IP Library Granted Patent US 10,634,635
Granted Patent B2
US 10,634,635 · App. 16/082,895 · Granted Apr 28, 2020

Dielectric constant microscope and method of observing organic specimen

Inventor: Toshihiko Ogura (Tsukuba, JP)
G01N27/221G01N33/48G01N33/4833G01R27/2641G02B21/06G02B21/34
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Quick Facts
Patent No.
US 10,634,635
App. No.
16/082,895
Granted
Apr 28, 2020
Kind
B2
Abstract

A dielectric constant microscope to observe a shape of a micro organic specimen includes first and second insulating films that are disposed to oppose each other such that the organic specimen along with the solution is interposed therebetween, and application-side conductive films P 1 to Pn (where n is an integer greater than 1). The application-side conductive films are separated from each other on an outward surface of the first insulating film. Additionally, the dielectric constant microscope includes measurement-side conductive films p 1 to pm (where m is an integer greater than 1) that are separated from each other on an outward surface of the second insulating film. Input signals Sf 1 to Sfn having potential change at different frequencies are applied to the application-side conductive films P 1 to Pn, potential change is measured for each of the measurement-side conductive films p 1 to pm, and the organic specimen is visualized from a dielectric constant distribution between the first and second insulating films obtained by separating the potential change depending on the frequencies.

Claims (36)

1. A dielectric constant microscope for visualizing an organic specimen in a solution, the dielectric constant microscope comprising:

first and second insulating films disposed to oppose each other such that the organic specimen is interposed therebetween with the solution;

application-side conductive films P 1 to P n (where n is an integer greater than 1) that are separated from each other on an outward surface of the first insulating film; and

measurement-side conductive films p 1 to p m (where m is an integer greater than 1) that are separated from each other on an outward surface of the second insulating film,

wherein input signals S f1 to S fn having potential change at different frequencies are applied to the application-side conductive films P 1 to P m the potential change is measured for each of the measurement-side conductive films p 1 to p m , and the organic specimen is visualized from a dielectric constant distribution between the first and second insulating films obtained by separating the potential change depending on the different frequencies.

2. The dielectric constant microscope according to claim 1 , wherein a combination selected from a group of combinations including a first combination of the first insulating film and the application-side conductive films P 1 to P n and a second combination of the second insulating film and the measurement-side conductive films p 1 to p m is formed of a transparent material, and

an optical microscope configured to observe the organic specimen from a side of the dielectric constant microscope comprising the selected combination formed of the transparent material.

3. The dielectric constant microscope according to claim 1 , wherein the dielectric constant distribution is acquired to correspond to each electrode pair combination between the application-side conductive films P 1 to P n and the measurement-side conductive films p 1 to p m .

4. The dielectric constant microscope according to claim 1 , wherein each of the application-side conductive films P 1 to P n includes a first penetration electrode that penetrates the first insulating film and is exposed from the opposing surface thereof.

5. The dielectric constant microscope according to claim 1 , wherein each of the measurement-side conductive films p 1 to p m includes a second penetration electrode that penetrates the second insulating film and is exposed from the opposing surface thereof.

6. A method of observing an organic specimen using a dielectric constant microscope for visualizing the organic specimen in a solution, the dielectric constant microscope including: first and second insulating films that oppose each other; application-side conductive films P 1 to P n (where n is an integer greater than 1) that are separated from each other on an outward surface of the first insulating film; and measurement-side conductive films p 1 to p m (where m is an integer greater than 1) that are separated from each other on an outward surface of the second insulating film, the method comprising:

interposing the organic specimen between the first and second insulating films with the solution;

applying input signals S f1 to S fn having potential change at different frequencies to the application-side conductive films P 1 to P n ;

measuring the potential change for each of the measurement-side conductive films p 1 to p m ; and

visualizing the organic specimen from a dielectric constant distribution between the first and second insulating films obtained by separating the potential change depending on the different frequencies.

7. The method of observing an organic specimen according to claim 6 , wherein a dielectric constant ratio for each electrode pair combination between the application-side conductive films P 1 to P n and the measurement-side conductive films p 1 to p m is calculated from an output voltage variation in each of the measurement-side conductive films p 1 to p m corresponding to an input voltage variation of a maximum voltage and a minimum voltage for each of the input signals S f1 to S fn .

8. The method of observing an organic specimen according to claim 6 , further comprising:

amplifying a plurality of measurement-side signals having the potential change measured at the measurement-side conductive films p 1 to p m ;

separating the measurement-side signals; and

outputting the separated measurement-side signals to a shape analyzer.

9. The method of observing an organic specimen according to claim 8 , further comprising:

receiving a reference signal for the potential change of the input signals S f1 to S fn , wherein the measurement-side signals are separated on the basis of the frequencies f 1 to fn of the reference signal.

10. The method of observing an organic specimen according to claim 6 , further comprising:

calculating dielectric constants between the measurement-side conductive films p 1 to p n and the application-side conductive films P 1 to P n ; and

generating an image for the organic specimen based on the calculated dielectric constants.

11. The method of observing an organic specimen according to claim 10 , wherein the dielectric constants are calculated based on the potential change from the measurement-side conductive films p 1 to p m , and wherein the potential change from the measurement-side conductive films p 1 to p m vary in voltage in proportion to the dielectric constants.

12. The method of observing an organic specimen according to claim 6 , further comprising:

acquiring a dielectric constant distribution viewed from the measurement-side conductive films p 1 to p m as a plurality of continuous two-dimensional oblique images directed to the application-side conductive films P 1 to P n .

13. The method of observing an organic specimen according to claim 6 , wherein the input signals S f1 to S fn vary in frequency by increments of 10 kHz.

14. The dielectric constant microscope according to claim 1 , wherein the first and second insulating films are parallel to each other.

15. The dielectric constant microscope according to claim 1 , wherein a thickness associated with each of the first and second insulating films is 100 mm or less.

16. The dielectric constant microscope according to claim 1 , wherein the first and second insulating films contact an inner surface of an observation holder using one or more O rings.

17. The dielectric constant microscope according to claim 1 , wherein the application-side conductive films P 1 to P n are equally spaced longitudinally and laterally on the first insulating film.

18. The dielectric constant microscope according to claim 17 , wherein the measurement-side conductive films p 1 to p m are equally spaced longitudinally and laterally on the second insulating film.

19. The dielectric constant microscope according to claim 1 , wherein one of the first and second insulating films is formed of a transparent conductive material.

20. The dielectric constant microscope according to claim 1 , wherein the application-side conductive films P 1 to P n or the measurement-side conductive films p 1 to p m are formed of a transparent material.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 5, 2019
From: OGURA, TOSHIHIKO
To: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Reel/Frame 048234/0861 →
Priority Claims (1)
JP 2016-045990 · Mar 9, 2016 · national
Continuity (1)
Related Publication 20190049399A1 · Feb 14, 2019