Flip edge shadow frame
Device for processing a substrate are described herein. An apparatus for controlling deposition on a substrate can include a chamber comprising a shadow frame support, a substrate support comprising a substrate supporting surface, a shadow frame with a shadow frame body including a first support surface, a second support surface opposite the first surface, and a detachable lip connected with the shadow frame body. The detachable lip can include a support connection, a first lip surface facing the substrate, a second lip surface opposite the first lip surface, a first edge positioned over the first support surface, and a second edge opposite the first edge to contact the substrate.
1. An apparatus for controlling deposition on a substrate comprising:
a chamber;
a substrate support disposed within the chamber, the substrate support comprising a substrate supporting surface; and
a shadow frame comprising:
a shadow frame body comprising two or more shadow frame body pieces coupled together and having a first support surface facing the substrate supporting surface and a second support surface opposite the first support surface, the second support surface having a recess formed therein;
a detachable lip connected with the shadow frame body and fixably positioned on a lower surface of the recess, the detachable lip comprising two or more detachable lip pieces coupled together and having a support surface edge positioned over the recess, a substrate facing edge positioned over a portion of the substrate supporting surface of the substrate support, a first lip surface facing the substrate support, and a second lip surface opposite the first lip surface, wherein:
a thickness of the detachable lip at the support surface edge is equal to or less than the depth of the recess, and
the thickness of the detachable lip reduces from the support surface edge to the substrate facing edge;
one or more gap covers, wherein each gap cover seals a gap between adjacent shadow frame body pieces, a gap between adjacent detachable lip pieces, and a gap between the adjacent shadow frame body pieces and the adjacent detachable lip pieces; and
one or more support connections formed through the shadow frame body and the one or more gap covers, the one or more support connections connecting the one or more gap covers to the shadow frame and the detachable lip to the shadow frame.
2. The apparatus of claim 1 , wherein the thickness of the detachable lip is between about 2 mm and about 5 mm.
3. The apparatus of claim 1 , wherein the substrate facing edge is an angled edge.
4. The apparatus of claim 1 , wherein an angle between the first lip surface and the second lip surface at the substrate facing edge is between 1 and 2 degrees.
5. The apparatus of claim 1 , wherein the support surface edge is a flat edge, the flat edge configured to rest against a ledge of the recess.
6. The apparatus of claim 1 , wherein the shadow frame body comprises a material selected from the group consisting of ceramic, aluminum, anodized aluminum and a combination thereof.
7. The apparatus of claim 1 , wherein the one or more support connections are flexible connections to allow for thermal expansion.
8. An apparatus for controlling deposition on a substrate comprising:
a chamber comprising a shadow frame support;
a substrate support disposed within the chamber and comprising a substrate supporting surface; and
a shadow frame comprising:
a shadow frame body comprising two or more shadow frame body pieces coupled together and having:
a first support surface facing the substrate supporting surface;
a second support surface opposite the first support surface, the second support surface having a recess formed therein, the recess having:
a lower recess surface; and
a recess ledge; and
an inside edge;
a detachable lip connected with the shadow frame body and fixably positioned in the recess of the second support surface, the detachable lip comprising two or more detachable lip pieces coupled together and having:
a first lip surface facing the substrate supporting surface of the substrate support, wherein a portion of the first lip surface connects with the lower recess surface;
a second lip surface opposite the first lip surface;
a support surface edge positioned adjacent the recess ledge;
a substrate facing edge opposite the support surface edge and positioned over the substrate supporting surface of the substrate support, wherein:
the substrate facing edge is rounded, and
a height of the support surface edge is equal to or less than a height of the recess ledge,
one or more gap covers, wherein each gap cover seals a gap between adjacent shadow frame body pieces, a pap between adjacent detachable lip pieces, and a pap between the adjacent shadow frame body pieces and the adjacent detachable lip pieces; and
one or more support connections formed through the shadow frame body and the one or more gap covers, the one or more support connections connecting the one or more gap covers to the shadow frame and the detachable lip to the shadow frame.
9. The apparatus of claim 8 , wherein the shadow frame body comprises a material selected from the group consisting of ceramic, aluminum, anodized aluminum and a combination thereof.
10. The apparatus of claim 8 , wherein the one or more support connections are flexible connections to allow for thermal expansion.
11. The apparatus of claim 8 , wherein the thickness of the detachable lip is between about 2 mm and about 5 mm.
12. A shadow frame comprising:
a shadow frame body comprising two or more shadow frame body pieces coupled together and having a first support surface and a second support surface opposite the first support surface;
a detachable lip connected with the shadow frame body and fixably positioned on the second support surface, the detachable lip comprising two or more detachable lip pieces coupled together and having a first lip surface facing the second support surface, and a second lip surface opposite the first lip surface;
one or more gap covers, wherein each gap cover seals a gap between adjacent shadow frame body pieces, a gap between adjacent detachable lip pieces, and a gap between the adjacent shadow frame body pieces and the adjacent detachable lip pieces; and
one or more support connections formed through the shadow frame body and the one or more gap covers, the one or more support connections connecting the one or more gap covers to the shadow frame and the detachable lip to the shadow frame.
13. The shadow frame of claim 12 , wherein thickness of the detachable lip is between about 2 mm and about 5 mm.
14. The shadow frame of claim 12 , wherein the shadow frame body comprises a material selected from the group consisting of ceramic, aluminum, anodized aluminum and a combination thereof.
15. The shadow frame of claim 12 , wherein the one or more support connections are flexible connections to allow for thermal expansion.