Tunable power amplifier with wide frequency range
A circuit includes an amplifier to amplify an input signal and generate an output signal. The circuit also includes a tuning network to tune frequency response of the amplifier. The tuning network includes at least one tunable capacitor, which includes at least one micro-electro mechanical system (MEMS) capacitor. The amplifier could include a first die, the at least one MEMS capacitor could include a second die, and the first die and the second die could be integrated in a single package. The at least one MEMS capacitor could include a MEMS superstructure over a control structure, which is to control the MEMS superstructure and tune the capacitance of the at least one MEMS capacitor.
1. A circuit comprising:
an amplifier having an amplifier input and an amplifier output, the amplifier having a frequency response; and
a tuning network coupled to the amplifier, the tuning network configured to tune the frequency response, the tuning network including a tunable microelectromechanical system (MEMS) capacitor having a capacitance, the tunable MEMS capacitor including a MEMS superstructure over a control structure, the control structure configured to control the MEMS superstructure and tune the capacitance, the control structure including an electrode, and the MEMS superstructure including a membrane of which at least a portion is parallel to the electrode.
2. The circuit of claim 1 , wherein:
the amplifier includes a first die;
the tunable MEMS capacitor includes a second die; and
the first die and the second die are integrated in a single package.
3. The circuit of claim 1 , wherein the control structure is configured to electrostatically control a position of the MEMS superstructure.
4. The circuit of claim 1 , wherein the tuning network includes multiple tunable MEMS capacitors.
5. A method comprising:
amplifying an input signal and generating an output signal using an amplifier, the amplifier having a frequency response; and
tuning the frequency response using a tuning network coupled to the amplifier, the tuning network including a tunable microelectromechanical system (MEMS) capacitor having a capacitance, the tunable MEMS capacitor including a MEMS superstructure over a control structure that controls the MEMS superstructure and tunes the capacitance, the control structure including an electrode, and the MEMS superstructure including a membrane of which at least a portion is parallel to the electrode.
6. The method of claim 5 , wherein:
the amplifier includes a first die;
the tunable MEMS capacitor includes a second die; and
the first die and the second die are integrated in a single package.
7. The method of claim 5 , wherein the control structure electrostatically controls a position of the MEMS superstructure.
8. The method of claim 5 , wherein the tuning network includes multiple tunable MEMS capacitors.