Multilayer seed pattern inductor and manufacturing method thereof
A multilayer seed pattern inductor includes a magnetic body and an internal coil part. The magnetic body contains a magnetic material. The internal coil part is embedded in the magnetic body and includes connected coil conductors disposed on two opposing surfaces of an insulating substrate. Each of the coil conductors includes a seed pattern formed of at least two layers, a surface coating layer covering the seed pattern, and an upper plating layer formed on an upper surface of the surface coating layer.
1. A multilayer seed pattern inductor comprising:
a magnetic body containing a magnetic material; and
an internal coil part embedded in the magnetic body and including connected coil conductors disposed on two opposing surfaces of an insulating substrate,
wherein each of the coil conductors includes a seed pattern including first and second seed pattern layers, a surface coating layer covering the seed pattern, and an upper plating layer disposed on an upper surface of the surface coating layer,
wherein the seed pattern has a height greater than a width thereof, wherein the width is measured along one of the opposing surfaces of the insulating substrate, and
wherein the first seed pattern layer has the surface coating layer contacting only side surfaces thereof from among top, bottom, and side surfaces, and the second seed pattern layer has the surface coating layer covering upper and side surfaces thereof.
2. The multilayer seed pattern inductor of claim 1 , wherein the upper plating layer includes a first upper plating layer disposed on the upper surface of the surface coating layer and a second upper plating layer disposed on an upper surface of the first upper plating layer.
3. The multilayer seed pattern inductor of claim 1 , wherein the second seed pattern layer covers the upper surface of the first seed pattern layer, and the seed pattern has an overall thickness of 100 μm or more.
4. The multilayer seed pattern inductor of claim 1 , wherein the seed pattern has a substantially rectangular cross-sectional shape.
5. The multilayer seed pattern inductor of claim 1 , wherein the surface coating layer extends in width and thickness directions to cover upper and side surfaces of the seed pattern.
6. The multilayer seed pattern inductor of claim 1 , wherein the upper plating layer extends only on the upper surface of the surface coating layer, among upper and side surfaces of the surface coating layer, in a thickness direction only.
7. The multilayer seed pattern inductor of claim 1 , wherein the surface coating layer is an isotropic plating layer.
8. The multilayer seed pattern inductor of claim 1 , wherein the upper plating layer is an anisotropic plating layer.
9. The multilayer seed pattern inductor of claim 1 , wherein a thin film conductor layer is disposed between a lower seed pattern surface and the insulating substrate.
10. The multilayer seed pattern inductor of claim 1 , wherein the magnetic body includes a magnetic metal powder and a thermosetting resin.
11. The multilayer seed pattern inductor of claim 1 , wherein the seed pattern and surface coating layer jointly extend to a height greater than a width thereof measured along one of the opposing surfaces of the insulating substrate.
12. A multilayer base pattern inductor comprising:
a magnetic body containing a magnetic material; and
an internal coil part embedded in the magnetic body and including connected coil conductors disposed on two opposing surfaces of an insulating substrate,
wherein each of the coil conductors includes a base pattern including first and second seed pattern layers, a surface coating layer covering the base pattern, and an outer plating layer disposed on an outer surface of the surface coating layer facing away from the insulating substrate,
wherein the outer plating layer extends only on an upper surface facing away from the insulating substrate, among upper and side surfaces of the surface coating layer of each of the coil conductors,
wherein the first seed pattern layer has the surface coating layer contacting only side surfaces thereof from among top, bottom, and side surfaces, and the second seed pattern layer has the surface coating layer covering upper and side surfaces thereof, and wherein the base pattern has a height greater than a width thereof, wherein the width is measured along one of the opposing surfaces of the insulating substrate.
13. The multilayer base pattern inductor of claim 12 , wherein each outer plating layer includes a first outer plating layer disposed on the outer surface of the surface coating layer and a second outer plating layer disposed on an outer surface of the first outer plating layer.
14. The multilayer base pattern inductor of claim 12 , wherein the base pattern has an overall thickness of 100 μm or more.
15. The multilayer base pattern inductor of claim 12 , wherein the base pattern has a substantially rectangular cross-sectional shape.
16. The multilayer base pattern inductor of claim 12 , wherein the surface coating layer extends in width and thickness directions to cover outer and side surfaces of the base pattern.
17. The multilayer base pattern inductor of claim 12 , wherein side surfaces of the surface coating layer are free of the outer plating layer.
18. The multilayer base pattern inductor of claim 12 , wherein the surface coating layer is an isotropic plating layer.
19. The multilayer base pattern inductor of claim 12 , wherein the outer plating layer is an anisotropic plating layer.
20. The multilayer base pattern inductor of claim 12 , wherein a thin film conductor layer is disposed between a lower base pattern surface and the insulating substrate.
21. The multilayer base pattern inductor of claim 12 , wherein the magnetic body includes a magnetic metal powder and a thermosetting resin.
22. The multilayer base pattern inductor of claim 12 , wherein the base pattern and surface coating layer jointly extend to a height greater than a width thereof measured along one of the opposing surfaces of the insulating substrate.