Vapor deposition mask, method of manufacturing the same and method of manufacturing organic light emitting diode using the vapor deposition mask
A vapor deposition mask used for forming a thin film pattern on a substrate enables to form much higher-definition thin film pattern and to closely attract and hold the vapor deposition mask to and on a surface of a transparent substrate by a magnetic force in a state that the substrate held on a substrate holder is intermediated therebetween, while preventing occurrence of shadow portions (vapor deposition shadows) to which no deposition material is adhered due to a holding member. A vapor deposition mask 1 is composed of a single resin film layer 2 or a resin film layer 2 and a holding member 7 of a substantially rectangular thin plate frame body, and a metal powder 4 is contained in the resin film layer 2 in which a plurality of through openings 3 are formed. When having the holding member 7 , a single rectangular opening 8 including a portion of the resin film layer 2 where a plurality of the through openings 3 are formed is formed on the holding member 7.
1. A method of manufacturing a vapor deposition mask comprising:
a step for spreading a thermosetting resin material obtained by mixing magnetic metal powders so as to be substantially uniform on a glass substrate;
a step for forming a resin film layer by burning the thermosetting resin material spread on a surface of the glass substrate to be coated; and
a step for disposing a mask for laser processing above the resin film layer formed on the surface of the glass substrate to be coated, and for forming through openings sequentially in a predetermined region of the resin film layer by irradiating laser beams while the mask for laser processing is moved step-by-step manner relative to the resin film layer.
2. The method of manufacturing a vapor deposition mask according to claim 1 , further comprising a step for irradiating ultraviolet laser beams from the glass surface side of the glass substrate so as to burn off an interface between the glass substrate and the resin film layer and to peel off the resin film layer from the glass substrate, subsequent to forming the through openings in entire area of the predetermined region of the resin film layer formed on the surface of the glass substrate to be coated.
3. The method of manufacturing a vapor deposition mask according to claim 2 , further comprising a step for magnetizing the magnetic metal powder contained in the resin film layer and the holding member when the holding member is provided, prior to or subsequent to the step for irradiating the ultraviolet laser beams from the glass surface side of the glass substrate.
4. A method for manufacturing an organic light emitting diode using a vapor deposition mask manufactured by the method of manufacturing the vapor deposition mask according to claim 2 , characterized by comprising:
a step for holding a substrate having anodes formed on a deposition target surface in a vacuum chamber with the substrate holder in a manner that the deposition target surface faces downward;
a step for closely attracting and holding the vapor deposition mask to and on a vapor deposition target surface of the substrate by magnetic force of a magnet provided in a side of the substrate holder opposite to the substrate; and
a step for vaporizing a vapor deposition material from a vapor deposition source while rotating or translating the substrate holder holding the substrate and the vapor deposition mask or the vapor deposition source provided in a bottom portion of the vacuum chamber at a constant speed in a predetermined direction; and wherein
a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and cathodes are formed on the anodes of the substrate while exchanging the vapor deposition mask and the deposition material.
5. A method for manufacturing an organic light emitting diode using a vapor deposition mask manufactured by the method of manufacturing the vapor deposition mask according to claim 3 , characterized by comprising:
a step for holding a substrate having anodes formed on a deposition target surface in a vacuum chamber with the substrate holder in a manner that the deposition target surface faces downward;
a step for closely attracting and holding the vapor deposition mask to and on a vapor deposition target surface of the substrate by magnetic force of a magnet provided in a side of the substrate holder opposite to the substrate; and
a step for vaporizing a vapor deposition material from a vapor deposition source while rotating or translating the substrate holder holding the substrate and the vapor deposition mask or the vapor deposition source provided in a bottom portion of the vacuum chamber at a constant speed in a predetermined direction; and wherein
a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and cathodes are formed on the anodes of the substrate while exchanging the vapor deposition mask and the deposition material.
6. The method of manufacturing a vapor deposition mask according to claim 1 , further comprising a step for laminating a holding member on the resin film layer formed on the surface of the glass substrate to be coated in a region other than the predetermined region, and a step for irradiating ultraviolet laser beams from the glass surface side of the glass substrate so as to burn off an interface between the glass substrate and the resin film layer and to peel off the resin film layer from the glass substrate, subsequent to forming the through openings throughout the predetermined region of the resin film layer formed on the surface of the glass substrate to be coated.
7. The method of manufacturing a vapor deposition mask according to claim 6 , further comprising a step for magnetizing the magnetic metal powder contained in the resin film layer and the holding member when the holding member is provided, prior to or subsequent to the step for irradiating the ultraviolet laser beams from the glass surface side of the glass substrate.
8. A method for manufacturing an organic light emitting diode using a vapor deposition mask manufactured by the method of manufacturing the vapor deposition mask according to claim 6 , characterized by comprising:
a step for holding a substrate having anodes formed on a deposition target surface in a vacuum chamber with the substrate holder in a manner that the deposition target surface faces downward;
a step for closely attracting and holding the vapor deposition mask to and on a vapor deposition target surface of the substrate by magnetic force of a magnet provided in a side of the substrate holder opposite to the substrate; and
a step for vaporizing a vapor deposition material from a vapor deposition source while rotating or translating the substrate holder holding the substrate and the vapor deposition mask or the vapor deposition source provided in a bottom portion of the vacuum chamber at a constant speed in a predetermined direction; and wherein
a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and cathodes are formed on the anodes of the substrate while exchanging the vapor deposition mask and the deposition material.