Cathode for thin film microbattery
A battery comprising an anode comprising anode material in contact with a metal anode current collector. The battery further comprises a cathode comprising cathode material in contact with a cathode current collector comprising a transparent conducting oxide (TCO). The battery further comprises an electrolyte with a pH in a range of 3 to 7.
1. A method for forming a battery, the method comprising:
fabricating a cathode side including a cathode material located in a cathode cavity formed in a first dielectric element, wherein the cathode cavity extends partially into the first dielectric element and exposes a surface of the first dielectric element;
fabricating an anode side including an anode material located in an anode cavity formed in a second dielectric element, wherein the anode cavity extends partially into the second dielectric element and exposed a surface of the second dielectric element; and
joining the cathode side and the anode side in a complanate manner.
2. The method of claim 1 , wherein the joining the cathode side and the anode side in a complanate manner comprises:
bonding polymer bondable seal material portions located in the anode side to bonding polymer bondable seal material portions located in the cathode side.
3. The method of claim 2 , wherein the bonding comprises curing.
4. The method of claim 2 , wherein the bondable seal material portions located in the anode side to bonding polymer bondable seal material portions located in the cathode side are electrically conductive.
5. The method of claim 2 , wherein the bondable seal material portions located in the anode side to bonding polymer bondable seal material portions located in the cathode side are photopatterned polymer bondable seal materials that are photo-definable.
6. The method of claim 1 , wherein the first and second dielectric elements comprise a flexible polymer.
7. The method of claim 1 , wherein each of the first and second dielectric elements is present on a handle substrate and each handle substrate is removed after the joining.
8. The method of claim 1 , wherein the fabricating the cathode side comprises:
forming an adhesion metal layer in the cathode cavity and on a topmost surface of the first dielectric element;
forming a transparent conductive oxide layer on the adhesion metal layer; and
removing end portions of the transparent conductive oxide and the adhesion metal layer that are present on the topmost surface of the first dielectric element.
9. The method of claim 8 , wherein the removing the end portions of the transparent conductive oxide and the adhesion metal layer comprises a subtractive photolithographic technique.
10. The method of claim 8 , further comprising:
forming polymer bondable seal material portions on portions of the transparent conductive oxide layer, while maintaining a surface of the transparent conductive oxide layer that is located within the cathode cavity physically exposed.
11. The method of claim 10 , further comprising:
forming the cathode material in the cathode cavity and directly contacting the physically exposed surface of the transparent conductive oxide.
12. The method of claim 1 , wherein the fabricating the anode side comprises:
forming an adhesion metal layer in the anode cavity and on a topmost surface of the second dielectric element;
forming a seed metal layer on the adhesion metal layer;
forming the anode material on a portion of the seed metal layer that is located in the anode cavity; and
removing end portions of the seed metal layer and adhesion metal layer that are present on the topmost surface of the second dielectric element.
13. The method of claim 12 , wherein the end portions of the seed metal layer and adhesion metal layer comprises a subtractive photolithographic technique.
14. The method of claim 12 , further comprising:
forming polymer bondable seal material portions on portions of the seed metal layer, while maintaining a surface of the seed metal layer that is located within the anode cavity physically exposed.
15. The method of claim 14 , further comprising:
forming electrolyte in the anode cavity and directly contacting the physically exposed surface of the anode material.