Semiconductor device including source/drain epitaxial layer having facets and manufacturing method thereof
View Patent ↗A semiconductor device includes a fin structure disposed over a substrate, wherein the fin structure including a channel layer and extending in a first direction, a gate structure including a gate electrode layer and a gate dielectric layer, sidewall spacers disposed on opposite side faces of the gate structure, and a source/drain structure including an epitaxial layer having at least seven facets in a cross section along the first direction.
1. A semiconductor device, comprising:
a fin structure disposed over a substrate, the fin structure including a channel layer and extending in a first direction;
a gate structure disposed over the fin structure and including a gate electrode layer and a gate dielectric layer;
sidewall spacers disposed on opposite sides of the gate structure; and
a source/drain structure including an epitaxial layer having at least seven facets, as interfaces between the epitaxial layer and the fin structure, in a cross section along the first direction.
2. The semiconductor device of claim 1 , wherein one of the seven faces is a (110) facet.
3. The semiconductor device of claim 2 , wherein the (110) facet is parallel to a side face of the gate electrode.
4. The semiconductor device of claim 2 , wherein two of the seven facets are (110) facets.
5. The semiconductor device of claim 2 , wherein one of the seven facets is a (100) facet.
6. The semiconductor device of claim 5 , wherein the (100) facet is a bottom face.
7. The semiconductor device of claim 2 , wherein a length of the (110) facet is at least 5 nm.
8. The semiconductor device of claim 1 , wherein the epitaxial layer includes a first epitaxial layer and a second epitaxial layer disposed on the first epitaxial layer.
9. The semiconductor device of claim 8 , wherein:
the first epitaxial layer includes SiP,
the second epitaxial layer includes SiP, and
a concentration of P in the first epitaxial layer is greater than a concentration of P in the second epitaxial layer.
10. The semiconductor device of claim 8 , wherein:
the first epitaxial layer includes SiGe,
the second epitaxial layer includes SiGe, and
an amount of G in the first epitaxial layer is smaller than an amount of Ge in the second epitaxial layer.
11. A method for manufacturing a semiconductor device, comprising:
forming a fin structure over a substrate, the fin structure including a channel layer exposed from an isolation insulating layer;
forming a gate structure over the channel layer of the fin structure;
forming a recess by removing part of the fin structure not covered by the gate structure;
treating the recess to form an octagonal recess having seven facets; and
forming a source/drain structure in the octagonal recess, the source/drain structure including an epitaxial layer.
12. The method of claim 11 , wherein the treating the recess includes applying a mixture of at least one selected from the group consisting of silicon hydride, silicon halide and silicon hydride-halide, and at least one selected from the group consisting of HCl, NH 3 , NF 3 , NH 2 Cl, CF 4 , CH 3 F, CHF 3 and HF.
13. The method of claim 12 , wherein the mixture includes SiH 4 , HCl and H 2 .
14. The method of claim 12 , wherein the treating is performed at a temperature in a range from 300° C. to 900° C.
15. The method of claim 12 , wherein the treating is performed under a pressure in a range from 1 Torr to 500 Torr.
16. The method of claim 12 , wherein the treating is performed for a time duration in a range from 60 sec to 120.
17. The method of claim 11 , wherein the recess is formed by an isotropic etching.
18. The method of claim 12 , wherein in the treating the recess, a ratio of an etching rate of a (110) face to an etching rate of a (100) face is in a range from 5 to 10.
19. A semiconductor device, comprising:
a fin structure disposed over a substrate, the fin structure including a channel layer and a well layer made of a different material than the channel layer, and extending in a first direction
a gate structure disposed over the fin structure and including a gate electrode layer and a gate dielectric layer;
sidewall spacers disposed on opposite sides of the gate structure; and
a source/drain epitaxial layer embedded in a source/drain region of the fin structure and having at least seven facets in a cross section along the first direction.
20. The semiconductor device of claim 19 , wherein the channel layer and the source/drain region of the fin structure are made of SiGe or Ge.