IP Library Granted Patent US 10,665,772
Granted Patent B2
US 10,665,772 · App. 16/178,542 · Granted May 26, 2020

Semiconductor device and method for fabricating the same

Inventors: Yu-Chun Chen (Kaohsiung, TW); Ya-Sheng Feng (Tainan, TW); Chiu-Jung Chiu (Tainan, TW); Hung-Chan Lin (Tainan, TW)
Assignee: UNITED MICROELECTRONICS CORP.
H01L43/02H01L23/535H01L27/222H01L43/12G11C11/161H01L43/10
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Quick Facts
Patent No.
US 10,665,772
App. No.
16/178,542
Granted
May 26, 2020
Kind
B2
Abstract

A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, wherein the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.

Claims (4)

1. A semiconductor device, comprising:

a magnetic tunneling junction (MTJ) on a substrate, wherein a top view of the MTJ comprises a first circle; and

a metal interconnection on the MTJ, wherein a top view of the metal interconnection comprises a second circle overlapping part of the first circle and a part of the first circle not overlapped by the second circle comprises a first crescent moon.

2. The semiconductor device of claim 1 , wherein a part of the second circle not overlapping the second circle comprises a second crescent moon.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 1, 2018
From: CHEN, YU-CHUN; FENG, YA-SHENG; CHIU, CHIU-JUNG; LIN, HUNG-CHAN
To: UNITED MICROELECTRONICS CORP.
Reel/Frame 047389/0266 →
Priority Claims (1)
CN 2018 1 1166521 · Oct 8, 2018 · national
Continuity (1)
Related Publication 20200111950A1 · Apr 9, 2020