Semiconductor device including fin field effect transistor and method of manufacturing the same
A semiconductor device and a method of manufacturing a semiconductor device, the device including an active pattern protruding from a substrate; a plurality of gate structures each including a gate electrode and crossing the active pattern; and a source/drain region between the plurality of gate structures, wherein the source/drain region includes a high concentration doped layer in contact with a bottom surface of a recessed region in the active pattern, a first epitaxial layer in contact with an upper surface of the high concentration doped layer and a sidewall of the recessed region, and a second epitaxial layer on the first epitaxial layer, and the high concentration doped layer has a first area in contact with the bottom surface of the recessed region and a second area in contact with the sidewall of the recessed region, the first area being wider than the second area.
1. A semiconductor device, comprising:
an active pattern protruding from a substrate;
a plurality of gate structures each including a gate electrode and crossing the active pattern; and
a source/drain region between the plurality of gate structures,
wherein:
the source/drain region includes:
a high concentration doped layer in contact with a bottom surface of a recessed region in the active pattern,
a first epitaxial layer in contact with an upper surface of the high concentration doped layer and a sidewall of the recessed region, and
a second epitaxial layer on the first epitaxial layer, and
the high concentration doped layer has a first area in contact with the bottom surface of the recessed region and a second area in contact with the sidewall of the recessed region, the first area being wider than the second area.
2. The semiconductor device as claimed in claim 1 , wherein:
the semiconductor device includes electrical channels between a top region and a bottom region of the source/drain region, the electrical channels having lengths, and
the lengths of the electrical channels between the top region and the bottom region of the source/drain region are uniform.
3. The semiconductor device as claimed in claim 1 , wherein the high concentration doped layer includes a doped silicon-germanium layer, the silicon-germanium layer being formed by growing silicon germanium in an epitaxial manner, and the silicon-germanium layer being doped with boron, carbon, tin, gallium, or arsenic.
4. The semiconductor device as claimed in claim 3 , wherein a concentration of boron, carbon, tin, gallium, or arsenic with which the silicon-germanium layer is doped ranges from 1×10 18 to 1×10 21 atom/cm 3 .
5. The semiconductor device as claimed in claim 1 , wherein the first epitaxial layer, the second epitaxial layer, and a third epitaxial layer include identical impurities, and concentrations of the impurities are different.
6. The semiconductor device as claimed in claim 5 , wherein:
the first epitaxial layer, the second epitaxial layer, and the third epitaxial layer each include germanium,
a concentration of germanium in the first epitaxial layer ranges from 10 to 30 atom %; and
a concentration of germanium in each of the second epitaxial layer and the third epitaxial layer ranges from 30 to 70 atom %.
7. The semiconductor device as claimed in claim 5 , wherein the first epitaxial layer, the second epitaxial layer, and the third epitaxial layer include a silicon-germanium layer doped with boron.
8. The semiconductor device as claimed in claim 5 , wherein:
the concentration of the impurity in the second epitaxial layer is higher than that of the first epitaxial layer; and
the concentration of the impurity in the third epitaxial layer is lower than that of the second epitaxial layer.
9. A semiconductor device, comprising:
an active pattern protruding from a substrate;
a plurality of gate structures each including a gate electrode and crossing the active pattern; and
a source/drain region between the plurality of gate structures,
wherein:
the source/drain region includes:
a first epitaxial layer in contact with a bottom surface and a sidewall of a recessed region in the active pattern,
a high concentration doped layer in contact with an upper surface of a bottom end of the first epitaxial layer, and
a second epitaxial layer covering the high concentration doped layer and the first epitaxial layer,
the high concentration doped layer has a first area in contact with the upper surface of the bottom of the first epitaxial layer and a second area in contact with a sidewall of the first epitaxial layer, the first area being wider than the second area, and
the high concentration doped layer is spaced apart from a top region of the sidewall of the first epitaxial layer.
10. The semiconductor device as claimed in claim 9 , wherein:
the semiconductor device includes electrical channels between a top region and a bottom region of the source/drain region, the electrical channels having lengths, and
the lengths of the electrical channels between the top region and the bottom region of the source/drain region are uniform.
11. The semiconductor device as claimed in claim 9 , wherein the high concentration doped layer includes a doped silicon-germanium layer, the silicon-germanium layer being formed by growing silicon germanium in an epitaxial manner, and the silicon-germanium layer being doped with boron, carbon, tin, gallium, or arsenic.
12. The semiconductor device as claimed in claim 11 , wherein a concentration of boron, carbon, tin, gallium, or arsenic with which the silicon-germanium layer is doped ranges from 1×10 18 to 1×10 21 atom/cm 3 .
13. The semiconductor device as claimed in claim 9 , wherein the first epitaxial layer, the second epitaxial layer, and a third epitaxial layer include identical impurities, and concentrations of the impurities are different.
14. The semiconductor device as claimed in claim 13 , wherein:
the first epitaxial layer, the second epitaxial layer, and the third epitaxial layer each include germanium,
a concentration of germanium in the first epitaxial layer ranges from 10 to 30 atom %; and
a concentration of germanium in each of the second epitaxial layer and the third epitaxial layer ranges from 30 to 70 atom %.
15. The semiconductor device as claimed in claim 13 , wherein the first epitaxial layer includes a silicon-germanium layer doped with boron.
16. The semiconductor device as claimed in claim 13 , wherein:
the concentration of the impurity in the second epitaxial layer is higher than that of the first epitaxial layer; and
the concentration of the impurity in the third epitaxial layer is lower than that of the second epitaxial layer.
17. A semiconductor device, comprising:
an active pattern protruding from a substrate;
a plurality of gate structures each including a gate electrode and crossing the active pattern; and
a source/drain region between the plurality of gate structures,
wherein the source/drain region includes:
an implant doped layer below a recessed region in the active pattern,
a first epitaxial layer in the recessed region, and
a second epitaxial layer on the first epitaxial layer, and
wherein the implant doped layer is spaced apart from a sidewall of the recessed region.
18. The semiconductor device as claimed in claim 17 , wherein:
the semiconductor device includes electrical channels between a top region and a bottom region of the source/drain region, the electrical channels having lengths, and
the lengths of the electrical channels between the top region and the bottom region of the source/drain region are uniform.
19. The semiconductor device as claimed in claim 17 , wherein the implant doped layer is formed in the active pattern, is disposed below the recessed region, and is doped with boron, carbon, tin, gallium, or arsenic.