Multiple plated via arrays of different wire heights on same substrate
View Patent ↗Apparatus(es) and method(s) relate generally to via arrays on a substrate. In one such apparatus, the substrate has a conductive layer. First plated conductors are in a first region extending from a surface of the conductive layer. Second plated conductors are in a second region extending from the surface of the conductive layer. The first plated conductors and the second plated conductors are external to the first substrate. The first region is disposed at least partially within the second region. The first plated conductors are of a first height. The second plated conductors are of a second height greater than the first height. A second substrate is coupled to first ends of the first plated conductors. The second substrate has at least one electronic component coupled thereto. A die is coupled to second ends of the second plated conductors. The die is located over the at least one electronic component.
1. An apparatus, comprising:
a first substrate having a conductive layer;
first plated conductors in a first region extending from a surface of the conductive layer;
second plated conductors in a second region extending from the surface of the conductive layer;
wherein the first plated conductors and the second plated conductors are external to the first substrate;
wherein the first region is disposed at least partially within the second region;
wherein the first plated conductors are of a first height;
wherein the second plated conductors are of a second height greater than the first height;
a second substrate coupled to first ends of the first plated conductors;
the second substrate having at least one electronic component coupled thereto;
a die coupled to second ends of the second plated conductors; and
the die located over the at least one electronic component.
2. The apparatus according to claim 1 , wherein the at least one electronic component includes a discrete passive component.
3. The apparatus according to claim 2 , wherein the second substrate includes a redistribution layer.
4. The apparatus according to claim 2 , wherein the second substrate includes an interposer.
5. The apparatus according to claim 1 , wherein the second substrate includes a redistribution layer.
6. The apparatus according to claim 5 , wherein the at least one electronic component includes a network of two discrete passive components selected from a resistor, a capacitor, or an inductor coupled to the redistribution layer.
7. The apparatus according to claim 1 , wherein the second substrate includes an interposer.
8. The apparatus according to claim 7 , wherein the at least one electronic component includes a network of two discrete passive components selected from a resistor, a capacitor, or an inductor coupled to the interposer.
9. The apparatus according to claim 1 , wherein:
the first plated conductors include a first plated layer; and
the second plated conductors include the first plated layer and a second plated layer thereover.
10. An apparatus, comprising:
a first substrate having a conductive layer;
first plated conductors in a first region extending from a surface of the conductive layer;
second plated conductors in a second region extending from the surface of the conductive layer;
wherein the first plated conductors and the second plated conductors are external to the first substrate;
wherein the first region is disposed at least partially within the second region;
wherein the first plated conductors are of a first height;
wherein the second plated conductors are of a second height greater than the first height;
a die coupled to first ends of the first plated conductors;
a second substrate coupled to second ends of the second plated conductors;
the second substrate having at least one electronic component coupled thereto; and
the second substrate located over the die.
11. The apparatus according to claim 10 , wherein the at least one electronic component includes a discrete passive component.
12. The apparatus according to claim 11 , wherein the second substrate includes a redistribution layer.
13. The apparatus according to claim 11 , wherein the second substrate includes an interposer.
14. The apparatus according to claim 10 , wherein the second substrate includes a redistribution layer.
15. The apparatus according to claim 14 , wherein the at least one electronic component includes a network of two discrete passive components selected from a resistor, a capacitor, or an inductor coupled to the redistribution layer.
16. The apparatus according to claim 10 , wherein the second substrate includes an interposer.
17. The apparatus according to claim 16 , wherein the at least one electronic component includes a network of two discrete passive components selected from a resistor, a capacitor, or an inductor coupled to the interposer.
18. The apparatus according to claim 10 , wherein:
the first plated conductors include a first plated layer; and
the second plated conductors include the first plated layer and a second plated layer thereover.
19. A method, comprising:
obtaining a first substrate;
forming a conductive layer on an upper surface of the first substrate;
forming a first resist layer on the conductive layer;
patterning the first resist layer to provide a first mask with first vias from an upper surface of the first resist layer down to an upper surface of the conductive layer;
through-mask plating in the first vias to provide first plated conductors in a first region extending from the upper surface of the conductive layer;
forming a second resist layer over the first plated conductors;
patterning the second resist layer to provide a second mask with second vias from an upper surface of the second resist layer down to upper surfaces of a subset of the first plated conductors;
through-mask plating in the second vias to provide second plated conductors in a second region extending down to the upper surfaces of and including the subset of the first plated conductors;
removing the first resist layer and the second resist layer;
removing portions of the conductive layer between the first plated conductors and the second plated conductors;
wherein the first plated conductors and the second plated conductors are external to the first substrate;
wherein the first region is disposed at least partially within the second region;
wherein the first plated conductors are of a first height;
wherein the second plated conductors are of a second height greater than the first height;
coupling a second substrate to first ends of the first plated conductors;
the second substrate having at least one electronic component coupled thereto;
coupling a die to second ends of the second plated conductors; and
wherein the die is located over the at least one electronic component.
20. The method according to claim 19 , wherein:
the first conductive layer is a seed layer or an adhesion layer; and
the removing of the first resist layer precedes the forming of the second resist layer.