Vertical transistor with one atomic layer gate length

1. A vertical transistor, comprising:

a substrate;

a gate comprising a two-dimensional (2D) material on top of the substrate;

a spacer on top of the gate;

a gate dielectric comprising (i) a first portion on top of the spacer, (ii) a second portion extending down to a first side surface of the spacer and a side surface of the gate, and (iii) a third portion on top of the substrate;

a channel comprising (i) a first portion on top of the first portion of the gate dielectric, (ii) a second portion extending down to a first side surface of the second portion of the gate dielectric, and (iii) a third portion on top of the third portion of the gate dielectric;

a mask layer between the first portion of the gate dielectric and the spacer;

a first electrode on top of the first portion of the channel; and

a second electrode on top of the third portion of the channel.

2. The vertical transistor of claim 1 , further comprising a first spacer coupled between the gate and the substrate.

3. The vertical transistor of claim 2 , wherein the second portion of the gate dielectric further extends down to a first side surface of the first spacer.

4. The vertical transistor of claim 2 , wherein the first spacer has a thickness that is larger than a thickness of the spacer on top of the gate.

5. The vertical transistor of claim 1 , wherein a gate length of the vertical transistor is based on a thickness of the gate.

6. The vertical transistor of claim 1 , wherein:

the first electrode is configured as a source; and

the second electrode is configured as a drain.

7. The vertical transistor of claim 1 , wherein the 2D material of the gate is graphene.

8. The vertical transistor of claim 1 , wherein the 2D material of the gate has a thickness of a single atomic layer.

9. The vertical transistor of claim 1 , wherein the vertical transistor is configured as a depletion mode device.

10. The vertical transistor of claim 1 , wherein the substrate comprises a silicon on insulator structure.

11. A vertical transistor, comprising:

a substrate;

a gate comprising a two-dimensional (2D) material on top of the substrate;

a spacer on top of the gate;

a gate dielectric comprising (i) a first portion on top of the spacer, (ii) a second portion extending down to a first side surface of the spacer and a side surface of the gate, and (iii) a third portion on top of the substrate;

a channel comprising (i) a first portion on top of the first portion of the gate dielectric, (ii) a second portion extending down to a first side surface of the second portion of the gate dielectric, and (iii) a third portion on top of the third portion of the gate dielectric;

a first electrode on top of the first portion of the channel; and

a second electrode on top of the third portion of the channel, wherein a left side surface of the second electrode is not in contact with a right side surface of the second portion of the channel.

12. A method of fabricating a vertical transistor, comprising:

providing a substrate;

defining a first spacer on top of the substrate;

depositing a gate comprising a two-dimensional (2D) material on top of the first spacer;

defining a second spacer on top of the gate;

forming a mask on top of the second spacer;

removing the second spacer, the gate, and the first spacer from areas not protected by the mask;

depositing a gate dielectric comprising: (i) a first portion on top of the second spacer, (ii) a second portion comprising a first side surface of the second spacer, a first side surface of the gate, and a first side surface of the first spacer, and (iii) a third portion on top of the substrate;

depositing a channel comprising: (i) a first portion on top of the first portion of the gate dielectric, (ii) a second portion comprising a first side surface of the second portion of the gate dielectric, and (iii) a third portion on top of the third portion of the gate dielectric;

forming a first electrode on top of the first portion of the channel; and

forming a second electrode on top of the third portion of the channel.

13. The method of claim 12 , wherein the first spacer and the second spacer are each defined using chemical vapor deposition (CVD).

14. The method of claim 12 , wherein the gate is synthesized via mechanical exfoliation and growth, followed by transferring.

15. The method of claim 12 , further comprising removing the mask from the top of the second spacer, before depositing the gate dielectric.

16. The method of claim 12 , wherein the second spacer, the gate, and the first spacer are removed from areas not protected by the mask by reactive ion etch (RIE).

17. The method of claim 12 , wherein a gate length of the vertical transistor is based on a thickness of the gate.

18. The method of claim 12 , further comprising:

configuring the first electrode as a source; and

configuring the second electrode as a drain.

19. A method of fabricating a vertical transistor, comprising:

providing an insulating substrate;

depositing a gate comprising a two-dimensional (2D) material on top of the substrate;

defining a spacer on top of the gate;

forming a mask on top of the spacer;

removing the spacer and the gate from areas not protected by the mask;

depositing a gate dielectric comprising: (i) a first portion on top of the spacer, (ii) a second portion comprising a first side surface of the spacer and a first side surface of the gate, and (iii) a third portion on top of the substrate;

depositing a channel comprising: (i) a first portion on top of the first portion of the gate dielectric, (ii) a second portion comprising a first side surface of the second portion of the gate dielectric, and (iii) a third portion on top of the third portion of the gate dielectric;

forming a first electrode on top of the first portion of the channel; and

forming a second electrode on top of the third portion of the channel.