Liquid level indicator and liquid raw material vaporization feeder
To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L 1 in the chamber 2 , and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2 a of the chamber 2 and fixed thereto.
1. A liquid level indicator assembly, comprising:
a chamber that stores a liquid; a liquid level detector and a temperature detector,
wherein the liquid level detector is configured to include a protection tube housing a resistance temperature detector and be horizontally disposed in the chamber,
the protection tube is horizontally inserted through a through-hole provided in a sidewall of the chamber and fixed thereto,
the protection tube includes a flange for fixing to the sidewall of the chamber, and
the liquid level indicator assembly further including,
(a) a metal gasket interposed between the flange and the outer surface of the sidewall of the chamber and surrounding a perimeter of the protection tube, and
(b) recesses for a gasket, each formed in each of the flange and the outer surface of the sidewall of the chamber for receiving the metal gasket.
2. The liquid level indicator assembly according to claim 1 , wherein the temperature detector includes a protection tube housing a resistance temperature detector and is horizontally disposed in the chamber.
3. The liquid level indicator assembly according to claim 2 , wherein the protection tube of the liquid level detector and the protection tube of the temperature detector are integrated by attaching the protection tube of the temperature detector to the flange provided on the protection tube of the liquid level detector.
4. The liquid level indicator assembly according to claim 2 , wherein the temperature detector and the liquid level detector are disposed at the same horizontal level.
5. The liquid level indicator assembly according to claim 2 , configured such that a first current for temperature measurement is passed through the resistance temperature detector of the temperature detector, while a second current larger than the first current is passed through the resistance temperature detector of the liquid level detector, and resistance values of the respective resistance temperature detectors are compared, thereby detecting whether the liquid level detector is present in a liquid phase portion or in a gas phase portion.
6. The liquid level indicator assembly according to claim 5 , wherein the temperature detector is disposed below a predetermined minimum liquid level, and the liquid level detector is disposed at the minimum liquid level or a predetermined maximum liquid level.
7. The liquid level indicator assembly according to claim 1 , wherein the temperature detector includes one of the elements selected from the group consisting of a thermocouple, a thermistor, and an infrared thermometer.
8. The liquid level indicator assembly according to claim 1 , configured such that a current having a larger current value than a current for temperature measurement is passed through the resistance temperature detector of the liquid level detector to measure a detection temperature, and the detection temperature measured by the liquid level detector is compared with a temperature measured by the temperature detector, thereby detecting whether the liquid level detector is present in a liquid phase portion or in a gas phase portion.
9. The liquid level indicator assembly according to claim 1 , wherein the protection tube has been subjected to a passivation treatment.
10. The liquid level indicator assembly according to claim 1 further includes annular projections for pressing a gasket, formed in each of the recesses for a gasket.
11. A liquid raw material vaporization feeder comprising:
a chamber that stores and vaporizes a liquid raw material;
a liquid level detector disposed in the chamber;
a temperature detector that measures the temperature in the chamber; and
a flow controller that controls a flow rate of the raw material gas vaporized in the chamber,
wherein the liquid level detector is configured to include a protection tube housing a resistance temperature detector and be horizontally disposed in the chamber,
wherein the protection tube is horizontally inserted through a through-hole provided in a sidewall of the chamber and fixed thereto,
the protection tube includes a flange for fixing to the sidewall of the chamber, and
the liquid raw material vaporization feeder further including,
(a) a metal gasket interposed between the flange and the outer surface of the sidewall of the chamber and surrounding a perimeter of the protection tube, and
(b) recesses for a gasket, each formed in each of the flange and the outer surface of the sidewall of the chamber for receiving the metal gasket.
12. The liquid raw material vaporization feeder according to claim 11 further includes
annular projections for pressing a gasket, formed in each of the recesses for a gasket.
13. The liquid raw material vaporization feeder according to claim 11 , wherein
the temperature detector includes a protection tube housing a resistance temperature detector or a thermocouple and is horizontally disposed in the chamber, and
the liquid level detector and the temperature detector are disposed at the same horizontal level.
14. The liquid raw material vaporization feeder according to claim 13 , wherein the protection tube of the liquid level detector and the protection tube of the temperature detector are integrated by attaching the protection tube of the temperature detector to the flange provided on the protection tube of the liquid level detector.
15. The liquid raw material vaporization feeder according to claim 11 , wherein a vapor barrier plate for blocking vapor rising from the liquid raw material is provided below the protection tube.
16. The liquid raw material vaporization feeder according to claim 15 , wherein the vapor barrier plate extends obliquely.