IP Library › Granted Patent US 10,607,981
Granted Patent B2
US 10,607,981 · App. 16/101,528 · Granted Mar 31, 2020

Layout pattern for static random access memory

Inventors: Shu-Wei Yeh (Taichung, TW); Chang-Hung Chen (Tainan, TW)
Assignee: UNITED MICROELECTRONICS CORP.
H01L27/0207G11C8/16G11C11/412G11C11/417H01L27/11
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,607,981
App. No.
16/101,528
Granted
Mar 31, 2020
Kind
B2
Abstract

The present invention provides a layout pattern of a static random access memory (SRAM), comprising at least one substrate, two SRAM units on the substrate, respectively located in a first region and a second region which is adjacent to the first region. Each of the SRAM units includes a first inverter coupled to a second inverter and configured to form a latching circuit, the first inverter includes a first pull-up transistor (PU 1 ) and a first pull-down transistor (PD 1 ), the second inverter includes a second pull-up transistor (PU 2 ) and a second pull-down transistor (PD 2 ). A dummy layer crossing the first a region and the second region, and between the PD 1 in the first region and the PD 1 in the second region, and a contact structure on the dummy layer, electrically connected to a voltage source Vss.

Claims (27)

1. A static random access memory (SRAM) layout pattern, comprising:

a substrate;

two SRAM cells are disposed on the substrate, disposed in a first region and a second region adjacent to the first region respectively, wherein each SRAM cell includes a first inverter and a second inverter coupling with each other and constituting a latch circuit, wherein the first inverter includes a first pull-up transistor (PU 1 ) and a first pull-down transistor (PD 1 ), the second inverter includes a second pull-up transistor (PU 2 ) and a second pull-down transistor (PD 2 );

a dummy layer crossing the first region and the second region, and located between the PD 1 in the first region and the PD 1 in the second region; and

a contact structure disposed on the dummy layer and electrically connected to a voltage source Vss.

2. The static random access memory layout pattern of claim 1 , wherein the PD 1 in the first region comprises a first gate, a gate length of the first gate is defined as L 1 , and a length of the dummy layer is defined as L 2 , wherein L 2 /L 1 is larger than 10.

3. The static random access memory layout pattern of claim 1 , further comprising a first structural layer, wherein in the first region, the PU 1 , the PD 1 , the PU 2 , the PD 2 , and the dummy layer are located in the first structural layer.

4. The static random access memory layout pattern of claim 3 , further comprising a first metal trace electrically connecting the contact structure and the voltage source Vss, and the first metal trace is located in a second structural layer (M 1 ), and the second structural layer is located on the first structural layer.

5. The static random access memory layout pattern of claim 1 , wherein the dummy layer is located on a fin structure, and the fin structure comprises a first portion located in the first region and a second portion located in the second region.

6. The static random access memory layout pattern of claim 5 , further comprising a stress layer disposed under the dummy layer, and the stress layer is located between the first portion and the second portion.

7. The static random access memory layout pattern of claim 6 , wherein the stress layer provides a stress to the PD 1 in the first region and to the PD 1 in the second region.

8. The static random access memory layout pattern of claim 1 , wherein each of the SRAM cells further comprises a first access transistor (PG 1 A), a second access transistor (PG 1 B), a third access transistor (PG 2 A) and a fourth access transistor (PG 2 B), electrically connected to the latch circuit respectively.

9. The static random access memory layout pattern of claim 8 , wherein when viewed in a top view, the PG 1 A comprises a second gate layer, the PU 2 comprises a third gate layer, and one side of the second gate layer, one side of the third gate layer, and one side of the dummy layer are aligned with each other.

10. The static random access memory layout pattern of claim 1 , wherein each of the SRAM cells is an eight transistors dual-port static random access memory (8T-dual port SRAM).

11. The static random access memory layout pattern of claim 1 , wherein the dummy layer is an integrally formed structure.

12. A static random access memory (SRAM) layout pattern, comprising:

a substrate;

two SRAM cells are disposed on the substrate, disposed in a first region and a second region adjacent to the first region respectively, wherein each SRAM cell includes a first inverter and a second inverter coupling with each other and constituting a latch circuit, wherein the first inverter includes a first pull-up transistor (PU 1 ) and a first pull-down transistor (PD 1 ), the second inverter includes a second pull-up transistor (PU 2 ) and a second pull-down transistor (PD 2 );

a first dummy gate layer located in the first region and crossing over a first fin structure;

a second dummy gate layer located in the second region adjacent to the first dummy gate layer and crossing over a second fin structure, wherein the first fin structure directly contacts the second fin structure; and

a contact structure disposed on the first dummy layer and electrically connected to a voltage source Vss.

13. The static random access memory layout pattern of claim 12 , further comprising a first structural layer, wherein in the first region, the PU 1 , the PD 1 , the PU 2 , the PD 2 , and the dummy layer are located in the first structural layer.

14. The static random access memory layout pattern of claim 13 , further comprising a first metal trace electrically connecting the contact structure and the voltage source Vss, and the first metal trace is located in a second structural layer (M 1 ), and the second structural layer is located on the first structural layer.

15. The static random access memory layout pattern of claim 12 , wherein when viewed in a cross section view, a top surface of the first fin structure is aligned with a top surface of the second fin structure.

16. The static random access memory layout pattern of claim 12 , wherein each of the SRAM cells further comprises a first access transistor (PG 1 A), a second access transistor (PG 1 B), a third access transistor (PG 2 A) and a fourth access transistor (PG 2 B), electrically connected to the latch circuit respectively.

17. The static random access memory layout pattern of claim 16 , wherein when viewed in a top view, the PG 1 A comprises a second gate layer, the PU 2 comprises a third gate layer, and one side of the second gate layer, one side of the third gate layer, and one side of the dummy gate layer are aligned with each other.

18. The static random access memory layout pattern of claim 12 , wherein each of the SRAM cells is an eight transistors dual-port static random access memory (8T-dual port SRAM).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2018
From: YEH, SHU-WEI; CHEN, CHANG-HUNG
To: UNITED MICROELECTRONICS CORP.
Reel/Frame 046621/0704 →
Priority Claims (1)
CN 2018 1 0801484 · Jul 20, 2018 · national
Continuity (1)
Related Publication 20200027869A1 · Jan 23, 2020
Cited By (1)
US 12,389,583