Polarizers for image sensor devices
View Patent ↗The present disclosure is directed to a method of forming a polarization grating structure (e.g., polarizer) as part of a grid structure of a back side illuminated image sensor device. For example, the method includes forming a layer stack over a semiconductor layer with radiation-sensing regions. Further, the method includes forming grating elements of one or more polarization grating structures within a grid structure, where forming the grating elements includes (i) etching the layer stack to form the grid structure and (ii) etching the layer stack to form grating elements oriented to a polarization angle.
1. A composite grid structure, comprising:
a first group of cells comprising a first color filter;
a second group of cells comprising a second color filter different from the first color filter;
a third group of cells comprising a third color filter different from the first and second color filters, wherein cells from the first, second, and third groups are disposed next to each other;
a first cell comprising first grating elements aligned at a first angle;
a second cell comprising second grating elements aligned at a second angle;
a third cell comprising third grating elements aligned at a third angle; and
a fourth cell comprising fourth grating elements aligned at a fourth angle, wherein each of the first, second, third, and fourth angles are different from each other and wherein the first, second, third, or fourth cells are disposed between the cells of the first, second, and third groups.
2. The composite grid structure of claim 1 , wherein:
the first with the second angles are supplementary; and
the third with the fourth angles are supplementary.
3. The composite grid structure of claim 1 , wherein the first, second, third, and fourth cells are arranged at a corner of the composite grid structure.
4. The composite grid structure of claim 1 , wherein each of the first, second, third, and fourth cells are disposed between the cells of the first, second, and third groups.
5. A grating structure, comprising:
a composite layer on a substrate, wherein the composite layer comprises:
a first layer on the substrate; and
a second layer, different from the first layer, disposed on the first layer;
openings in the composite layer traversing through the first and second layers, exposing a portion of the substrate, and forming a plurality of grating elements on the substrate spaced apart by the openings, wherein the grating elements are oriented at an angle of about 0°, about 45°, about 90°, or about 135° with sidewalls of the grating structure surrounding the plurality of grating elements, and
a capping layer disposed within the openings and covering sidewall and bottom surfaces of the grating elements and the exposed portion of the substrate.
6. The grating structure of claim 5 , wherein the first layer is a metal and the second layer is a dielectric layer.
7. The grating structure of claim 5 , wherein a space between two neighboring grating elements is between about 100 nm and about 500 nm.
8. The grating structure of claim 5 , wherein the openings have a depth between about 200 nm and about 1000 nm.
9. The grating structure of claim 5 , wherein the metal layer comprises tungsten, titanium, aluminum, or copper, and the dielectric layer comprises silicon oxynitride, silicon nitride, silicon carbide, silicon oxide, or a polymer.
10. The grating structure of claim 5 , wherein the openings are filled with a dielectric material transparent to light.
11. The grating structure of claim 5 , wherein the plurality of grating elements are parallel to each other.
12. The grating structure of claim 5 , wherein the plurality of grating elements form a light polarizer.
13. A structure, comprising:
first and second cells arranged in a matrix configuration having horizontal rows and vertical columns;
spaced apart grating elements in the first cells, wherein the grating elements in each first cell are parallel to each other, form an angle with sidewalk of the first cell, and comprise a stack of a first layer and a second layer; and
a color filter in each cell of the second cells.
14. The structure of claim 13 , wherein the first layer comprises a metal layer and the second layer comprises a dielectric.
15. The structure of claim 13 , wherein the first cells are located at a corner of the matrix configuration.
16. The structure of claim 13 , wherein the grating elements have a height between about 200 nm and about 1000 nm.
17. The structure of claim 13 , wherein the color filter comprises red, blue, or green.
18. The structure of claim 13 , wherein the angle formed between the grating elements and the sidewalls of the first cell is about 135°.
19. The structure of claim 13 , wherein a pitch between two neighboring grating elements in the first cell is between 100 nm and about 500 nm.
20. The structure of claim 13 , wherein the grating elements and the sidewalls of the first cell have a substantially equal height.