IP Library › Granted Patent US 10,612,136
Granted Patent B2
US 10,612,136 · App. 16/024,390 · Granted Apr 7, 2020

Temperature-controlled flange and reactor system including same

Inventors: Sonti Sreeram (Gilbert, AZ); John Tolle (Gilbert, AZ); Joe Margetis (Gilbert, AZ); Junwei Su (Tempe, AZ)
Assignee: ASM IP HOLDING, B.V.
C23C16/455
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Quick Facts
Patent No.
US 10,612,136
App. No.
16/024,390
Granted
Apr 7, 2020
Kind
B2
Abstract

A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

Claims (33)

1. A flange assembly comprising:

a flange comprising:

a first surface for coupling to a reactor;

an opposing second surface; and

an opening between the first surface and the second surface;

a sealing member;

at least one heater above the opening and at least one heater below the opening; and

at least one cooling channel proximate the sealing member.

2. The flange assembly of claim 1 , wherein the at least heater above the opening is embedded within the flange.

3. The flange assembly of claim 1 , wherein the at least cooling channel comprises a pipe at least partially embedded within the flange.

4. The flange assembly of claim 1 , wherein the first surface comprises a recess to receive the sealing member.

5. The flange assembly of claim 4 , wherein the at least cooling channel is proximate the recess.

6. The flange assembly of claim 1 , wherein the second surface comprises a recess to receive the sealing member.

7. The flange assembly of claim 6 , wherein the at least one cooling channel is proximate the recess.

8. The flange assembly of claim 1 , wherein the flange further comprises an exhaust outlet.

9. The flange assembly of claim 8 , wherein the at least one heater below the opening is proximate the exhaust outlet.

10. The flange assembly of claim 9 , wherein the flange assembly comprises at least two heaters proximate the exhaust outlet.

11. The flange assembly of claim 1 , wherein the flange further comprises at least two additional heaters on opposing sides of the opening.

12. The flange assembly of claim 1 , wherein the flange comprises at least four heaters proximate the opening.

13. The flange assembly of claim 1 , wherein the flange further comprises one or more openings to receive one or more thermocouples.

14. The flange assembly of claim 1 , further comprising a cover plate.

15. The flange assembly of claim 1 , further comprising one or more heater retainers.

16. A reactor system comprising the flange assembly of claim 1 and a controller coupled to the at least one heater above the opening and the at least one heater below the opening, wherein the controller is configured to control flow of a coolant.

17. A flange comprising:

a first surface for coupling to a reactor;

an opposing second surface;

an opening between the first surface and the second surface;

at least one recess to receive a heater above the opening; and

at least one cooling channel below the opening.

18. The flange of claim 17 , wherein the first surface comprises a recess to receive a sealing member.

19. The flange of claim 17 , wherein the second surface comprises a recess to receive a sealing member.

20. The flange of claim 17 , further comprising an exhaust outlet, wherein at least one of the at least one recess to receive a heater is proximate the exhaust outlet.

21. The flange of claim 17 , wherein the flange comprises at least two additional recesses, each of the at least two additional recesses configured to receive one or more heaters, the at least two additional recesses proximate the opening and on opposing sides of the flange.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 13, 2020
From: SREERAM, SONTI; TOLLE, JOHN; MARGETIS, JOE; SU, JUNWEI
To: ASM IP HOLDING B.V.
Reel/Frame 054364/0309 →
Continuity (1)
Related Publication 20200002811A1 · Jan 2, 2020