Cutting method of workpiece
In a cutting method of a workpiece, a half-cut groove having a groove bottom that reflects light of an epi-illumination part is formed in a range of a peripheral surplus region of a planned dividing line that has not been cut, and the half-cut groove is detected with discrimination from a laser-processed groove that diffusely reflects the light and is darkly displayed.
1. A cutting method of a workpiece that has, in a surface, a device region in which a device is formed in each of regions marked out by a plurality of planned dividing lines formed in a lattice manner and a peripheral surplus region that surrounds the device region, and in which laser-processed grooves are formed in the planned dividing lines by irradiation with a laser beam,
by use of a cutting apparatus including a chuck table holding the workpiece by a holding surface, a cutting unit cutting the workpiece held by the chuck table by a cutting blade, a processing feed unit carrying out processing feed in an X-axis direction parallel to the holding surface of the chuck table, an indexing feed unit carrying out indexing feed of the cutting unit in a Y-axis direction that is parallel to the holding surface and is orthogonal to the X-axis direction, and a photographic unit including a camera that photographs the workpiece held by the chuck table and an epi-illumination part that emits light along an optical axis of the camera,
the cutting method comprising:
a half-cut groove forming step of forming a half-cut groove having a bottom that reflects the light of the epi-illumination part in a range of the peripheral surplus region of the planned dividing line;
a detection step of photographing the half-cut groove by the photographic unit and detecting the half-cut groove with discrimination from the laser-processed groove that diffusely reflects the light of the epi-illumination part and is darkly displayed;
a correction step of correcting deviation between the laser-processed groove and the half-cut groove; and
a cutting step of positioning the cutting blade at a center of the laser-processed groove and carrying out cutting.
2. The cutting method of a workpiece according to claim 1 , wherein
the detection step includes a laser-processed groove detection sub-step of detecting the laser-processed groove darkly displayed with discrimination from the surface of the workpiece that reflects the light of the epi-illumination part and is brightly displayed and is on both sides of the laser-processed groove.