IP Library Granted Patent US 10,685,982
Granted Patent B2
US 10,685,982 · App. 16/007,973 · Granted Jun 16, 2020

Semiconductor structure

Inventors: Hsueh-Chih Chou (Tainan, TW); Chia Hao Tu (Tainan, TW); Sang Hoo Dhong (Hsin-Chu, TW); Lee-Chung Lu (Taipei, TW); Li-Chun Tien (Tainan, TW); Ting-Wei Chiang (New Taipei, TW); Hui-Zhong Zhuang (Kaohsiung, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
H01L27/11807H01L27/0207H01L2027/11812H01L2027/11814H01L2027/11816H01L2027/11822H01L2027/11848H01L2027/11866H01L2027/11872H01L2027/11874H01L2027/11875
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Quick Facts
Patent No.
US 10,685,982
App. No.
16/007,973
Granted
Jun 16, 2020
Kind
B2
Abstract

A semiconductor structure is disclosed. The semiconductor structure includes: a first standard cell; and a second standard cell; wherein a cell width of the first standard cell along a first direction is substantially the same as a cell width of the second standard cell along the first direction, and a cell height of the first standard cell along a second direction perpendicular to the first direction is substantially greater than a cell height of the second standard cell along the second direction.

Claims (34)

1. A semiconductor structure, comprising:

a first standard cell including a plurality of gate strips arranged therein; and

a second standard cell including a plurality of gate strips arranged therein;

wherein a cell width of the first standard cell along a first direction is substantially the same as a cell width of the second standard cell along the first direction; and

wherein the cell width of the first standard cell is determined according to a number of the gate strips arranged in the first standard cell, and the cell width of the second standard cell is determined according to a number of the gate strips arranged in the second standard cell; and a drivability of the first or second standard cells depends on the corresponding cell height of the first or second standard cells along a second direction perpendicular to the first direction.

2. The semiconductor structure of claim 1 , wherein the first standard cell comprises a first n-type active region and a first p-type active region disposed along the first direction, and the second standard cell comprises a second n-type active region and a second p-type active region disposed along the first direction.

3. The semiconductor structure of claim 2 , wherein the first standard cell further comprises a plurality of first gate strips passing through the first standard cell along the second direction, and the second standard cell further comprises a plurality of second gate strips passing through the second standard cell along the second direction.

4. The semiconductor structure of claim 3 , wherein a number of the first gate strips is substantially the same as a number of the second gate strips.

5. The semiconductor structure of claim 2 , wherein a width of the first n-type active region along the first direction is substantially the same as a width of the second n-type active region along the first direction, and a width of the first p-type active region along the first direction is substantially the same as a width of the second p-type active region along the first direction.

6. The semiconductor structure of claim 2 , wherein a height of the first n-type active region along the second direction is greater than a height of the second n-type active region along the second direction.

7. The semiconductor structure of claim 2 , wherein a height of the first p-type active region along the second direction is greater than a height of the second p-type active region along the second direction.

8. The semiconductor structure of claim 6 , wherein each of the first n-type active region and the second n-type active region comprises a plurality of fin structure, and a number of the fin structures of the first n-type active region is greater than a number of the fin structures of the second n-type active region.

9. The semiconductor structure of claim 7 , wherein each of the first p-type active region and the second p-type active region comprises a plurality of fin structure, and a number of the fin structures of the first p-type active region is greater than a number of the fin structures of the second p-type active region.

10. A semiconductor standard cell structure, comprising:

an n-type active region and a p-type active region side by side disposed along a first direction; and

a plurality of gate strips extending from a bottom to a top of the semiconductor standard cell structure along a second direction perpendicular to the first direction;

wherein within the semiconductor standard cell structure, each of the gate strips passes over only one of the n-type active region or the p-type active region from a top view.

11. The semiconductor standard cell structure of claim 10 , wherein a height of the n-type active region along the second direction is substantially different from a height of the p-type active region along the second direction.

12. The semiconductor standard cell structure of claim 11 , wherein a width of the n-type active region along the first direction is substantially the same as a width of the p-type active region along the first direction.

13. The semiconductor standard cell structure of claim 12 , wherein a distance between a lower boundary of the n-type active region and a lower boundary of the semiconductor standard cell structure is substantially the same as a distance between a lower boundary of the p-type active region and the lower boundary of the semiconductor standard cell structure.

14. The semiconductor standard cell structure of claim 11 , further comprising a reserved region for metal routing, and the reserved region is free from overlapping the n-type active region and the p-type active region.

15. The semiconductor standard cell structure of claim 14 , wherein a height of the reserved region depends on a number of gate strips of the semiconductor standard cell structure.

16. The semiconductor standard cell structure of claim 10 , wherein the semiconductor standard cell structure includes a negative-AND or a transmission gate.

17. The semiconductor standard cell structure of claim 11 , wherein the n-type active region comprises a plurality of first fin structures thereon along the first direction, and the p-type active region comprises a plurality of second fin structures thereon along the first direction, and a number of the first fin structures is different from a number of the second fin structures.

18. A semiconductor structure, comprising:

a first standard cell including:

an n-type active region and a p-type active region side by side disposed along a first direction; and

a plurality of gate strips extending from a bottom to a top of the first standard cell along a second direction perpendicular to the first direction, wherein within the first standard cell, each of the gate strips passes over only one of the n-type active region or the p-type active region of the first standard cell from a top view; and

a second standard cell including:

an n-type active region and a p-type active region side by side disposed along the first direction; and

a plurality of gate strips extending from a bottom to a top of the second standard cell along the second direction, wherein within the second standard cell, each of the gate strips passes over only one of the n-type active region or the p-type active region of the second standard cell from the top view;

wherein a number of the gate strips in the first standard cell is substantially the same as a number of the gate strips in the second standard cell.

19. The semiconductor structure of claim 18 , each of the first standard cell and the second standard cell further including a reserved region for metal routing, and a height of the reserved region of the first standard cell is the same as a height of the reserved region of the second standard cell.

20. The semiconductor structure of claim 18 , wherein a height of the n-type active region is different from a height of the p-type active region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 13, 2018
From: CHOU, HSUEH-CHIH; TU, CHIA HAO; DHONG, SANG HOO; LU, LEE-CHUNG; TIEN, LI-CHUN; CHIANG, TING-WEI; ZHUANG, HUI-ZHONG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
Reel/Frame 046080/0918 →
Continuity (2)
Provisional Application 62592178 · Nov 29, 2017
Related Publication 20190164992A1 · May 30, 2019
Cited By (2)
US 12,307,185 US 12,575,188