Vertical bipolar transistors

1. A vertical bipolar transistor comprising:

a substrate including a first well of a first conductivity type and a second well of a second conductivity type, the second conductivity type being different from the first conductivity type, the first well adjoining the second well;

a first fin extending from the first well, the first fin including a first conductive region at a top portion thereof, the first conductive region having the second conductivity type and configured to serve as an emitter of the vertical bipolar transistor;

a second fin extending from the first well and spaced apart from the first fin, the second fin including a second conductive region at a top portion thereof, the second conductive region having the first conductivity type and configured to serve as a base of the vertical bipolar transistor;

a third fin extending from the second well, the third fin including a third conductive region at a top portion thereof, the third conductive region having the second conductivity type and configured to serve as a collector of the vertical bipolar transistor; and

a first sub-emitter region and a second sub-emitter region in the first well and at both sides of the first fin, the first sub-emitter region and the second sub-emitter region having the second conductivity type, the first sub-emitter region and the second sub-emitter region laterally spaced apart from each other, and the first sub-emitter region and the second sub-emitter region configured to function as the emitter together with the first conductive region.

2. The vertical bipolar transistor of claim 1 , further comprising:

a first isolation region in the first well and laterally between the first fin and the second fin, the first isolation region extending to a first depth in the first well, the first depth being shallower than a second depth of the first well.

3. The vertical bipolar transistor of claim 2 , further comprising:

a second isolation region at a boundary between the first well and the second well and laterally between the second fin and the third fin, the second isolation region extending to a third depth, the third depth being shallower than each of the first depth of the first well and a fourth depth of the second well.

4. The vertical bipolar transistor of claim 1 , further comprising:

a first isolation region at a boundary between the first well and the second well and laterally between the second fin and the third fin, the first isolation region extending to a first depth, the first depth being shallower than both a second depth of the first well and a third depth of the second well.

5. The vertical bipolar transistor of claim 1 , further comprising at least one of:

a first sub-base region and a second sub-base region in the first well and at both sides of the second fin, the first sub-base region and the second sub-base region having the first conductivity type, the first sub-base region and the second sub-base region laterally spaced apart from each other, and the first sub-base region and the second sub-base region configured to function as the base together with the second conductive region; or

a first sub-collector region and a second sub-collector region in the second well and at both sides of the third fin, the first sub-collector region and the second sub-collector region having the second conductivity type, the first sub-collector region and the second sub-collector region laterally spaced apart from each other, and the second sub-collector region configured to function as the collector together with the third conductive region.

6. The vertical bipolar transistor of claim 1 , wherein

the second conductive region has a shape surrounding the first conductive region in a plan view, and

the third conductive region has a shape surrounding the second conductive region in the plan view.

7. The vertical bipolar transistor of claim 6 , wherein the first conductive region has a disk shape or a rectangular shape in the plan view.

8. The vertical bipolar transistor of claim 1 , further comprising:

the first fin including a fourth conductive region, the fourth conductive region being a portion of the first fin under the first conductive region, and the fourth conductive region having the first conductivity type;

the second fin including a fifth conductive region, the fifth conductive region being a portion of the second fin under the second conductive region, and the fifth conductive region having the first conductivity type; and

the third fin including a sixth conductive region, the sixth conductive region being a portion of the third fin under the third conductive region, and the sixth conductive region having the second conductivity type.

9. A vertical bipolar transistor comprising:

a substrate including a first well of a first conductivity type and a second well of a second conductivity type, the second conductivity type being different from the first conductivity type, the first well adjoining the second well;

a first conductive region in the first well, the first conductive region having the second conductivity type, the first conductive region configured to serve as a emitter of the vertical bipolar transistor;

a first fin extending from the first well of the substrate, the first fin laterally spaced apart from the first conductive region, the first fin including a second conductive region at a top portion thereof, the second conductive region having the first conductivity type;

a second fin extending from the second well of the substrate, the second fin including a third conductive region at a top portion thereof, the third conductive region having the second conductivity type;

at least one sub-base region in the first well, the at least one sub-base region having the first conductivity type, the at least one sub-base region aligned with respect to the first fin and laterally spaced apart from the first conductive region, the second conductive region and the at least one sub-base region collectively configured to serve as a base of the vertical bipolar transistor; and

at least one sub-collector region in the second well, the at least one sub-collector region having the second conductivity type, the at least one sub-collector region aligned with respect to the second fin and laterally spaced apart from the at least one sub-base region, the third conductive region and the at least one sub-collector region collectively configured to serve as a collector of the vertical bipolar transistor.

