IP Library Granted Patent US 10,672,713
Granted Patent B2
US 10,672,713 · App. 16/135,695 · Granted Jun 2, 2020

High density organic bridge device and method

Inventors: Mihir K Roy (Chandler, AZ); Stefanie M Lotz (Phoenix, AZ); Wei-Lun Kane Jen (Chandler, AZ)
Assignee: Intel Corporation
H01L23/5386H01L21/4853H01L23/13H01L23/145H01L23/49811H01L23/49866H01L23/49894H01L23/5381H01L23/5383H01L23/5384H01L23/5385H01L25/0655H05K1/141H01L24/16H01L24/17H01L24/81H01L2224/16225H01L2224/16227H01L2224/16238H01L2224/1703H01L2224/81193H01L2224/81203H01L2924/0002H01L2924/0665H01L2924/12042H01L2924/1579H01L2924/15192H01L2924/2064H05K1/0313H05K1/142H05K1/181H05K3/3436H05K3/467H05K2201/048H05K2201/049H05K2201/10522H05K2201/10674H05K2203/016
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Quick Facts
Patent No.
US 10,672,713
App. No.
16/135,695
Granted
Jun 2, 2020
Kind
B2
Abstract

Embodiments that allow multi-chip interconnect using organic bridges are described. In some embodiments an organic package substrate has an embedded organic bridge. The organic bridge can have interconnect structures that allow attachment of die to be interconnected by the organic bridge. In some embodiments, the organic bridge comprises a metal routing layer, a metal pad layer and interleaved organic polymer dielectric layers but without a substrate layer. Embodiments having only a few layers may be embedded into the top layer or top few layers of the organic package substrate. Methods of manufacture are also described.

Claims (98)

1. A microelectronic package comprising;

an organic polymer substrate having a first wire width and first wire spacing;

an organic polymer bridge embedded in the substrate having a second wire width and a second wire spacing;

a first interconnect structure including connection points at a first location of the organic polymer bridge and a second interconnect structure including connection points at a second location of the organic polymer bridge;

an electrically conductive path including a metal routing layer in the organic polymer bridge connecting the first interconnect structure to the second interconnect structure;

a first die coupled to the first interconnect structure at the first location, and including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing; and

a subsequent die coupled to the second interconnect structure including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing.

2. The microelectronic package of claim 1 , further including:

wherein the first wire width and first wire spacing exhibit a first set of design rules;

wherein the second wire width and second wire spacing exhibit a second set of design rules;

wherein the first wire width is larger than the second wire width and the first wire spacing is larger than the second wire spacing; and

wherein the connection points are part of a metal pad layer.

3. The microelectronic package of claim 1 , wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer.

4. The microelectronic package of claim 3 :

wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer; and

wherein the organic polymer substrate and the organic polymer bridge are the same organic polymer.

5. The microelectronic package of claim 3 :

wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer; and

wherein the organic polymer substrate and the organic polymer bridge are made from different organic polymers.

6. The microelectronic package of claim 3 :

wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer; and

wherein the organic polymer used to bond the organic polymer bridge to the organic polymer substrate is selected from a die bonding film and an epoxy.

7. A microelectronic package comprising;

an organic polymer substrate having a first wire width and first wire spacing;

a first organic polymer bridge embedded in the substrate having a second wire width and a second wire spacing;

a first interconnect structure including connection points at a first location of the first organic polymer bridge and a second interconnect structure including connection points at a second location of the first organic polymer bridge;

an electrically conductive path including a metal routing layer in the first organic polymer bridge connecting the first interconnect structure to the second interconnect structure;

a subsequent organic polymer bridge embedded in the substrate having a second wire width and a second wire spacing;

a first interconnect structure at a first location of the subsequent organic polymer bridge and a second interconnect structure at a second location of the subsequent organic polymer bridge;

an electrically conductive path including a metal routing layer in the subsequent organic polymer bridge connecting the first interconnect structure to the second interconnect structure;

a first die coupled to the first interconnect structure at the first location, and including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing of the first organic polymer bridge;

a subsequent die coupled to the second interconnect structure of the first organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing; and

a third die coupled to the second interconnect structure of the first organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing.

8. The microelectronic package of claim 7 , further including:

a third organic polymer bridge embedded in the substrate having the second wire width and second wire spacing;

a first interconnect structure at a first location of the third organic polymer bridge and a second interconnect structure at a second location of the third organic polymer bridge;

an electrically conductive path including a metal routing layer in the third organic polymer bridge connecting the first interconnect structure to the second interconnect structure; and

a fourth die coupled to the second interconnect structure.

