IP Library › Granted Patent US 1,066,440
Granted Patent S1
US 1,066,440 · App. 29/867,553 · Granted Mar 11, 2025

Process chamber pumping liner

Inventors: Yang Li (Sunnyvale, CA); Xi Cen (San Jose, CA); Kai Wu (Palo Alto, CA); Min-Han Lee (San Jose, CA); Mehran Behdjat (Santa Clara, CA)
Assignee: Applied Materials, Inc.
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Quick Facts
Patent No.
US 1,066,440
App. No.
29/867,553
Granted
Mar 11, 2025
Kind
S1
Claims (1)

The ornamental design for a process chamber pumping liner as shown and described.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2023
From: LI, YANG; CEN, XI; WU, KAI; LEE, MIN-HAN; BEHDJAT, MEHRAN
To: APPLIED MATERIALS, INC.
Reel/Frame 062628/0761 →
References Cited (27)
US 5552124A · Su · 1996 [cited by examiner]
US 5641375A · Nitescu · 1997 [cited by examiner]
US 5914050A · Comita · 1999 [cited by examiner]
US D491963S · Doba · 2004 [cited by examiner]
US 6884297B2 · Park · 2005 [cited by examiner]
US D665071S · Goel · 2012 [cited by examiner]
US D678228S · Suzuki · 2013 [cited by examiner]
US D716240S · Lau · 2014 [cited by examiner]
US 8980005B2 · Carlson et al. · 2015 [cited by applicant]
US 9719169B2 · Mohn · 2017 [cited by examiner]
US D804436S · Tauchi · 2017 [cited by examiner]
US D812578S · Uemura · 2018 [cited by examiner]
US D979524S · Perry · 2023 [cited by examiner]
US 20050150452A1 · Sen · 2005 [cited by examiner]
US 20070113783A1 · Lee · 2007 [cited by examiner]
US 20160068997A1 · Lau · 2016 [cited by examiner]
US 20200377998A1 · Mustafa · 2020 [cited by examiner]
US 20210079524A1 · Yang · 2021 [cited by examiner]
US 20220356572A1 · Mustafa · 2022 [cited by examiner]
US 20230257903A1 · Lee · 2023 [cited by examiner]
US 20230407473A1 · Mustafa · 2023 [cited by examiner]
US 20240213051A1 · Kim · 2024 [cited by examiner]
JP D1754629 · 2023 [cited by examiner]
TW D215398S · 2021 [cited by applicant]
27968 Applied Materials Pumping Plate Afeol 300MM 0040-82011 _ eBay, posted Mar. 18, 2022, [retrieved Nov. 21, 2024]. Retrieved from internet: https://www.ebay.com/itm/115300090516 (Year: 2022). [cited by examiner]
0041-42533_ Pumping Plate 300MM ALD _ Applied Materials Amat _ eBay, posted Mar. 23, 2023, [retrieved Nov. 21, 2024]. Retrieved from internet: https://www.ebay.com/itm/304854335909 (Year: 2023). [cited by examiner]
TW Notice of Allowance dated Oct. 17, 2023 for Application No. 112302047. [cited by applicant]