Capacitive sensor and manufacturing method thereof
View Patent ↗A capacitive sensor is disclosed. The capacitive sensor includes a substrate, a first electrode and a second electrode formed on the substrate, an insulation layer formed on the substrate on which the first electrode and the second electrode are formed, and a sensing layer that is formed on the insulation layer and includes graphene.
1. A capacitive sensor comprising:
a substrate comprising a terminal area and a sensing area;
a first electrode comprising a first terminal disposed on the terminal area and a first pattern disposed on the sensing area;
a second electrode separated from the first electrode and comprising a second terminal disposed on the terminal area and a second pattern disposed on the sensing area;
an insulation layer disposed on the sensing area, the insulation layer covers the first pattern and the second pattern and exposes the first terminal and the second terminal; and
a sensing layer disposed on the insulation layer and covering at least a portion of the insulation layer such that the sensing layer is insulated and physically separated from the first and second electrodes,
wherein the sensing layer comprises a graphene.
2. The capacitive sensor of claim 1 , wherein the substrate comprises silicon, glass, or alumina.
3. The capacitive sensor of claim 1 , wherein the sensing layer is a graphene paste containing the graphene.
4. The capacitive sensor of claim 1 , wherein the first electrode and the second electrode comprise at least one of chromium (Cr), gold (Au), aluminum (Al), platinum (Pt), molybdenum (Mo), copper (Cu), iron (Fe), tungsten (W), and palladium (Pd).
5. The capacitive sensor of claim 1 , wherein the first pattern and the second pattern form an interdigitated pattern.
6. The capacitive sensor of claim 1 , wherein a capacitance or a permittivity of the sensing layer changes according to a state of a measured substance touching the sensing layer.
7. The capacitive sensor of claim 1 , wherein the sensing layer has a thickness of 4 μm to 6 μm.
8. The capacitive sensor of claim 1 , wherein the insulation layer has a thickness of 500 A to 2000 A.
9. A method of manufacturing a capacitive sensor, the method comprising:
disposing at least one electrode comprising a terminal and a pattern on a substrate comprising a terminal area and a sensing area;
disposing an insulation layer on the sensing area of the substrate, the insulation layer covers the first pattern and the second pattern and exposes the first terminal and the second terminal; and
disposing a sensing layer on the insulation layer such that the sensing layer covers at least a portion of the insulation layer and is insulated and physically separated from the at least one electrode,
wherein the sensing layer comprises a graphene, and
wherein the terminal is disposed on the terminal area and the pattern is disposed on the sensing area.
10. The method of claim 9 , wherein the forming of the at least one electrode comprises:
depositing an electrode substance; and
applying lithography, the lithography comprising coating a photosensitive material, exposure to light, and etching.
11. A method of manufacturing a capacitive sensor, the method comprising:
disposing at least one electrode comprising a terminal and a pattern on a substrate comprising a terminal area and a sensing area;
disposing an insulation layer on the sensing area of the substrate, the insulation layer covers the first pattern and the second pattern and exposes the first terminal and the second terminal; and
disposing a sensing layer on the insulation layer such that the sensing layer covers at least a portion of the insulation layer and is insulated and physically separated from the at least one electrode,
wherein the sensing layer comprises a graphene;
wherein the terminal is disposed on the terminal area and the pattern is disposed on the sensing area; and
wherein the disposing the sensing layer comprises: screen printing a graphene paste containing the graphene.
12. The capacitive sensor of claim 1 , wherein the first pattern comprises a first extending part and a plurality of first branch parts, and the second pattern comprises a second extending part and a plurality of second branch parts.
13. The capacitative sensor of claim 12 , wherein the plurality of first branch parts and the plurality of second branch parts form an interdigitated pattern.