10. The vertical bipolar transistor of claim 9 , wherein the at least one sub-base region includes a first sub-base region and a second sub-base region, and the first sub-base region and the second sub-base region are laterally on opposite sides of the first fin.

11. The vertical bipolar transistor of claim 10 , further comprising:

an isolation region in the first well and having a depth shallower than a depth of the first well, the isolation region being between the first conductive region and one of the first sub-base region and the second sub-base region that faces the first conductive region.

12. The vertical bipolar transistor of claim 10 , wherein the at least one sub-collector region includes a first sub-collector region and a second sub-collector region, and the first sub-collector region and the second sub-collector region are laterally on opposite sides of the second fin.

13. The vertical bipolar transistor of claim 12 , further comprising:

an isolation region is at a boundary between the first well and the second well and between (1) one of the first sub-base region and the second sub-base region and (2) one of the first sub-collector region and the second sub-collector region that face each other.

14. The vertical bipolar transistor of claim 13 , wherein a depth of the isolation region is shallower than each of a depth of the first well and a depth of the second well.

15. The vertical bipolar transistor of claim 9 , wherein the at least one sub-collector region includes a first sub-collector region and a second sub-collector region which are laterally on opposite sides of the second fin.

16. A vertical bipolar transistor comprising:

a first fin and a second fin extending from a first well of a substrate, the first well having a first conductivity type, the first fin and the second fin being spaced apart from each other, the first fin including a first conductive region having a second conductivity type at a top portion thereof, the second fin including a second conductive region having the first conductivity type at a top portion thereof, the first and second conductivity types being opposite to each other;

a third fin extending from a second well of the substrate, the second well having a second conductivity type, the second well adjoining the first well, the third fin including a third conductive region having the second conductivity type at a top portion thereof;

an emitter region of the vertical bipolar transistor including,

the first conductive region, and

at least one sub-emitter region in the first well and having the second conductivity type, the at least one sub-emitter region laterally aligned with respect to the first fin, the first conductive region and the at least one sub-emitter region collectively configured to serve as an emitter of the vertical bipolar transistor;

a base region of the vertical bipolar transistor including,

the second conductive region, and

at least one sub-base region in the first well and having the first conductivity type, the at least one sub-base region laterally aligned with respect to the second fin, the second conductive region and the at least one sub-base region collectively configured to serve as a base of the vertical bipolar transistor; and

a collector region of the vertical bipolar transistor including,

the third conductive region, and

at least one sub-collector region in the second well and having the second conductivity type, the at least one sub-collector region laterally aligned with respect to the third fin, the third conductive region and the at least one sub-collector region collectively configured to serve as a collector of the vertical bipolar transistor.

17. The vertical bipolar transistor of claim 16 , wherein

the at least one sub-emitter region includes a first sub-emitter region and a second sub-emitter region which are laterally on opposite sides of the first fin,

the at least one sub-base region includes a first sub-base region and a second sub-base region which are laterally on opposite sides of the second fin, and

the at least one sub-collector region includes a first sub-collector region and a second sub-collector region which are laterally on opposite sides of the third fin.

18. The vertical bipolar transistor of claim 16 , further comprising:

a first isolation region in the first well and laterally between the first fin and the second fin, a depth of the first isolation region being shallower than a depth of the first well.

19. The vertical bipolar transistor of claim 18 , further comprising:

a second isolation region at a boundary between the first well and the second well and laterally between the second fin and the third fin.

20. The vertical bipolar transistor of claim 19 , wherein a depth of the second isolation region is shallower than each of the depth of the first well and a depth of the second well.