with respect to the camera eyes; and

storing the locations of the alignment marks in memory.

17. The method of claim 16 , further comprising:

printing on at least one blank plate;

recapturing images of the reference marks on the chuck;

determining subsequent locations of the reference marks; and

comparing the subsequent locations of the reference marks to the initial locations of the reference marks.

18. The method of claim 17 , further comprising:

replacing the initial locations of the reference marks in memory with the subsequent locations of the reference marks;

recapturing images of the alignment marks on the reference plate;

determining locations of the alignment marks on the reference plate from the recaptured images; and

storing the locations of the alignment marks in memory.

19. The method of claim 16 , further comprising creating a reference tool model based on the locations of the reference marks and the locations of the alignment marks.

20. The method of claim 19 , further comprising:

capturing alignment marks on another plate to determine active reference mark locations;

creating a variation model based on differences between the active reference mark locations and the initial reference mark locations:

creating an active alignment model based on the variation model and the reference tool model; and

applying an inverse of the active alignment model as a correction model.