Gas abatement apparatus
Embodiments of the present disclosure relate to gas abatement apparatus and effluent management. The apparatus described herein include a high pressure process chamber and a containment chamber surrounding the process chamber. A high pressure fluid delivery module is in fluid communication with the high pressure process chamber and is configured to deliver a high pressure fluid to the process chamber. An effluent management module includes a muffler assembly to effluent pressure reduction and a plurality of scrubbers provide for treatment of effluent.
1. An effluent management apparatus, comprising:
a muffler assembly, comprising:
a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end opposite the first port;
a second muffler defining a second volume therein, the second muffler having a third port formed in a third end and a fourth port formed in the second muffler opposite the third port;
a third muffler defining a third volume therein, the third muffler having a fifth port formed therein and a sixth port formed therein opposite the fifth port;
a fourth muffler defining a fourth volume therein, the fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end opposite the seventh port;
a first conduit extending between the seventh port and the fifth port; and
a second conduit extending between the fourth port and the sixth port;
a third conduit extending from the third port to a valve;
a first scrubber in fluid communication with the valve; and
a second scrubber in fluid communication with the valve via a fourth conduit.
2. The apparatus of claim 1 , wherein a flow restrictor is disposed on the fourth conduit between the valve and the second scrubber.
3. The apparatus of claim 1 , further comprising:
an exhaust conduit;
a pump coupled to the exhaust conduit;
a fifth conduit extending from the second port to the exhaust conduit; and
a sixth conduit extending from the pump to the eighth port.
4. The apparatus of claim 1 , wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler is cylindrical.
5. The apparatus of claim 4 , wherein a length of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 60 inches and 100 inches.
6. The apparatus of claim 5 , wherein a diameter of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 20 inches and 40 inches.
7. A high-pressure processing apparatus, comprising:
a first chamber;
a second chamber defining a process volume therein, the second chamber disposed within the first chamber;
a muffler assembly, comprising:
a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end opposite the first port;
a second muffler defining a second volume therein, the second muffler having a third port formed in a third end and a fourth port formed in the second muffler opposite the third port;
a third muffler defining a third volume therein, the third muffler having a fifth port formed therein and a sixth port formed therein opposite the fifth port;
a fourth muffler defining a fourth volume therein, the fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end opposite the seventh port;
a first conduit extending between the seventh port and the fifth port; and
a second conduit extending between the fourth port and the sixth port;
a third conduit extending from the third port to a valve;
a first scrubber in fluid communication with the valve;
a second scrubber in fluid communication with the valve via a fourth conduit; and
a fifth conduit disposed between the process volume and the first port of the first muffler.
8. The apparatus of claim 7 , further comprising:
an exhaust conduit extending from the first chamber;
a pump coupled to the exhaust conduit;
a sixth conduit extending from the second port to the exhaust conduit; and
a seventh conduit extending from the pump to the eighth port.
9. The apparatus of claim 7 , wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler is cylindrical.
10. The apparatus of claim 9 , wherein a length of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 60 inches and 100 inches.
11. The apparatus of claim 10 , wherein a diameter of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 20 inches and 40 inches.
12. The apparatus of claim 7 , further comprising:
a ninth port formed in the first muffler adjacent to the second port;
a tenth port formed in the second muffler adjacent to the fourth port;
an eleventh port formed in the third muffler adjacent to the sixth port; and
a twelfth port formed in the fourth muffler adjacent to the eighth port.
13. The apparatus of claim 7 , further comprising:
a first slit valve formed in the second chamber; and
a first slit valve door coupled to an internal surface of the second chamber.
14. The apparatus of claim 13 , further comprising:
a second slit valve formed in the first chamber; and
a second slit valve door coupled to an external surface of the first chamber.