IP Library › Granted Patent US 10,636,841
Granted Patent B2
US 10,636,841 · App. 16/170,018 · Granted Apr 28, 2020

Magnetoresistive random access memory

Inventors: Kun-I Chou (Tainan, TW); Hung-Yueh Chen (Hsinchu, TW)
Assignee: UNITED MICROELECTRONICS CORP.
H01L27/228H01L43/08
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Quick Facts
Patent No.
US 10,636,841
App. No.
16/170,018
Granted
Apr 28, 2020
Kind
B2
Abstract

A semiconductor device includes: a first metal-oxide semiconductor (MOS) transistor and a second MOS transistor on a substrate; a magnetic tunneling junction (MTJ) between the first MOS transistor and the second MOS transistor; a first interlayer dielectric (ILD) layer on one side of the MTJ and above the first MOS transistor; and a second ILD layer on another side of the MTJ and above the second MOS transistor.

Claims (26)

1. A semiconductor device, comprising:

a first metal-oxide semiconductor (MOS) transistor and a second MOS transistor on a substrate;

a magnetic tunneling junction (MTJ) between the first MOS transistor and the second MOS transistor;

a first interlayer dielectric (ILD) layer on one side of the MTJ and above and covers the first MOS transistor; and

a second ILD layer on another side of the MTJ and above and covers the second MOS transistor.

2. The semiconductor device of claim 1 , wherein the first MOS transistor comprises:

a first gate structure on the substrate;

a first spacer around the first gate structure; and

a first source/drain region on one side of the first gate structure.

3. The semiconductor device of claim 2 , wherein the second MOS transistor comprises:

a second gate structure on the substrate;

a second spacer around the second gate structure; and

a second source/drain region on one side of the second gate structure.

4. The semiconductor device of claim 3 , further comprising:

a first liner between the first spacer and the first ILD layer; and

a second liner between the second spacer and the second ILD layer.

5. The semiconductor device of claim 4 , wherein top surfaces of the first liner and the first ILD layer are coplanar.

6. The semiconductor device of claim 4 , wherein top surfaces of the second liner and the second ILD layer are coplanar.

7. The semiconductor device of claim 3 , further comprising a third source/drain region between the first gate structure and the second gate structure.

8. The semiconductor device of claim 7 , further comprising a contact plug between the first spacer and the second spacer and contacting the third source/drain region directly.

9. The semiconductor device of claim 8 , wherein the MTJ is connected to the contact plug.

10. The semiconductor device of claim 8 , wherein the MTJ is directly on top of the contact plug.

11. The semiconductor device of claim 3 , wherein the first gate structure and the second gate structure are extending along a first direction on the substrate.

12. The semiconductor device of claim 11 , further comprising a metal interconnection extending along a second direction on the first ILD layer and the second ILD layer.

13. The semiconductor device of claim 1 , wherein the first MOS transistor and the second MOS transistor comprise a same conductive type.

14. The semiconductor device of claim 1 , wherein each of the first MOS transistor and the second MOS transistor comprises a NMOS transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2018
From: CHOU, KUN-I; CHEN, HUNG-YUEH
To: UNITED MICROELECTRONICS CORP.
Reel/Frame 047303/0795 →
Priority Claims (1)
CN 2018 1 1044167 · Sep 7, 2018 · national
Continuity (1)
Related Publication 20200083287A1 · Mar 12, 2020