9. The microelectronic package of claim 8 , further including:

wherein the first wire width and first wire spacing exhibit a first set of design rules;

wherein each second wire width and second wire spacing exhibit a second set of design rules;

wherein the first wire width is larger than the second wire width and the first wire spacing is larger than the second wire spacing; and

wherein the connection points are part of a metal pad layer.

10. The microelectronic package of claim 9 , wherein the organic polymer substrate contains a plurality of recesses and each organic polymer bridge is embedded into one of the plurality of recesses using an organic polymer.

11. The microelectronic package of claim 9 :

wherein the organic polymer substrate contains a plurality of recesses and each organic polymer bridge is embedded into one of the plurality of recesses using an organic polymer; and

wherein the organic polymer substrate and each organic polymer bridge are made from the same organic polymer.

12. The microelectronic package of claim 9 :

wherein the organic polymer substrate contains a plurality of recess and each organic polymer bridge is embedded into one of the recesses using an organic polymer; and

wherein the organic polymer substrate and the organic polymer bridges are made from different organic polymers.

13. The microelectronic package of claim 9 :

wherein the organic polymer substrate contains a plurality of recess and each organic polymer bridge is embedded into one of the recesses using an organic polymer; and

wherein the organic polymer used to bond each organic polymer bridge to the organic polymer substrate is selected from a die bonding film and an epoxy.

14. The microelectronic package of claim 7 , further including:

a third organic polymer bridge embedded in the substrate having the second wire width and second wire spacing;

a fourth die coupled to the third interconnect structure;

a fourth organic polymer bridge embedded in the substrate having the second wire width and second wire spacing;

a first interconnect structure at a first location of the fourth organic polymer bridge and a second interconnect structure at a second location of the fourth organic polymer bridge;

a metal routing layer in the fourth organic polymer bridge connecting the first interconnect structure to the second interconnect structure; and

a fifth die coupled to the second interconnect structure.

15. The microelectronic package of claim 14 , further including:

wherein the first wire width and first wire spacing exhibit a first set of design rules;

wherein each second wire width and second wire spacing exhibit a second set of design rules;

wherein the first wire width is larger than the second wire width and the first wire spacing is larger than the second wire spacing; and

wherein the connection points are part of a metal pad layer.

16. The microelectronic package of claim 15 , wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer.

17. The microelectronic package of claim 15 :

wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer; and

wherein the organic polymer substrate and the organic polymer bridge are made from the same organic polymer.

18. The microelectronic package of claim 15 :

wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer; and

wherein the organic polymer substrate and the organic polymer bridge are made from different organic polymers.

19. The microelectronic package of claim 15 :

wherein the organic polymer substrate contains a plurality of recesses and each organic polymer bridge is embedded into one of the recess using an organic polymer; and

wherein the organic polymer used to bond each organic polymer bridge to the organic polymer substrate is selected from a die bonding film and an epoxy.

20. A microelectronic package comprising;

an organic polymer substrate having a first wire width and first wire spacing;

a first organic polymer bridge embedded in the substrate having a second wire width and a second wire spacing;

a first interconnect structure at a first location of the first organic polymer bridge and a second interconnect structure at a second location of the first organic polymer bridge;

an electrically conductive path including a metal routing layer in the first organic polymer bridge connecting the first interconnect structure to the second interconnect structure;

a subsequent organic polymer bridge embedded in the substrate having a second wire width and a second wire spacing;

a first interconnect structure at a first location of the subsequent organic polymer bridge and a second interconnect structure at a second location of the subsequent organic polymer bridge;

an electrically conductive path including a metal routing layer in the subsequent organic polymer bridge connecting the first interconnect structure to the second interconnect structure;

a first die coupled to the first interconnect structure of the first organic polymer bridge at the first location, and including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing of the first organic polymer bridge;

a subsequent die coupled to the second interconnect structure of the first organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing;

wherein the subsequent die is coupled to the first interconnect structure of the subsequent organic polymer bridge and

a third die coupled to the second interconnect structure of the subsequent organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing.

21. The microelectronic package of claim 20 , further including:

a third organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing;

wherein the third organic polymer bridge is oriented and coupled to the subsequent die; and

a fourth die coupled to the third organic polymer bridge.

22. The microelectronic package of claim 20 , further including:

a third organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing;

wherein the third organic polymer bridge is oriented and coupled to the subsequent die;

a fourth die coupled to the third organic polymer bridge;

a fourth organic polymer bridge, including bond pads that match the first wire width and first wire spacing, and bond pads that match the second wire width and second wire spacing;

wherein the fourth organic polymer bridge is oriented and coupled to the subsequent die;

a fifth die coupled to the fourth organic polymer bridge.

Continuity (4)
Continuation 15350393 · Nov 14, 2016
Continuation 14992535 · Jan 11, 2016
Continuation 13722203 · Dec 20, 2012
Related Publication 20190019755A1 · Jan 17, 2019