Support unit, apparatus and method for treating a substrate
An embodiment includes a support unit, substrate treating apparatus and substrate treating method. The substrate treating apparatus comprises: a process chamber having a treatment space inside thereof; a support unit for supporting a substrate inside of the process chamber; and a gas supply unit for supplying the treatment gas into the treatment space, wherein the support unit comprises: an electrode layer of a metal material to which a high frequency electric power can be applied; a ground line having one end connected to the electrode layer and the other end grounded; and a switch provided on the ground line.
1. A substrate treating apparatus comprising:
a process chamber having a treatment space inside thereof;
a support unit for supporting a substrate inside of the process chamber; and
a gas supply unit for supplying the treatment gas into the treatment space,
wherein the support unit comprises:
an electrode layer of a metal material to which a high frequency electric power can be applied;
a ground line having one end connected to the electrode layer and the other end grounded;
a switch provided on the ground line; and
a controller for controlling the switch,
wherein the ground line comprises:
a first line connected to the electrode layer; and
a second line which is grounded,
wherein the switch is provided to electrically connect the second line and the first line,
wherein the second line is provided with a plurality of numbers and each second line is provided in parallel with one another, wherein the switch is provided to electrically connect any one of the second lines with the first line.
2. The apparatus of claim 1 , wherein the controller maintains the switch open while high-frequency power is applied to the electrode layer and maintains the switch closed such that the second line and the first line are electrically connected while the high frequency power is not applied to the electrode layer.
3. The apparatus of claim 1 , wherein a resistance element having a predetermined resistance value is provided in the second line.
4. The apparatus of claim 1 , wherein the controller maintains the switch open while high-frequency power is applied to the electrode layer and maintains the switch closed such that any one of the second lines is electrically connected to the first line while the high frequency power is not applied to the electrode layer.
5. The apparatus of claim 1 , wherein in each of the second lines, a resistance element having a predetermined resistance value is provided, and the resistance values of the resistance elements are different from each other.
6. A support unit comprising:
an electrode layer of a metal material to which a high frequency electric power can be applied;
a ground line having one end connected to the electrode layer and the other end grounded;
a switch provided on the ground line; and
a controller for controlling the switch,
wherein the ground line comprises:
a first line connected to the electrode layer; and
a second line which is grounded,
wherein the switch is provided to electrically connect the second line and the first line,
wherein the second line is provided with a plurality of numbers and each second line is provided in parallel with one another, wherein the switch is provided to electrically connect any one of the second lines with the first line.
7. The support unit of claim 6 , wherein the controller maintains the switch open while high-frequency power is applied to the electrode layer and maintains the switch closed such that the second line and the first line are electrically connected while the high frequency power is not applied to the electrode layer.
8. The support unit of claim 6 , wherein a resistance element having a predetermined resistance value is provided in the second line.
9. The support unit of claim 6 , wherein the controller maintains the switch open while high-frequency power is applied to the electrode layer and maintains the switch closed such that any one of the second lines is electrically connected to the first line while the high frequency power is not applied to the electrode layer.
10. The support unit of claim 6 , wherein in each of the second lines, a resistance element having a predetermined resistance value is provided, and the resistance values of the resistance elements are different from each other.
11. A substrate treating method using the apparatus of claim 1 comprising disconnecting the connection between the electrode layer and the ground within the ground line while the high-frequency power is applied to the electrode layer, and maintaining a connection between the electrode layer and the ground in the ground line while high frequency power is not applied to the electrode layer.
12. The method of claim 11 , wherein a resistance element having a predetermined resistance value is provided on the ground line, wherein the resistance element is positioned in the lower position of a connection point for disconnecting or holding a connection between the electrode layer and the ground.