Transfer head for micro LED
The present invention relates to a transfer head for a micro LED, the transfer head gripping a micro LED and transferring the micro LED to a display substrate. In particular, the present invention relates to a transfer head for a micro LED, the transfer head gripping a micro LED in a state where a grip surface of the transfer head and an upper surface of the micro LED are not in contact with each other when transferring the micro LED. Accordingly, it is possible to prevent positional error which may occur when transferring the micro LED and prevent damage of the micro LED.
1. A transfer head for a micro LED, the transfer head comprising:
a grip portion; and
a recess portion provided on a lower surface of the grip portion,
wherein a plurality of micro LEDs are picked up by the recess portion,
wherein the grip portion is an anodic oxide film that includes a barrier layer in which pores are not formed and a porous layer in which pores are formed,
wherein the anodic oxide film includes a suction region gripping the micro LEDs by vacuum-suction and a non-suction region not gripping the micro LEDs,
wherein the suction region is formed by removing the barrier layer so that pores extend from top to bottom vertically in the suction region,
wherein the non-suction region is formed such that the barrier layer closes any one of upper and lower portions of pores in the non-suction region,
wherein the suction region is a region corresponding to a position where the recess portion is formed, the pores in the suction region communicating with the recess portion, and
wherein the micro LEDs contact the lower surface of the grip portion.
2. The transfer head of claim 1 , wherein the transfer head is controlled such that a lower surface of the transfer head is spaced apart from the micro LEDs when the transfer head picks up the micro LEDs.
3. The transfer head of claim 1 , wherein the recess portion has an inclined portion.
4. The transfer head of claim 1 , wherein a lower surface of an area where the recess portion picks up a micro LED among the micro LEDs and is provided on the lower surface of the grip portion is configured to be larger than an upper surface of the micro LED.