Chalcogenide glass waveguides for refractive non-mechanical beam steerer

1. A method for making a chalcogenide glass waveguide for use in a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the wave aide core has a higher refractive index than the tapered subcladding;

wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass; and

wherein one or more obstructions are placed between the substrate and the mask.

2. The method of claim 1 , wherein the substrate comprises Si.

3. The method of claim 1 , wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF 2 , silicate glass, germinate glass, fluoride glass, MgF 2 glass, or any combination thereof.

4. The method of claim 1 , wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

5. A method for making a chalcogenide glass waveguide for use in a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding;

wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass; and

wherein more than one mask is used.

6. The method of claim 5 , wherein the substrate comprises Si.

7. The method of claim 5 , wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF 2 , silicate glass, germinate glass, fluoride glass, MgF 2 glass, or any combination thereof.

8. The method of claim 5 , wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

9. A method for making a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding, and wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass;

depositing a liquid crystal layer on the waveguide core; and

placing a glass plate patterned with top electrodes on the liquid crystal layer;

wherein the liquid crystal layer comprises an organic material that is transparent in the midwave infrared.

10. The method of claim 9 , wherein the substrate comprises Si.

11. The method of claim 9 , wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF 2 , silicate glass, germinate glass, fluoride glass, MgF 2 glass, or any combination thereof.

12. The method of claim 9 , wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

13. A method for making a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding, and wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass;

depositing a liquid crystal layer on the waveguide core; and

placing a glass plate patterned with top electrodes on the liquid crystal layer;

wherein one or more obstructions are placed between the substrate and the mask.

14. The method of claim 13 , wherein the substrate comprises Si.

15. The method of claim 13 , wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF 2 , silicate glass, germinate glass, fluoride glass, MgF 2 glass, or any combination thereof.

16. The method of claim 13 , wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

17. A method for making a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding, and wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass;

depositing a liquid crystal layer on the waveguide core; and

placing a glass plate patterned with top electrodes on the liquid crystal layer;

wherein more than one mask is used.

18. The method of claim 17 , wherein the substrate comprises Si.

19. The method of claim 17 , wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF 2 , silicate glass, germinate glass, fluoride glass, MgF 2 glass, or any combination thereof.

20. The method of claim 17 , wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.