Heating device
A heating device includes a holding member and having thereinside a plurality of resistive heating elements connected to different pairs of electrode terminals, and a columnar support joined to the second surface of the holding member. The plurality of resistive heating elements include a first resistive heating element and a second resistive heating element. The first resistive heating element is disposed throughout a first region including a region that overlaps the columnar support member as viewed from the first direction and a second region that is located around the outer periphery of the first region and that does not overlap the columnar support member as viewed from the first direction. The second resistive heating element is disposed at a position closer to the first surface than the first resistive heating element in the first direction and is disposed in only the first region.
1. A heating device for heating an object, comprising:
a holding member in a shape of a plate with a first surface and a second surface that are substantially orthogonal to a first direction, the object held on the first surface of the holding member;
a columnar support member having a columnar shape extending in the first direction, the columnar support member joined to the second surface of the holding member;
a first resistive heating element disposed within the holding member throughout a first region of the holding member that, as viewed from the first direction, overlaps the columnar support member and a second region of the holding member that, as viewed from the first direction, is located around an outer periphery of the first region and that does not overlap the columnar support member;
a second resistive heating element disposed within the holding member at a position in the first direction that is closer to the first surface than a position of the first resistive heating element in the first direction and disposed in only the first region; and
a third resistive heating element disposed within the holding member at a position in the first direction the same as the position of the first resistive heating element in the first direction and disposed in only a third region of the holding member that, as viewed from the first direction, is located around an outer periphery of the second region, wherein the third resistive heating element does not overlap the first resistive heating element as view from the first direction.
2. A heating device for heating an object, comprising:
a holding member in a shape of a plate with a first surface and a second surface that are substantially orthogonal to a first direction, the object held on the first surface of the holding member;
a columnar support member having a columnar shape extending in the first direction, the columnar support member joined to the second surface of the holding member;
a first resistive heating element disposed within the holding member throughout a first region of the holding member that, as viewed from the first direction, overlaps the columnar support member and a second region of the holding member that, as viewed from the first direction, is located around an outer periphery of the first region and that does not overlap the columnar support member;
a second resistive heating element disposed within the holding member at a position in the first direction that is closer to the first surface than a position of the first resistive heating element in the first direction and disposed in only the first region; and
a third resistive heating element disposed within the holding member at a position in the first direction the same as the position of the second resistive heating element in the first direction and disposed in only a third region of the holding member that, as viewed from the first direction, is located around an outer periphery of the second region, wherein the third resistive heating element does not overlap the first resistive heating element as view from the first direction.