Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle
A gyro sensor includes: a substrate; a fixed portion that is fixed to the substrate; a driving portion that is driven in a first direction oriented along a first axis; a mass portion that is connected to the driving portion and is displaced in the first direction; and an elastic portion that is connected to the mass portion and the fixed portion. The mass portion includes a detection portion that is displaceable in a second direction oriented along a second axis orthogonal to the first axis by a Coriolis force to act. An outer circumference surface of the elastic portion includes a main surface, a side surface, and a connection surface connecting the main surface to the side surface. The connection surface has a curved surface portion with a curved surface shape.
1. A gyro sensor comprising:
a substrate;
a fixed portion that is fixed to the substrate;
a driving portion that is driven in a first direction oriented along a first axis;
a mass portion that is connected to the driving portion and is displaced in the first direction; and
an elastic portion that is connected to the mass portion and the fixed portion,
wherein the mass portion includes a detection portion that is displaceable in a second direction by a Coriolis force, wherein the second direction is oriented along a second axis orthogonal to the first axis,
wherein an outer circumference surface of the elastic portion includes at least one main surface, at least one side surface, and at least one connection surface connecting the at least one main surface to the at least one side surface, and
wherein the connection surface has a curved surface portion with a curved surface shape.
2. The gyro sensor according to claim 1 ,
wherein in a cross-sectional view, an angle formed by an extension line oriented along the at least one main surface connected by the at least one connection surface of the portion and an extension line oriented along the at least one side surface is less than 90°.
3. An electronic apparatus comprising:
the gyro sensor according to claim 2 .
4. A vehicle comprising:
the gyro sensor according to claim 2 .
5. The gyro sensor according to claim 1 ,
wherein the at least one connection surface includes a plurality of curved surface portions, and
wherein the plurality of curved surface portions are separated from each other.
6. The gyro sensor according to claim 1 ,
wherein the elastic portion is formed from the substrate, and the at least one connection surface is provided on a side of the substrate of the elastic portion.
7. The gyro sensor according to claim 1 ,
wherein the outer circumference surface of the elastic portion includes first and second main surfaces, first and second side surfaces, a first connection surface connecting the first main surface to the first side surface, and a second connection surface connecting the second main surface to the second side surface.
8. The gyro sensor according to claim 1 ,
wherein the at least one main surface is connected to a first side surface by a first connection surface,
wherein the at least one main surface is connected to a second side surface by a second connection surface, and
wherein the second connection surface has a radius of curvature less than a radius of curvature of the first connection surface.
9. An electronic apparatus comprising:
the gyro sensor according to claim 1 .
10. A vehicle comprising:
the gyro sensor according to claim 1 .
11. A method of manufacturing a gyro sensor, comprising:
providing a substrate;
forming a fixed portion fixed to the substrate, a driving portion driven in a first direction oriented along a first axis, a detection portion displaceable in a second direction by a Coriolis force, wherein the second direction is oriented along a second axis orthogonal to the first axis, a mass portion connecting the driving portion to the fixed portion, and an elastic portion including at least one main surface and at least one side surface and connected to the mass portion and the fixed portion; and
processing the elastic portion,
wherein in the processing of the elastic portion, at least one connection surface connecting the at least one main surface to the at least one side surface and including at least one curved surface portion with a curved surface shape is formed by radiating a laser beam to at least a part of the elastic portion.
12. The method of manufacturing the gyro sensor according to claim 11 ,
wherein in the processing of the elastic portion, a quadrature signal is measured.
13. The method of manufacturing the gyro sensor according to claim 12 ,
wherein in the processing of the elastic portion, a radius of curvature of the at least one connection surface of the elastic portion is adjusted based on a measurement result of the quadrature signal.